Static pressure air suspension direct drive turntable

Abstract

The invention relates to a static pressure air suspension direct drive turntable, which comprises a base, a base connection block, a rotating shaft, a torque motor rotor, a torque motor stator and a torque motor installation frame, wherein the torque motor rotor is fixedly installed on the rotating shaft, and the torque motor stator is connected with the torque motor installation frame; an upper air suspension ring is installed at the upper part of the rotating shaft, and a first air bearing assembly which corresponds to the upper air suspension ring is arranged above the torque motor installation frame; a lower air suspension ring is installed at the lower part of the rotating shaft, and a second air bearing assembly which corresponds to the lower air suspension ring is arranged below the torque motor installation frame; and the base connection block is arranged below the second air bearing assembly, the base is arranged below the base connection block, and the base connection block and the base form a third air suspension bearing assembly. The static pressure air suspension direct drive turntable has high dynamic and static performance and precision, and the comprehensive requirements on the moving performance, bearing capability and no working environment pollution of the turntable under the limiting operating conditions of advanced electronic manufacturing, optical detection and manufacturing and the like can be simultaneously satisfied.

Description

technical field [0001] The invention relates to a direct drive turntable, in particular to a static pressure air flotation direct drive turntable. Background technique [0002] In the prior art, in advanced electronic manufacturing, optical inspection and manufacturing equipment, not only the turntable is required to have high precision performance, but also the turntable is required to meet the high clean working environment. There are mainly two types of existing precision positioning turntables: 1. The traditional "rotary motor and reducer" method is used for driving, and traditional mechanical bearings are used for platform support. Due to the defects of the rotating motor, this type of turntable is impossible It has a large acceleration and speed. In addition, due to the existence of the deceleration transmission link, the dynamic performance of the turntable is reduced, and it cannot avoid the error caused by the gear gap. Second, the turntable driven by a torque m...

AI Technical Summary

Problems solved by technology

There are mainly two types of existing precision positioning turntables: 1. The traditional "rotary motor and reducer" method is used for driving, and traditional mechanical bearings are used for platform support. Due to the defects of the rotating motor, this type of turntable is impossible It has a large acceleration and speed. In addition, due to the existence of the deceleration transmission link, the dynamic performance of the turntable is reduced, and it cannot avoid the error caused by the gear gap. Second, the turntable driven by a torque motor is still on the motion support of the turntable. Mechanical bearing structure

These two types of turntables will have disadvantages such as friction, wear, mechanical vibration, and noise in the transmission link of mechanical motion, which will not only affect the dynamic performance and positioning accuracy of the turntable, but also produce oil, particles and other pollutants, which cannot meet the requirements of advanced electronic manufacturing. , optical inspection and manufacturing and other high-clean working environment requirements

Images