The invention belongs to the technical field of
semiconductor devices, and discloses a single-ended
tunnel junction P-channel
gallium nitride transistor and a preparation method thereof.The single-ended
tunnel junction P-channel
gallium nitride transistor comprises a substrate layer, a buffer layer, a
barrier layer, a p cap layer and a p + + cap layer which are sequentially stacked, and the center of the stacked structure is provided with a groove with the bottom located in the p cap layer; the n + + cap layer is located on the p + + cap layer on one side of the groove, and a drain
electrode is arranged on the p + + cap layer on the other side of the groove; a source
electrode is arranged on the n + + cap layer; a
dielectric layer is arranged between the source
electrode and the drain electrode, and the source electrode and the drain electrode are in contact with the
dielectric layer; and a gate electrode is arranged on the
dielectric layer. According to the single-ended
tunnel junction P-channel
gallium nitride transistor, the single-ended tunnel junction structure is introduced between the p cap layer and the source electrode, so that the on-resistance of a channel is remarkably reduced, the injection efficiency of carriers is improved, the
tunneling current is remarkably improved, and monolithic integration with an N-channel device piece can be realized on the same process line.