49 results about "Piezoelectric tube" patented technology

The invention relates to a flexural vibration modality ultrasonic micro-motor based on the polyhedral piezoelectric pole or piezoelectric pipe, belonging to the field of ultrasonic application. The invention comprises a stator vibrated by actuating ultrasonic, a rotor for putting torque or an axis connecting rotor, and a pre-pressure unit for pressing rotor. Wherein, said stator is mainly formed by a piezoelectric ceramic component for actuating vibration and its matching blocks, which is characterized in that: said piezoelectric ceramic component for actuating flexural vibration is polyhedral piezoelectric pole or piezoelectric pipe, whose surfaces of external wall are plated with a plurality of external electrodes for polarization and actuating vibration. The inventive motor has a wide size to be processed, which improves the minimization of ultrasonic motor. And, when inputting the electrical signal, the rotator can rotate on the surface of stator. Said invention has wider application in the fields of biology, medical treatment, micro-mechanism, precision electronic mechanism and the national defence.

The invention relates to a three-friction-force piezoelectric stepper pushed by two embedded piezoelectric tubes, and a stepping scanner and relates to piezoelectric steppers. The piezoelectric stepper comprises two piezoelectric tubes, two protection sheets, a base and a guider, wherein one of the two piezoelectric tubes fixedly stands on the base to form an inner piezoelectric tube and the other piezoelectric tube is sleeved outside the inner piezoelectric tube and fixedly stands on the base to form an outer piezoelectric tube; the piezoelectric telescopic directions of the two piezoelectric tubes are axial; the two protection sheets are arranged at the free ends of the two piezoelectric tubes respectively; the guider is arranged inside the inner piezoelectric tube or outside the outer piezoelectric tube or in a gap between the outer wall of the inner piezoelectric tube and the inner wall of the outer piezoelectric tube; and positive pressure for pressing the base and the two protection sheets against the guider respectively is set in a direction vertical to the piezoelectric telescopic direction. By the three-friction-force piezoelectric stepper, larger thrust can be generated under the condition that the size is not increased obviously and a stack is not used; and high-precision stepping and scanning work can be finished at lower temperature.

A scanning probe microscope (SPM) has a piezoelectric actuator-based tube scanner to which a probe is attached and which is moveable in three planes by the application of a voltage to the piezoelectric tube. A set of flexures flex with the displacement of the tube and strain gauges attached to the flexures measure the flex of the flexures to provide feedback as to the displacement of the tube during the scanning of an object. The strain gauges and flexures form a kinematic sensing frame or arrangement in which a single constraint is provided for each degree of freedom and in which the constraints are at least substantially orthogonal to one another.

The present invention provides a high precision three-dimensional alignment system using SPM techniques and method of using the same. The system comprises a fine distance control unit for the effective three-dimensional micromovement in the nanometer range of a planar object, and proximity detection unit to monitor the alignment process. In the preferred embodiment, the fine distance control unit comprises a set of at least three strategically positioned fine distance control elements which are capable of controlled expansion and contraction in the nanometer range. The most preferred embodiment of the fine distance control element comprises a piezoelectric tube, which crystal size may be varied by varying an applied voltage. This system may be applied to microlithography, in which case the planar object is a scribing tool having a planar base with multiple tips fabricated on one surface.

A motion actuator comprises a cylindrical movable shaft and a stage that contains an expansible/contractible device and two clamps. The expansible/contractible device can be controlled to drive the axial motion of the movable shaft, and the two clamps can be controlled to grip/release the shaft. The two clamps and the expansible/contractible device are each controlled by a bimorph structure, which comprises a cut cylindrical piezoelectric tube section in a hole enclosed by a thin wall in the stage. By sequentially activating the three piezoelectric tube sections, axial motions of the movable shaft relative to the stage in small steps are made. Each of the two clamps can be adjusted by a screw, which presses a spring structure that makes contact with the top surface of the movable shaft, so that the clamps can grip the movable shaft firmly when actuated, but not when not actuated. The flat top surface of the movable shaft is designed to inhibit the possible rotation along its axis during its axial motion. The shaft is supported by two lines at the bottom of each of the two clamps to reduce the contact area, which improves the reliability of the motion.

The invention provides a defect inspecting apparatus and a defect detecting method for specifying a position of a defect before polarization when the defect is included in a coaxial flexible piezoelectric member. Further, when a piezoelectric tube is moved in polarization, a friction force is produced between the coaxial flexible piezoelectric member and a block-like conductor and therefore, a large force is needed in moving the piezoelectric tube. The invention provides a polarizing apparatus and a polarizing method capable of moving the piezoelectric tube even by a small force.

There are provided a defect detecting apparatus of a coaxial flexible piezoelectric member having a constitution of applying a direct current to a coaxial flexible piezoelectric member while moving a piezoelectric tube arranged at a hole of inspecting electrode means and a marking apparatus for marking a defect portion. Thereby, when a defect is present at a portion thereof arranged at the hole of the inspecting electrode means, electricity is discharged at the defect portion and therefore, the defect portion can be specified and the mark can be attached to the defect portion. Further, a conductive block provided with a path portion of the piezoelectric tube is divided. By dividing the block-like conductor by a plural number, a friction force between the block-like conductor per divided one and the piezoelectric tube is reduced. Further, the piezoelectric tube can be moved by a small force by a pulley arranged at a fold back portion of the piezoelectric tube.

Methods and apparatuses are described for adaptively tracking a feature of a sample using a scanning probe microscope. The adaptive technique provides an adaptive method for tracking the feature scan-to-scan despite actual or apparent changes in feature shape due, for example, to an evolving/transitioning state of the sample, and/or actual or apparent changing position due, for example, to movement of the sample and/or drift of the piezoelectric tube actuator. In a preferred embodiment, each scan may be processed line-by-line, or subpart-by-subpart, and may be analyzed either in real time or off-line. This processing technique improves speed, processing, reaction, and display times.

The invention relates to a non-microbot scanning force microscope body of a fixed probe and oscillated sample type, in particular to a scanning probe microscope which comprises a probe, a sample, a vibrator and a localizer, wherein the localizer is arranged between the probe and the vibrator, and the probe points to the sample fixed on the vibrator; the localizer comprises an XYZ positioning piezoelectric tube, a probe seat and a vibrator seat, the probe seat and the vibrator seat are respectively arranged at both ends of the XYZ positioning piezoelectric tube, and the probe and the vibrator are respectively fixed on the probe seat and the vibrator seat; the probe is a discrete non-microbot probe, and the vibrator is a piezoelectric vibrator, a crystal vibrator, a quartz crystal vibrator or a quartz micro fork. The invention has the advantages that the discrete non-microbot probe, such as an STM (Scanning Tunneling Microscope) probe, can be used, the cost of the probe is greatly decreased for benefiting the occurrence and the popularization of a microscope with better scanning force, the use of the crystal vibrator with high-quality factors can improve the frequency resolution and the measurement accuracy, and the addition of an auxiliary vibrator between the localizer and the vibrator can also obtain small-amplitude vibration so as to improve the measurement sensitivity of short range force and the atom resolution.

The invention relates to a double-piezoelectric tube-nested mechanical parallel-structure high-stability scanner and a scanning probe microscope. The double-piezoelectric tube-nested mechanical parallel-structure high-stability scanner comprises two piezoelectric tubes; the two piezoelectric tubes are coaxially nested together; two ends of the inner piezoelectric tube are respectively fixed to twoends of the external piezoelectric tube, so that a double-tube-nested mechanical parallel-structure can be formed, which is equivalent to the increase of the effective mechanical wall thickness of the scanner, and therefore, the scanner can be stronger and firmer, the seismic resistance and stability of the scanner are enhanced, and the scanner is very suitable for scanning imaging in extreme andharsh environments; and the inner piezoelectric tube and the outer piezoelectric tube can be simultaneously elongated or shortened in a Z direction, and therefore, the piezoelectric extension lengthof the piezoelectric scanner in the Z direction will not be decreased, and a necessary condition that the extension length of the piezoelectric scanner in the Z direction is large enough, which is required by the scanning probe microscope, can be satisfied.

Beam steering systems and methods are disclosed according to various embodiments. A beam steering system may include a laser that produces a beam of light. The beam of light may then be directed through a piezoelectric tube that includes a light guide and one or more piezoelectric elements. The piezoelectric tube is coupled with the light source, such that the beam of light is conducted through the light guide. The piezoelectric tube is coupled with a scanning optical element that includes an optical element and a steering device. A controller may be communicatively coupled with the light source, the piezoelectric tube and the scanning optical element. The controller may include instructions to dither the beam of light with the piezoelectric tube and/or instructions to steer the beam of light with the scanning optical element.

The invention discloses a built-in piezoelectric energy storage type oil leakage detection and early warning hydraulic shock absorber. The hydraulic shock absorber comprises a piston cylinder. A piston plate is installed in the piston cylinder in a sealed and sliding mode, a piston rod is inserted into one end of the piston cylinder in a sealed and sliding mode, the end, close to the piston plate,of the piston rod extends into the piston cylinder and is fixed to the piston plate, a plurality of right-angle elbows are symmetrically arranged on the inner wall of the piston cylinder, piezoelectric tubes are jointly welded between every two opposite right-angle elbows in a sealed mode, an energy storage detection sleeve is installed at the end, away from the piezoelectric tubes, of the pistoncylinder, and the piston rod is rotatably inserted into the energy storage detection sleeve. According to the hydraulic shock absorber, a plurality of arc-shaped piezoelectric patches on the piezoelectric tubes generate electric energy through the continuously changing pressure difference generated by the work of the shock absorber, an external function is not needed, and the electric intubationtube realizes the functions of real-time detection and timely alarm through the conduction of an electric fork by utilizing the characteristics of oil absorption and expansion of annular expansion resin.

The invention discloses a multi-axis coupling hysteresis prediction method for a piezoelectric actuator of an atomic force microscope, which comprises the following steps of: acquiring a displacement time sequence generated by coupling of a Y axis of an X axis of a piezoelectric tube scanner of the atomic force microscope, lifting original data to a high-dimensional space by using an observation function and a Koopman operator, expressing a multi-axis coupling nonlinear relationship by using a linear equation, and predicting the hysteresis of the piezoelectric actuator of the atomic force microscope. Wherein a Hank matrix is constructed by utilizing lifting data, modal information of a system is obtained by utilizing two-time dimensionality reduction, and finally, establishment of a multi-axis coupling model is realized. According to the prediction method designed by the invention, multi-axis coupling of the piezoelectric tube scanner of the atomic force microscope can be modeled, multi-axis coupling displacement can be predicted, high-speed and high-precision imaging of the atomic force microscope can be effectively improved in later control, and the method can be popularized in other piezoelectric ceramic driver products.

The invention discloses a piezoelectric patch assembled piezoelectric tube which is produced with a new technology that piezoelectric patches are spliced and can be in any polygonal shape. The piezoelectric tube can be realized by fixing gaps between the adjacent piezoelectric patches or two ends of the piezoelectric tube, side gaps can be fixed or not fixed, and one of fixing methods is an epoxy resin adhesive bonding method. The production cost is greatly reduced, limitation of the existing piezoelectric tube production technology in production parameters such as inner diameters, wall thicknesses and the like is broken through, and the piezoelectric tube has larger size selection space and can be applied to fields of piezoelectric motors of scanning probe microscopy, scanners, adjustment of optical slits and the like.

The invention relates to a tube-type approximation and imaging unit mechanical tandem type scanning tunneling microscope body. The tube-type approximation and imaging unit mechanical tandem type scanning tunneling microscope body comprises a base, a sliding rod, a sleeve and a spring piece, and is characterized by further comprising a first piezoelectric tube, a second piezoelectric tube and a probe bracket, wherein one end of the first piezoelectric tube is fixed on the base, and the other end is connected and fixed to the second piezoelectric tube in a tandem manner in the axial direction; the sleeve is concentrically and coaxially fixed to the deformation free end of the second piezoelectric tube; the spring piece exerts pressure in the radial direction of the sleeve to clamp the sliding rod to the inner wall of the guide rail; the sliding direction of the sliding rod is in the axial direction of the sleeve; and the probe bracket and the second piezoelectric tube are concentricallyand coaxially arranged, and one end of the probe bracket is fixed to a tandem connection position of the first piezoelectric tube and the second piezoelectric tube. The tube-type approximation and imaging unit mechanical tandem type scanning tunneling microscope body is highly compact in radial and axial structures, the second piezoelectric tube is further used for approximating low starting voltage capable of realizing a needle sample approximation step, high rigidity of the scanning unit is ensured, the main body is made of an insulating material, the cross section of the structure is free of a conductive loop, and the tube-type approximation and imaging unit mechanical tandem type scanning tunneling microscope body is particularly suitable for extreme physical conditions of extremely low temperature, strong/fast changing magnetic field and strong vibration.

The invention discloses a flexible digital panel based on an array transistor sensor. The flexible digital panel comprises a top packaging layer, a data acquisition layer and a bottom packaging layer,wherein the data acquisition layer comprises a row scanner, a top electrode, a flexible array transistor layer, a column scanner and a bottom electrode; a piezoelectric semiconductor transistor or apiezoelectric MOS transistor is adopted as a basic unit of the array transistor sensor. For an N*M transistor sensor array, an ith output line of the top electrode and a jth output line of the bottomelectrode correspondingly output current information Iij of a transistor sensor unit at a two-dimensional plane position (i, j) of the digital panel, and then the current information Iij is convertedinto voltage information Uij through an information acquisition and conversion circuit to represent pressure information. According to the flexible digital panel, the flexible digital panel is endowedwith bendable and foldable performance and a brand-new working mechanism in the aspects of working principle and structural construction.

The invention discloses a piezoelectric ceramic shallow full-wave exploration transducer. Multiple piezoelectric tubes are used to replace a piezoelectric plate to serve as an acoustoelectric conversion device inside the piezoelectric ceramic shallow full-wave exploration transducer; and the inherent frequency obtained after mass blocks and the piezoelectric tubes are combined is approximate to the frequency of an actual signal, so that receiving sensitivity is high. The multiple piezoelectric tubes are used and connected in a mechanical series connection or parallel connection mode, and therefore the inherent frequency of mechanical vibration can be adjusted to improve the receiving sensitivity. The piezoelectric tubes are connected in series or parallel through electric signals, whereinin case of series connection, the signals are added, and the voltage is large; and in case of parallel connection, currents are added, and the final current is large. By use of the transducer with thepiezoelectric tubes, electric signal amplitude in high-frequency vibration conversion is large, the frequency is high, and the resolution on a stratum is high. The transducer can effectively measurethe stratum sound velocity and wave impedance of a medium at the depth of underground shallow 10-200 meters.

The invention discloses a multi-sample rapid replacement type scanning probe microscope, which comprises a sample table, probes, an XY limiting device, a mass block, a scanning tube and a piezoelectric tube, and is characterized in that one of the sample table and the probes is arranged on the mass block, the other one is arranged at the free end of the scanning tube, and the probes are opposite to the middle position of the sample table in an initial state; the mass block is arranged in the XY limiting device, the mass block is installed at the top end of the piezoelectric tube, a peak signalis applied to the piezoelectric tube, and the mass block is driven to move in the XY direction in the XY limiting device by controlling the piezoelectric tube to swing; one of the scanning tube and the piezoelectric tube is connected with the driving mechanism, and the other is connected with the base. By moving the mass block in the two-dimensional direction, samples at the four corners and thecenter of the sample table can be accurately located under the scanning tube, and sequential scanning and rapid switching of various samples can be achieved.

The invention discloses an array ink jet head which comprises a flow guide plate layer, a piezoelectric pipe array layer and a nozzle plate layer connected sequentially. The flow guide plate layer isprovided with a plurality of drainage channels, the flow guide plate layer is provided with an electrode, the piezoelectric pipe array layer comprises a plurality of piezoelectric pipes, the connectedpiezoelectric pipes are arranged in an array, each piezoelectric pipe is made from a piezoelectric ceramic material, the electrode can transfer a piezoelectric signal to the inner and outer walls ofeach piezoelectric pipe, the nozzle plate layer comprises a plurality of jet channels, the drainage channels and the jet channels are consistent to the piezoelectric pipes in quantity, and each piezoelectric pipe is provided with the drainage channel and the jet channel aligned to the piezoelectric pipe. According to the array ink jet head, the piezoelectric pipes are integrated in the array to improve the arranging density of the nozzles, so that the ink-jet printing resolution is improved, and meanwhile, the piezoelectric pipes work simultaneously, so that the ink-jet printing efficiency isimproved.

The invention provides an LED stroboflash-free control circuit. A current mirror composed of M1 and M2 realizes current mirror image. A piezoelectric tube M3 improves a grid control voltage of the current mirror and reduces the mirror image proportion of the current mirror. A current-limiting resistor limits a current on an On circuit. An anti-current-backflow diode D1 prevents the current from flowing backwards into the current mirror. A charging capacitor C1 is used for storing a voltage, and a follow current loop D2 continuously provides a current for an LED lamp. The current mirrored by the current mirror and the current generated by the follow current loop ensure that the controllable gauge dimmer maintains the On state of the circuit, thereby reducing the flicker index. Meanwhile, the circuit also can guarantee that the input current and the input voltage have the same phase, and guarantees that a high power factor exists. The circuit has the advantages of simple circuit structure, obvious stroboscopic effect removal, small chip area, low cost and high power factor.