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Piezoelectric patch assembled piezoelectric tube

A piezoelectric sheet and assembly technology, applied in the field of piezoelectric components, to achieve the effect of thicker, free inner diameter and low cost

Inactive Publication Date: 2015-07-15
HENAN NORMAL UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The present invention provides a piezoelectric tube assembled with piezoelectric sheets in order to solve the many shortcomings of the existing integrally formed piezoelectric tube

Method used

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  • Piezoelectric patch assembled piezoelectric tube

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0042] The most commonly used inner and outer wall electrodes are quartered and the entire gap is fixed on the side of the piezoelectric tube

[0043]Use epoxy resin glue to fix the piezoelectric film, and choose one of them such as 353ND. The four piezoelectric sheets have the same size, are all polarized in the thickness direction, and the two widest surfaces have been plated with electrodes. The size of a single piezoelectric sheet is 20*6*1mm. Adjust the insulating epoxy resin AB glue 353ND according to the instructions in the manual, and assemble the above four piezoelectric sheets 1 into a square structure with a cross section and fix it, and then place the four slits formed by the four pairs of nearest sides Apply the adjusted connector 2 353ND glue, and finally move it into the oven smoothly and bake at 100°C for 10 minutes, so that the above four piezoelectric sheets are cured into a piezoelectric square tube whose inner and outer wall electrodes have been quartered....

Embodiment 2

[0047] Piezoelectric tube with both ends fixed by the base plate

[0048] In the above-mentioned embodiment, four pieces of piezoelectric sheets 1, all of which are polarized in the thickness direction, have the same size and have been plated with electrodes, are combined into a structure with a square cross section and fixed, and the upper and lower bottom surfaces are ringed with connectors 2. Oxygen resin cement, such as 353ND glue, forms a piezoelectric body on two bottom plates 3 with a certain hardness. The bottom plate is a sapphire sheet, glass sheet, stainless steel sheet or brass sheet. The shape of the bottom plate is round or square. Such as Figure 2-3 shown. The gaps between the piezoelectric sheets may be fixed by connecting bodies, or may not be fixed by connecting bodies.

Embodiment 3

[0050] Piezoelectric tube fixed only at both ends of the slit

[0051] In Example 2, four piezoelectric sheets 1, all of which are polarized in the thickness direction, have the same size, and have been plated with electrodes, are put together into a structure with a square cross section and fixed, and the gaps at the upper and lower ends are connected with connectors. 2 Epoxy resin adhesive, such as 353ND adhesive, such as Figure 4-6 shown.

[0052] The piezoelectric tube with only the gaps at both ends bonded and fixed by this method is especially suitable for the GeckoDrive piezoelectric motor described in REVIEW OF SCIENTIFIC INSTRUMENTS 84, 056106 (2013) and REVIEW OF SCIENTIFIC INSTRUMENTS 84, 113703 (2013).

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Abstract

The invention discloses a piezoelectric patch assembled piezoelectric tube which is produced with a new technology that piezoelectric patches are spliced and can be in any polygonal shape. The piezoelectric tube can be realized by fixing gaps between the adjacent piezoelectric patches or two ends of the piezoelectric tube, side gaps can be fixed or not fixed, and one of fixing methods is an epoxy resin adhesive bonding method. The production cost is greatly reduced, limitation of the existing piezoelectric tube production technology in production parameters such as inner diameters, wall thicknesses and the like is broken through, and the piezoelectric tube has larger size selection space and can be applied to fields of piezoelectric motors of scanning probe microscopy, scanners, adjustment of optical slits and the like.

Description

technical field [0001] The invention belongs to the technical field of piezoelectric components, in particular to a piezoelectric tube assembled with piezoelectric sheets. Background technique [0002] With the rapid development of micro-nano technologies such as nano-level high-precision positioning, scanning, manipulation, and DNA molecular surgery, piezoelectric tubes have been widely used for their advantages of simultaneously realizing three-dimensional nano-precision movement and control, rich functions, and high integration. Applications. However, at present at home and abroad, the manufacturing process of piezoelectric tubes has led to extremely high cost of piezoelectric tubes. The market price of a piezoelectric tube with quartered electrodes is as high as 500 US dollars, while a piezoelectric sheet of similar size is less than 15 US dollars. , and the inner diameter, outer diameter and wall thickness of the produced piezoelectric tubes have relatively large limit...

Claims

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Application Information

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IPC IPC(8): H01L25/07H01L23/31
Inventor 李全锋张宗哲智刚峰孙涵崔明焕赵雯王凯涛
Owner HENAN NORMAL UNIV
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