Double-piezoelectric tube-nested mechanical parallel-structure high-stability scanner and scanning probe microscope

A piezoelectric tube and bi-piezoelectric technology, applied in the field of scanning probe microscopes, can solve the problems of poor rigidity, reduced piezoelectric expansion length, small wall thickness, etc., to achieve strong anti-vibration interference, enhanced anti-vibration and stability Sexual and rigid effect

Inactive Publication Date: 2018-05-29
合肥中科微力科技有限公司 +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The present invention aims to solve the contradiction that existing single-tube piezoelectric scanners have small wall thickness and poor rigidity, and simply increasing the wall thickness will

Method used

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  • Double-piezoelectric tube-nested mechanical parallel-structure high-stability scanner and scanning probe microscope
  • Double-piezoelectric tube-nested mechanical parallel-structure high-stability scanner and scanning probe microscope
  • Double-piezoelectric tube-nested mechanical parallel-structure high-stability scanner and scanning probe microscope

Examples

Experimental program
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Effect test

Embodiment 1

[0033]Example 1: The external piezoelectric tube is a four-quadrant dual piezoelectric tube nested mechanical parallel high-stable scanner

[0034] See attached figure 1 , the external piezoelectric tube of the present invention is a four-quadrant double piezoelectric tube nested mechanical parallel high-stable scanner, comprising two piezoelectric tubes 1, 2, characterized in that the two piezoelectric tubes are coaxially nested with each other , the piezoelectric tube set outside is the outer piezoelectric tube 1, and the piezoelectric tube set inside is the inner piezoelectric tube 2, the outer piezoelectric tube 1 is a four-quadrant XYZ three-dimensional positioning piezoelectric tube, the inner piezoelectric tube The piezoelectric tube 2 is a Z-direction positioning piezoelectric tube with a single electrode on the inner and outer surfaces. The two ends of the inner piezoelectric tube are respectively fixed to the two ends of the outer piezoelectric tube, and the capacit...

Embodiment 2

[0037] Example 2: Both internal and external piezoelectric tubes are four-quadrant double piezoelectric tubes nested mechanical parallel high stability scanner

[0038] See attached figure 2 In the above example, the inner piezoelectric tube 2 can be a four-quadrant XYZ three-dimensional piezoelectric tube, and its four quadrants are respectively opposite to the four quadrants of the outer piezoelectric tube 1, and the four-quadrant inner electrodes 6a, 6b, 6c, 6d and the four-quadrant external electrodes 7a, 7b, 7c, 7d of the internal piezoelectric tube 2 are responsible for scanning in the X and Y directions, the external electrode 5 of the external piezoelectric tube 1 and the internal electrode 8 of the internal piezoelectric tube 2 Responsible for scanning in the Z direction, and the inner and outer piezoelectric tubes expand or contract synchronously in the Z direction. This not only increases the effective mechanical wall thickness of the scanner (equivalent to the su...

Embodiment 3

[0040] Example 3: The internal piezoelectric tube is a four-quadrant dual piezoelectric tube nested mechanical parallel high-stable scanner

[0041] See attached image 3 , in Embodiment 2, the outer piezoelectric tube 1 can be a piezoelectric tube positioned in the Z direction with a single electrode on the inner and outer surfaces. The four-quadrant internal electrodes 8a, 8b, 8c, and 8d of the internal piezoelectric tube 2 are responsible for scanning in the X and Y directions, and the external electrodes 7 of the internal piezoelectric tube 2 and the external electrodes 5 and 6 of the external piezoelectric tube 1 are responsible for the Z direction. Scanning, and the inner and outer piezoelectric tubes expand or contract synchronously in the Z direction. This not only increases the effective mechanical wall thickness of the scanner (equivalent to the sum of the wall thicknesses of the inner and outer piezoelectric tubes), but also improves the rigidity and stability of t...

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Abstract

The invention relates to a double-piezoelectric tube-nested mechanical parallel-structure high-stability scanner and a scanning probe microscope. The double-piezoelectric tube-nested mechanical parallel-structure high-stability scanner comprises two piezoelectric tubes; the two piezoelectric tubes are coaxially nested together; two ends of the inner piezoelectric tube are respectively fixed to twoends of the external piezoelectric tube, so that a double-tube-nested mechanical parallel-structure can be formed, which is equivalent to the increase of the effective mechanical wall thickness of the scanner, and therefore, the scanner can be stronger and firmer, the seismic resistance and stability of the scanner are enhanced, and the scanner is very suitable for scanning imaging in extreme andharsh environments; and the inner piezoelectric tube and the outer piezoelectric tube can be simultaneously elongated or shortened in a Z direction, and therefore, the piezoelectric extension lengthof the piezoelectric scanner in the Z direction will not be decreased, and a necessary condition that the extension length of the piezoelectric scanner in the Z direction is large enough, which is required by the scanning probe microscope, can be satisfied.

Description

technical field [0001] The present invention relates to a piezoelectric scanner with high stability and high rigidity, in particular to a highly stable scanner using two piezoelectric tubes nested coaxially to form a mechanical parallel structure and a scanning probe made of it A microscope belongs to the technical field of scanning probe microscopes. Background technique [0002] G. Binnig and others invented the first scanning probe microscope in human history in 1982. Because of its unique and excellent atomic resolution ability and wide range of measurement applications, it has been actively used in the forefront of scientific research. . One of the core components of a scanning probe microscope is a scanner capable of scanning the sample surface in XYZ three-dimensional directions, and its stability directly determines the quality of scanning imaging. The earliest scanner is a scanner with a tripod structure, that is, three piezoelectric bodies responsible for scannin...

Claims

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Application Information

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IPC IPC(8): G01Q60/00
CPCG01Q60/00
Inventor 葛威锋陆轻铀张晶
Owner 合肥中科微力科技有限公司
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