The utility model provides a
thermowell, which comprises an isolating tube, an inner-layer tube and an outer-layer cover. The isolation tube is used for accommodating a
thermocouple; the inner-layer
pipe comprises a ball bowl, and the isolation
pipe penetrates through the ball bowl from the bowl bottom of the ball bowl; the outer-layer cover is arranged outside the inner-layer
pipe, the side, close to the bowl bottom of the ball bowl, of the outer-layer cover is a cover top, the side, close to the bowl opening of the ball bowl, of the outer-layer cover is a cover bottom, the cover top is connected with the outer wall of the isolation pipe in a sealed mode, the cover bottom is open, and the inner-layer pipe is connected with the isolation pipe in a sealed mode. And the cover surface of the outer layer cover is provided with an air inlet pipe.
Nitrogen is introduced into the outer layer cover through the gas inlet pipe of the outer layer cover, a
nitrogen environment is formed in the area around the
thermocouple inlet of the process pipe,
oxygen in the
atmosphere is effectively prevented from entering the process pipe, the sealing performance of the
thermocouple inlet end of the process pipe is improved, the
leakage rate is reduced, the situation that the uniformity of wafers is poor is reduced, and the stability of a
machine table is improved.