Cross transpose fully low pressure low temperature drift cold scanning probe microscope body
A scanning probe and low-temperature drift technology, applied in microscopes, measuring devices, instruments, etc., can solve the problems of noise, speed, accuracy, and power consumption that are not as good as low-voltage operational amplifiers, and are expensive, and achieve temperature drift suppression, low price, and The effect of high temperature stability
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Embodiment 1
[0030] Example 1: Double piezoelectric tube vertical and horizontal transposition full low-voltage low-temperature drift scanning probe microscope mirror body
[0031] figure 1 It is a schematic diagram of the basic structure of the mirror body of the double piezoelectric tube type vertical and horizontal transposition full low-voltage low-temperature drift scanning probe microscope. Two piezoelectric tubes 4a, 4b stand side by side and are fixed on the base 6, the probe 1 and the sample 2 are respectively arranged at the free ends of the two piezoelectric tubes, and the gap between the probe 1 and the sample 2 is adjusted The direction 3 is perpendicular to the axial direction 5 of the two piezoelectric tubes, and the two piezoelectric tubes at least include one X positioning, one Y positioning and one Z positioning integrally or separately.
[0032] When working, since the first piezoelectric tube 4a and the second piezoelectric tube 4b include at least one X positioning, ...
Embodiment 2
[0036] Example 2: Single piezoelectric tube vertically and horizontally transposed full low-voltage low-temperature drift scanning probe microscope mirror body
[0037]For the two piezoelectric tubes in Embodiment 1, if one of them is selected as an XYZ positioning piezoelectric tube, the other piezoelectric tube does not need to have a positioning function, and can be replaced by any vertical rod 7 to form a single piezoelectric tube type vertical and horizontal rotation. Set full low-pressure low-temperature drift scanning probe microscope body, see attached figure 2 . The specific method is: the XYZ positioning piezoelectric tube 4c and the vertical rod 7 stand side by side and are fixed on the base 6, the probe 1 and the sample 2 are respectively arranged on the free ends of the XYZ positioning piezoelectric tube 4c and the vertical rod 8, and probe The positions of the needle 1 and the sample 2 can also be reversed, and the gap adjustment direction 3 between the probe 1...
Embodiment 3
[0039] Embodiment 3: A vertically and horizontally transposed full low-voltage low-temperature drift scanning probe microscope mirror body with an inertial stepping motor
[0040] A mass block can be added between the free end of the piezoelectric tube described in Embodiment 1-2 and the probe or sample arranged on it to form a probe-sample coarse approximation inertial stepping motor.
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