The invention discloses a high-image-quality
ultraviolet objective lens based on a reflection
symmetric structure, and particularly relates to the technical field of high-precision optical lenses, the high-image-quality
ultraviolet objective lens comprises a ninety-degree
prism and a protection window, a first lens is arranged on one side of the ninety-degree
prism, a second lens is arranged on one side of the first lens, a third lens is arranged on one side of the second lens, and the protection window is arranged on the ninety-degree
prism. A fourth lens is arranged on one side of the third lens, a fifth lens is arranged on one side of the fourth lens, and a sixth lens is arranged on one side of the fifth lens; the objective lens adopts a reflection symmetrical structure, incident and emergent rays are symmetrical to the axis, and the same lens is imaged in an up-down symmetrical position, so that the
system magnification is constantly 1x,
distortion can be compensated to be below 2 * 10 <-5 >%, the lens material has
high transmittance and low absorption in an
ultraviolet band, the focal plane temperature drift is reduced, accurate
exposure is ensured, and the
chip manufacturing yield is improved. And meanwhile, the
modular design and the high-precision interface are convenient to assemble and maintain, and cost is reduced.