239 results about "Eddy-current sensor" patented technology

The invention discloses an elevator steel belt damage detection and quantitative analysis system based on eddy current and magnetic flux leakage dual-mode detection, and aims to solve the problems of single-mode information loss and serious industrial field strong noise interference in the existing steel belt detection. The system synchronously integrates an eddy current sensor, a magnetic flux leakage sensor and an encoder through a multi-probe array adapter; and multi-dimensional damage physical information in the steel strip is obtained. An improved wavelet packet transform-empirical mode decomposition (WPT-EMD) collaborative noise reduction algorithm is adopted, and in combination with a sub-band energy entropy and a self-attention mechanism, non-stationary mechanical noise is effectively filtered out. A multi-rule feature extraction engine is used for extracting smooth residual errors, derivative mutation and other features, a support vector machine (DE-SVM) model introducing physical priori knowledge weights is constructed, and the small sample recognition problem is solved in combination with a virtual sample generation technology. The method can realize high-precision positioning and quantitative evaluation of steel strip damage under complex working conditions, and has the characteristics of strong anti-interference capability, high identification accuracy and good generalization performance.

The invention provides an eddy current sensor signal noise reduction method based on frequency division detection low-pass filtering and a monitoring system, belongs to the technical field of sensor signal processing, and can at least partially solve the problems of unstable signals and inaccurate measurement in the prior art. The signal noise reduction method for the eddy current sensor comprises the following steps: processing an original output signal of the eddy current sensor by adopting a synchronous detection module, demodulating a dynamic vibration alternating current component of the original output signal into a direct current voltage signal by utilizing a reference signal, and separating a static displacement direct current component signal; an independent dynamic signal channel and an independent static signal channel are formed; filtering high-frequency noise in the dynamic signal channel through a dynamic channel low-pass filter with a first preset cut-off frequency, and filtering power frequency interference in the static signal channel through a static channel low-pass filter with a second cut-off frequency; and reversely injecting compensation voltage at the output end of the static channel low-pass filter so as to eliminate the direct-current offset error of the static displacement component signal.

The invention discloses handheld steel fireproof door fireproof performance in-situ nondestructive testing equipment and a use method, and belongs to the technical field of fireproof door fireproof performance determination. In order to solve the problems that an existing method lacks an effective in-situ nondestructive testing means and the actual fire resistance of a fireproof door in use cannot be accurately judged, handheld in-situ nondestructive testing equipment for the fire resistance of the steel fireproof door is designed, during testing, electric suction cups on the two sides of the equipment are adsorbed to the fireproof door, and a laser sensor rapidly measures the thickness of the fireproof door; the ultrasonic eddy-current sensor is used for measuring fireproof door steel plate thickness; the X-ray sensor is used for measuring the compactness of the fireproof door filling material by using the X-ray propagation time; and comparing the measured data with a qualified fireproof door to obtain the fireproof performance of the measured fireproof door. Compared with the original fireproof door sampling detection equipment and method, the equipment and method can realize portable in-situ nondestructive detection, quickly judge the performance of the fireproof door, prevent inferior products from entering the market and protect the property and life safety of people.

The invention relates to the technical field of satellites, in particular to a three-super platform actuator eddy current sensor fault autonomous reconstruction method. Comprising the following steps: according to a parallel mechanism kinematics relationship of each actuator, determining a first relationship between axial displacement measured by an actuator eddy current sensor and a load relative to a six-degree-of-freedom pose of a satellite platform; determining a parallel mechanism kinematics relationship of the fault-free eddy current sensor, and determining a second relationship between the axial displacement and the load measured by the fault-free eddy current sensor and the six-degree-of-freedom pose of the satellite platform; according to the first relation and the second relation, matrix reconstruction is carried out on the remaining fault-free actuator eddy current sensors, and an autonomous reconstruction matrix is obtained; and according to the autonomous reconstruction matrix and the measurement of the fault-free actuator eddy current sensor, obtaining all actuator eddy current measurement values of the actuator where the fault eddy current sensor is located. According to the method, when the eddy current sensor has a fault, the eddy current sensor distribution array is reconstructed, and three-super control is recovered.

According to the eddy current sensor dynamic temperature drift real-time compensation and self-calibration method provided by the invention, an intelligent monitoring system integrated with multi-point temperature sensing is constructed, and a DBN-LSTM combined deep learning model is used to establish a complex nonlinear dynamic mapping relation between sensor output and temperature and displacement; high-precision real-time compensation of the dynamic temperature excursion is realized; furthermore, working condition self-adaptive optimization is carried out on the compensation result through a multi-objective optimization model, and the contradiction among the system precision, the stability and the response speed is balanced; meanwhile, an online sequential learning mechanism and an intelligent self-calibration process based on uncertainty evaluation are innovatively introduced, so that the system can continuously optimize model parameters and autonomously manage a calibration period according to operation data, thereby effectively coping with slow drifting of characteristics of the sensor, remarkably improving measurement precision and long-term reliability, and improving the reliability of the sensor. The calibration interval is greatly prolonged, and the maintenance requirement is reduced.

The invention relates to the technical field of flange connectors, in particular to a quick-plug type flange connector for a high-frequency sealing environment. The external connecting mechanism comprises a plurality of flange terminals; the signal transmission mechanism comprises a plurality of female pins and an inner conductor which is in plug-in connection with the female pins; the signal acquisition module comprises a micro strain gauge array and a plurality of micro eddy current sensors; the insertion force monitoring module is used for judging whether the reed of the female pin has stress relaxation or not based on the fluctuation characteristic parameters; the trajectory tracking module is used for determining local relaxation or overall relaxation of the reed based on the trajectory fitting index; the torque adjusting module is used for determining the increment torque of the split spring based on the radial offset of the reed and optimizing the increment torque; and the loss monitoring module is used for determining whether the contact state of the female pin and the inner conductor is qualified or not based on the signal transmission loss so as to optimize the preset characteristic parameters. The signal transmission stability of the flange connector is improved.

1. Name of the product in this design: Eddy Current Sensor (Axial Arc Type). 2. Purpose of this design: For monitoring the spindle speed of motors in new energy vehicles. 3. The key design feature of this product is its shape. 4. The picture or photo that best illustrates the key design points: Design 1 3D diagram 1. 5. Design 1 is designated as the basic design.

This invention relates to the field of fast reflector technology, specifically to a two-dimensional large-angle fast reflector device based on a PCB eddy current sensor. The device includes: a flexible support assembly that enables the reflector assembly to deflect in a two-dimensional direction, and which, after angular displacement, returns to its original position through elastic deformation; and an eddy current sensor probe comprising multi-layer coils printed on an eddy current circuit board, with each pair of probes symmetrically arranged on the board. This invention, through the flexible support assembly and a moving-magnet drive structure, enables the reflector assembly to achieve large-angle deflection in two orthogonal directions. Compared to traditional micro-angle deflection structures, the maximum deflection angle is significantly increased, covering a wider field of view, making it suitable for applications such as large-field-of-view scanning, rapid target acquisition, and wide-angle beam control.

The invention provides a weld joint dynamic eddy current detection method and system based on reinforcement learning, the system comprises a sensing layer, a decision layer, an execution layer and an identification layer, the sensing layer is used for collecting detection data of a weld joint surface, and the sensing layer comprises an eddy current sensor, a laser displacement meter and a thermal infrared imager; the decision-making layer is connected with the sensing layer and is used for dynamically adjusting detection parameters based on a reinforcement learning algorithm; the execution layer is connected with the decision layer, is used for executing a detection action according to the adjusted detection parameters, and comprises a four-axis linkage eddy current sensor and a frequency converter; the identification layer is connected with the sensing layer and the decision-making layer, is used for identifying weld defects based on the eddy current signals, and comprises a multi-defect identification model; and the decision layer dynamically adjusts detection parameters of the execution layer through a reinforcement learning algorithm by taking the time-frequency characteristic of the eddy current signal, the lift-off gap and the environment temperature as a state space and taking the frequency adjustment amount and the lift-off gap control instruction as an action space, so that real-time detection of the apparent defects of the welding seam is realized.

The invention relates to the technical field of aero-engine nondestructive testing, and discloses an aero-engine support plate blade in-situ eddy current testing device and a testing method thereof, and the aero-engine support plate blade in-situ eddy current testing device comprises a handle, a telescopic probe rod and a testing end. The detection end is rotationally connected with the telescopic probe rod and comprises an adjusting swing block, a supporting end base, a clamping and positioning assembly and a transmission detection mechanism. The clamping and positioning assembly adopts a V-shaped fork block design, and can adapt to the shape and thickness of the blade for clamping, so that the detection end and the blade are kept stable. The transmission detection mechanism is composed of a miniature lead screw, a linear guide rail, an anti-backlash gear set and a servo motor and drives the detection probe assembly to accurately move along the surface of the blade. The detection probe adopts a leaf spring to support a flexible array eddy current sensor, and self-adaptive adjustment can be realized to ensure that the detection surface is tightly attached to the curved surface of the blade. The invention provides a device and a method capable of realizing rapid, full-area and high-sensitivity in-situ eddy current detection on a support plate blade under the condition that an engine is not disassembled and adaptive to air inlet space constraint.

This disclosure provides a 3D printer and its nozzle offset calibration method, storage medium, and program product. The method includes: controlling the nozzle to be calibrated to scan within the target sensing area of ​​an eddy current sensor to obtain a corresponding sensing signal; determining a target feature category matching the waveform characteristics of the sensing signal based on the correspondence between waveform characteristics and feature categories; extracting the feature value corresponding to the target feature category from the sensing signal, calculating the offset of the nozzle to be calibrated in the scanning direction, and using this offset to calibrate the nozzle. This disclosure, by matching the corresponding waveform feature category and extracting feature values ​​for offset calculation, can accurately adapt to the signal characteristics of different types of nozzles, avoiding feature recognition errors in offset calculation caused by differences in heterogeneous nozzles. This significantly improves the accuracy of offset calculation and the reliability of nozzle center positioning, ensuring stable calibration with high precision and high repeatability for different heterogeneous nozzles.

The invention discloses an eddy current detection coil in a pipeline, a parameter optimization method and a mutual inductance type eddy current sensor. The coil comprises an exciting coil and a receiving coil, the exciting coil and the receiving coil are both of a hexagonal structure and a curved surface structure, and the number of turns of the receiving coil is smaller than that of turns of the exciting coil; the exciting coils and the receiving coils are arranged in parallel in even numbers, the exciting coils are connected in parallel, and the adjacent receiving coils are connected in series. And an excitation magnetic field has more reasonable distribution in a plane, so that the response consistency under different defect orientations is improved.

The invention provides a wafer processing system and method, electronic equipment and a computer medium, and the wafer processing system comprises a wafer polishing assembly which comprises a polishing disc; the eddy current sensor is arranged on the polishing disc, in the wafer polishing process, the eddy current sensor rotates along with the polishing disc to form a circular track, and a first connecting line of the horizontal projection of the center of the polishing disc and the horizontal projection of the center of the wafer intersects with the horizontal projection of the circular track; the horizontal projection of the preset marker intersects with the horizontal projection of the circular track, the position of the marker is kept unchanged, and the marker is used for collecting an eddy current signal in the wafer polishing process; the controller is used for determining a signal included angle of the marker based on the marker signal; determining an angle deviation value between the signal included angle and an actual included angle of the marker; calibrating the wafer morphology characteristic signal according to the angle deviation value; and the control module is used for controlling the wafer polishing assembly to polish the wafer. The accuracy of determining the thickness of the wafer film can be improved.

The present application relates to the field of pipeline nondestructive testing, and particularly relates to a pipeline corrosion detection method based on an external normal magnetic field and a corresponding pipeline corrosion detection system based on a pig. The scheme places a permanent magnet at a to-be-detected area of a ferromagnetic pipeline, magnetizes the pipeline using the permanent magnet, and causes a permeability distortion in the local pipe wall of the pipeline. The degree of the permeability distortion is related to the pipe wall thickness. On this basis, an eddy current sensor carried on the pig is used to scan the pipeline together with the pig. Then, the pipe wall thickness is obtained according to the obtained permeability distortion information of the pipe wall at each position of the pipeline, and corrosion detection of the inner pipe wall of the pipeline is realized. The present application also develops a corresponding pipeline corrosion detection system based on a pig on the basis of the related detection idea. The scheme can effectively overcome the problems of high cost and low efficiency of the existing pipeline internal detector.

A method of detecting defects or deterioration in the sidewalls of can bodies during production of the can bodies within a can bodymaker. Each can body is formed by pushing a cup, mounted on a punch of a reciprocating ram, through one or more dies contained within a tool pack of the bodymaker. The method comprises: obtaining output signals from one or more eddy current sensors arranged around the ram axis outside of the tool pack and adjacent to an exit end of the tool pack; processing the output signals to detect passage of open ends of can body sidewalls past the sensor(s) and thereby determine measures of the heights or thicknesses of can body sidewalls; and analysing the determined measures to identify can body sidewall defects or deterioration.

The invention belongs to the technical field of eddy current detection. According to the eddy current detection device and method for the annular piece, a multi-channel profiling eddy current sensor can horizontally move and rotate along the center axis of the annular piece, the detection width is smaller than the width of a groove, and the multi-channel profiling eddy current sensor is provided with a first alternating magnetic field generation assembly and a second alternating magnetic field generation assembly; the flexible array eddy-current sensor and the single-channel profiling eddy-current sensor are respectively provided with a third alternating magnetic field generating assembly matched with the outer surface of the annular piece with smaller curvature change and a fourth alternating magnetic field generating assembly matched with the outer surface of the annular piece with larger curvature change; the four alternating magnetic field generation assemblies are all of a differential eddy current coil circuit connection structure. The problems that the omission ratio is high due to the fact that a common rigid probe and a fixed path are difficult to match with the complex curved surface of the annular part, the false alarm rate is increased due to paint layer noise and electromagnetic interference of the annular part, and the manual detection efficiency is low can be solved, the detection efficiency is improved, and omission and false detection are avoided.

The application provides a three-way stress monitoring device and method based on an eddy current sensor, six eddy current sensors are uniformly distributed in a metal support circular pipe, the load stress of coal and rock bodies in three different directions can be measured, and thus the problem that a traditional monitoring device can only measure the load stress in the vertical direction of the coal and rock bodies is solved. The data accuracy is improved, the measurement data are enriched, and the change of the load stress of the coal and rock bodies in each direction can be better monitored; the sensor and the oil bag are integrated, and the sensor can directly measure the load stress of the coal and rock bodies at the corresponding position of the drill hole. Compared with the split structure of the traditional monitoring device, the sensor is less affected, the measurement error is smaller, and the measurement result is more accurate.

The present application belongs to the technical field of magnetic suspension motor, and discloses a magnetic suspension bearing gap online measurement device and a compensation method. The method comprises the following steps: deploying a quantum and eddy current sensor array on the inner wall of a magnetic suspension bearing stator, and correspondingly arranging a surface acoustic wave sensor inside the stator. A scanning signal is injected into the eddy current array, real-time complex impedance is collected, and a differential signal with a baseline is calculated. Real-time characteristic fingerprints are obtained by analysis, and phase changes are determined by comparing a phase change fingerprint library. When the phase changes, a quantum sensor is used to calculate a reference deviation, generate a local space correction field, and obtain a correction amount of each eddy current sensor by interpolation. The surface acoustic wave sensor collects signals to analyze stress and temperature gradient, establishes a feedforward compensation model to calculate a gap compensation amount, and obtains a corrected gap value in combination with the correction amount. The present application realizes the real-time, accuracy and stability of gap data under dynamic operation, avoids rotor instability, equipment vibration intensification and bearing wear caused by inaccurate gap monitoring, and ensures long-term reliable operation of the magnetic suspension bearing.

The application discloses a flexible multi-body dynamics method verification experimental device, which is used in the field of flexible multi-body dynamics experiments. The system comprises a structure system, a driving system, a measuring system and a connecting system. The structure system comprises a flexible test piece, an auxiliary beam and a counterweight piece. The driving system comprises a servo motor and a feedback control component thereof. The measuring system comprises an accelerometer, an angular displacement sensor, an eddy current sensor and a high-speed camera. The connecting system comprises equivalent torsional spring pieces and design modules for fixing two flexible beam test pieces together, and the system fundamental frequency of the flexible beam is adjusted by changing the torsional spring stiffness. The application provides a device for multi-section flexible beam dynamics experiments, which can accurately measure the displacement response and acceleration response of the test piece, is consistent with the modeling analysis results, and provides an important tool for related research and development.

This invention is a coin detection system, comprising an eddy current sensor installed on a coin travel channel to emit magnetic field lines into the channel. When a coin passes through the magnetic field lines, a corresponding output signal is generated, and the system simultaneously senses changes in the magnetic field as the coin passes. The system includes an eddy current sensor control unit for controlling the operating frequency of the eddy current sensor according to control signals from a main control unit; a signal conditioning unit for conditioning the output signal of the eddy current sensor according to control signals from the main control unit; a digital signal conversion unit for converting the magnetic field changes sensed by the eddy current sensor into eddy current loss and inductance data; and a main control unit for determining the authenticity and face value of the coin based on the signals from the eddy current sensor and the eddy current loss and inductance data output by the digital signal conversion unit. This invention features self-regulating operation by controlling the eddy current sensor to operate at a range of suitable frequencies through the eddy current sensor control unit and the lift-off effect generated after the inductively coupled impedance sensor is controlled by the digital signal conversion unit. This eliminates the need for manual operation, providing significant convenience to the user.

The application discloses a cable material and wire diameter detection method based on an eddy current impedance effect and particularly relates to the field of cable nondestructive detection, and comprises the following steps: S1, a double-frequency excitation eddy current sensor is adopted to synchronously collect the resistance and inductance of the coil under low-frequency signals, the resistance and inductance of the coil under high-frequency signals, and the environmental temperature and the lift-off distance between the sensor and the cable; S2, a combination algorithm is used for denoising, and then the sensor coil resistance, inductance and cable core conductivity are temperature compensated; S3, the material sensitivity factor is calculated under low frequency, the wire diameter sensitivity factor is calculated under high frequency, and the lift-off distance deviation is corrected; S4, the material deviation rate is calculated to determine the material, a linear regression model is fitted, the skin depth is corrected in combination with the conductivity, and the wire diameter is calculated; and S5, the material, wire diameter and comprehensive judgment are progressively output, and corresponding alarms are triggered when an abnormality occurs. The application solves the problems of incomplete parameter coupling and temperature compensation, and improves the detection precision and environmental adaptability.

The invention relates to the technical field of monitoring of pump systems. The invention discloses a wireless internet-of-things information acquisition system for a tower type pumping unit. The wireless internet-of-things information acquisition system comprises a motor test module, a transmission shaft test module, a speed reduction roller test module, a guide bracket test module and a wireless signal acquisition device. According to the invention, a complete sensing network covering a power source-transmission chain-bearing structure is established by integrating four testing modules including a motor, a transmission shaft, a speed reduction roller and a guide bracket; according to the structural characteristics of the tower type pumping unit, strain gauges are deployed in a high-stress area at the root of a guide support to monitor micro-strain changes, and an eddy current sensor and a dynamic torque sensor are adopted at key nodes of a transmission shaft to cooperatively monitor low-frequency bending and high-frequency torsional vibration coupling characteristics; a performance degradation model is conveniently established through long-term data accumulation, and transformation from post maintenance to predictive maintenance is realized in combination with a threshold early warning and trend prediction algorithm.

The application relates to a fast mirror system based on a transmissive application of an eddy current sensor, which comprises a detector seat, a working mirror body, a mirror seat, a flexible hinge, a voice coil motor, an inner ring seat, an outer ring seat, a rotating ring, an eddy current sensor and a controller; the working mirror body is fixedly connected with the mirror seat; the mirror seat is fixedly connected with the inner ring seat through the flexible hinge; the inner ring seat is fixedly connected with the outer ring seat through the flexible hinge; the outer ring seat is fixedly connected with the rotating ring; the rotating ring is fixedly connected with the inner ring seat and the outer ring seat through the flexible hinge; the outer ring seat is fixedly connected with the detector seat; four eddy current sensors are assembled in the detector seat to collect angle information when the mirror seat rotates; the application has the characteristics of high bandwidth and high precision, can realize the ability of reflecting and transmitting light paths of the working mirror body, provides more possibilities and operability for application environments of a light path stabilization system, and provides a good selection scheme in the directions of light path stabilization and system light path design.

Embodiments of the present application provide a wafer metal film thickness measurement method and device, polishing equipment and medium, wherein the method comprises: obtaining a first wear parameter and a first measurement signal, wherein the first wear parameter is used to indicate a current thickness of a polishing pad, and the first measurement signal is collected by an eddy current sensor, and the first measurement signal is related to the thickness of a metal film on the wafer and the thickness of the polishing pad; determining target mapping information according to the first wear parameter, wherein the target mapping information is used to indicate a corresponding relationship between the measurement signal collected by the eddy current sensor and the thickness of the metal film under the current thickness of the polishing pad; and determining the thickness of the metal film according to the first measurement signal and the target mapping information.

Method for eddy current testing of cast components (100) in a production line, wherein the cast components (100) are tested individually, comprising the steps: - Arranging the cast component (100) to be tested in a holder (300) which has at least two eddy current sensors (310); - Measuring local electrical conductivities of the cast component (100), for which each eddy current sensor (310) performs at least one measurement; - Evaluating the measurements, for which the measured values ​​of each eddy current sensor (310) are compared with a specific target value range (S), whereby the correct position of the cast component (100) arranged in the holder (300) is first detected using the eddy current sensors (310) and the measurements are then started automatically; - Evaluate the cast component (100) as defective if at least one measured value is outside the specific target value range (S), otherwise evaluate the cast component (100) as free of defects.

The invention relates to a pulsed eddy current imaging method of a planar flexible fractal difference measurement eddy current sensor, and belongs to the technical field of nondestructive testing of conductive metal. Compared with the traditional sine excitation, the used pulse excitation can realize the detection of different depth defects of the tested block without using a plurality of different frequency excitation, the detection efficiency is high, the signal conditioning circuit is simple, and the cost is low. Under the condition that a single-frequency excitation high-performance phase-locked amplification technology is not used, the same sensitivity is achieved, and the method has the advantages that the system is simple and easy to implement. By adopting the method, the imaging quality of new features extracted by different cross-correlation algorithms can be quantitatively evaluated, and cross-correlation features and self-correlation features with good signal-to-noise ratios can be distinguished.

The invention discloses a wind tunnel magnetic suspension balance control system and control method. The system comprises a multi-axis synchronous controller, an eddy current displacement sensor array, a power amplifier and an electromagnetic actuator array. The eddy current displacement sensor array is used for acquiring each degree-of-freedom position of the model; the electromagnetic actuator array and the power amplifier are used for generating electromagnetic force so as to control model displacement; the eddy current sensors and the electromagnetic actuators are arranged in an independent differential mode, electromagnetic force and displacement coupling between components can be reduced, linear control is improved, and therefore the aerodynamic force measurement precision is improved; the multi-axis synchronous controller takes the control target of maintaining the model at the absolute geometric center of each electromagnet group, adopts a composite decoupling control strategy, solves aerodynamic force by monitoring the current variation of a power amplifier, supports online reconfiguration of control parameters, and realizes wide-range and high-precision measurement. According to the invention, low-coupling and high-precision control of the balance system in the wind tunnel based on differential active magnetic suspension is realized.

The application discloses a use method of a subway tunnel fan limiting device, which comprises a fixing support, a hydraulic push rod and an eddy current sensor, the fixing support is arranged at the fan reinforcing rib position around the fan base, and the bottom of the fixing support is installed on the concrete foundation ground; the hydraulic push rod is installed on the fixing support, the telescopic end of the hydraulic push rod is abutted against the outside of the fan base through a push plate, and the hydraulic push rod is used for adjusting the vertical and horizontal positions of the fan; the fixing support is further provided with a positioning bolt and an eddy current sensor, and the eddy current sensor is used for measuring the displacement of the fan in X, Y and Z directions. The use method of the subway tunnel fan limiting device can guarantee the stable operation of the fan equipment, and the fan equipment can also stably operate in the case of earthquake, so that the ventilation of underground space in the emergency case is ensured, and valuable time for escape is provided.

Eddy current sensing is governed by the diffusion equation of magnetoquasistatic fields. As such the eddy current sensor's proximity to the object to be inspected (i.e., “liftoff”) significantly affects the sensor's response signal. Methods and apparatus are disclosed for improving performance for an eddy current sensor, though they may also be used for other sensor types. These solutions are beneficial for both single channel eddy current sensors and arrays, and are particularly beneficial for measuring parts with complex surfaces. In some aspects improved performance is achieved by varying the stiffness of the mechanical support for the sensor. Some mechanical supports may exhibit anisotropic stiffness. After performing a scan with an eddy current array, a multi-channel shape filtering module is applied to improve defect detection. The module reduces the variability of defect response measured due to the unpredictability of the defect location transverse to the scan direction.

This invention discloses an anti-drift eddy current sensor for microscale measurement, belonging to the field of high-precision measuring instrument technology. The instrument includes a glass substrate, which is divided into symmetrical elastic clamping arms and a fixed clamping base by an arc-shaped dividing groove. Each of the two has a clamping part of equal radius arc, forming a three-point positioning clamping station. An arc-shaped hinge end is provided at the end of the dividing groove, and parameters such as the substrate thickness, clamping angle, and the size and position of the hinge end are precisely quantified and defined. This invention eliminates electromagnetic interference and ensures structural deformation resistance using a glass substrate. It achieves precise cooperation with the sensor through three-point positioning. By optimizing structural parameters to balance substrate stiffness and fracture risk, the sensor is subjected to uniform force and accurate concentric positioning. At the same time, the instrument has no additional driving / locking components, avoiding error accumulation. It is easy to operate, highly stable, and suitable for industrial applications of precision testing.