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85results about How to "Inhibit temperature drift" patented technology

Method for automatically correcting temperature drift of electrical vortex sensor

The invention provides a method for automatically correcting temperature drift of an electrical vortex sensor. According to the method, a certain impedance measuring circuit is utilized to obtain the equivalent inductance and the resistance of a detection coil, the relationship, changing along with temperature and measurement, of the inductance and the resistance of the detection coil is utilized to remove the influence of temperature changes and extract actual measured change information. According to the method, signals of the vortex sensor composed of an impedance measuring module (4) and a rectification calculating module (5) is used for conditioning the circuit, so that to-be-measured information is obtained, rectification is conducted automatically, and the influence of temperature changes is removed at the same time. According to the method, when temperature drift is rectified, no extra probes or coils or temperature sensors are further arranged, and temperature drift rectification effect is remarkable. Moreover, the method has the advantages of being wide in application range, simple in structure, easy to implement and the like. When the method is used for automatically rectifying the temperature drift of a probe of the electrical vortex sensor, temperature drift coefficients can generally be reduced to below 5nm/DEG C from 500nm/DEG C.
Owner:UNIV OF SCI & TECH OF CHINA

MEMS wafer level vacuum package structure and manufacturing method thereof

The invention provides an MEMS wafer level vacuum package structure and a manufacturing method thereof. The package structure comprises a silicon cover plate and an MEMS wafer with a movable structure, wherein a vertical through hole is formed on the cover plate, the through hole is internally filled with a conductive material, a bonding surface of the cover plate is provided with a groove, a layer of getter film is arranged at the bottom of the groove, and the silicon cover plate and the MEMS wafer with the movable structure form the vacuum package structure by wafer bonding. The manufacturing method provided by the invention comprises the following steps: at first, manufacturing the through hole on the cover plate, and filling the conductive material in the hole; and then, forming the groove on the bonding surface, depositing a layer of getter film on the bottom of the groove, depositing a layer of multilayer metal film in a bonding area, and wafer bonding the cover plate with the MEMS wafer with the movable structure in a vacuum environment. According to the MEMS wafer level vacuum package structure provided by the invention, the groove with the getter and the through hole are formed on the silicon cover plate to export an electrode from the closed groove without carrying out wire bonding, so that the procedures are simple, meanwhile, the vacuum maintenance ability in the package structure is improved, contamination of granules to the movable structure during cutting is avoided, and performance of the device is guaranteed.
Owner:BEIJING MXTRONICS CORP +1

Biaxially-resonant silicon-micromachined accelerometer structure in shape of Chinese character 'tian'

The invention discloses a biaxially resonant silicon-micromachined accelerometer in the shape of a Chinese character 'tian' and aims at designing and manufacturing a high-sensitivity and high-resolution biaxially-resonant silicon-micromachined accelerometer. The structure is characterized in that (1) because a mass block structure in the shape of a Chinese character 'tian' is adopted, the volume of a mass block is maximized, and the acceleration can be converted into an inertial force more effectively; and the whole structure is symmetrically distributed, which is favorable for resisting noises and inhibiting temperature drift; (2) a support beam (in the shape of a Chinese character 'ji') arranged at the periphery of the structure facilitates the release of the residual stress and temperature stress of the structure, thereby reducing the support stiffness of the structure in a sensitive direction; (3) due to the application of a spring-like beam (in the shape of a Chinese character 'kou') at one end of a resonator, the influence of external shocks on the beam is reduced, and the spring-like beam plays a role in releasing the residual stress of the structure; and (4) an arc structure at the root part of a tuning fork in the resonator can be used for effectively reducing the energy coupling and improving the mechanical quality factor of the resonator, and is easy for realizationof closed-loop control.
Owner:BEIHANG UNIV

Current sensing device based on magnetic field sensing

The invention discloses a current sensing device based on magnetic field sensing, relating to the super magnetostriction material sensing technology and current vortex displacement sensing technology. The current sensing device based on magnetic field sensing aims to solve problems that the present current sensor adopts optical members and needs to be equipped with a photoelectric device, which affects the output result and cannot perform protection in time once a fault happens. A magnetic sensing unit comprises a GMM rod and an output rod; the GMM rod is used for sensing a magnetic field of a transmission line to generate axial telescoping so as to transmit strain to the output rod; a displacement sensor comprises a probe coil, an excitation signal source, an AC bridge, a signal modulation circuit and a low-pass filtering circuit; the excitation signal is used for producing a sine excitation signal which is loaded to two ends of a probe coil through an AC bridge; the probe coil is used for sensing the axial telescoping generated by the GMM rod, and a generated sensing signal is outputted after successively going through a signal modulation circuit and a low-pass filtering circuit The current sensing device based on magnetic field sensing is used for measuring bus current of an extra high voltage transmission system.
Owner:HARBIN INST OF TECH +1

Triaxial accelerometer calibration method based on cross in inertial navigation system

InactiveCN105842481AEasy to operateOvercome the shortcomings of calibration errors caused by unfixedTesting/calibration of speed/acceleration/shock measurement devicesTriaxial accelerometerEngineering
The present invention claims to protect a three-axis accelerometer calibration method based on a cross in an inertial navigation system. This method is realized by making a cross mark on a horizontal platform. The horizontal platform is any platform parallel to the ground plane. The cross is any two signs perpendicular to each other; the original value of the accelerometer is the processing object, and the original value is not divided by the value of the scale factor; the original value of the accelerometer at the six positions is filtered, and the six The position is six positions with the cross as a reference; and the filtered original value is temperature compensated by the least square method; then the average value of the temperature compensated original value is taken as the original value corresponding to the six positions; finally through the acceleration The calibration coefficient of the error calibration model can be obtained by using the formula for obtaining the calibration coefficient of the meter. The method can overcome the problems of calibration error caused by unfixed scale factor, complex calibration process, temperature drift and long calibration period.
Owner:CHONGQING UNIV OF POSTS & TELECOMM

Local discharging sensor combining graphene diaphragm with micro optical fiber interference cavity and detection method based thereon

The invention discloses a local discharging sensor combining a graphene diaphragm with a micro optical fiber interference cavity and a detection method based thereon. The local discharging sensor comprises a tunable laser device (1), a laser device wavelength control module (2), an optical fiber circulator (3), monomode optical fiber (4), the micro optical fiber interference cavity (5), a photoelectric detector (6), a signal line (7), a filter (8) and a data collection card (9). A multilayer graphene membrane is adopted, so that detection sensitivity of the sensor is improved; on the basis ofstructure optimization design of the multilayer graphene membrane, the multilayer graphene membrane is enabled to adapt to local discharging detection frequency band requirements; a polyimide coatingis adopted to prolong service life of the multilayer graphene membrane; femtosecond laser is adopted to process the micro optical fiber interference cavity inside optical fiber, and a static-state working point is stabilized on the basis of laser device wavelength control. On the basis of optimization design of a detection device mounting mode, original working environment of electrical equipmentis unaffected during mounting of the local discharging sensor.
Owner:CHONGQING UNIV

Self-regulating thermal-conducting gas sensor and gas detecting device

The invention relates to a thermal-conducting gas sensor and a gas detecting device, and in particular to a self-regulating thermal-conducting gas sensor and a gas detecting device. The device comprises a shell, a signal processing module, a measuring sensor, an air intake pipeline and an air outlet pipeline, wherein the air intake pipeline is connected with the air outlet pipeline through the measuring sensor; the measuring sensor comprises a thermistor, specifically a two-stage operational amplifier circuit with a positive feedback system stability gain of 1; and the thermistor is connectedbetween two operational amplifiers, so that when the operational amplifiers are balanced, the resistance value of a temperature sensing module is a set value, and then when the measured gas causes thetemperature of a temperature sensor to change, the operational amplifier circuit automatically adjusts the resistance of the thermistor to a set value so as to avoid the temperature drift errors caused by the uncertainty of the working resistance. The device is simple in structure and low in cost and is capable of realizing a self-adjusting function for the working temperature and resistance value of the thermistor.
Owner:GL TECH CO LTD
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