Tunnel type MEMS (Micro-electromechanical Systems) gyroscope
A gyroscope and tunnel-type technology, which is applied in the field of tunnel-type MEMS gyroscopes, can solve problems such as insufficient measurement accuracy, difficulty in achieving high detection sensitivity, and low frequency matching, so as to improve detection sensitivity, high sensitivity, and reduce drift Effect
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[0018] The preferred embodiments of the present invention will be described in detail below with reference to the accompanying drawings.
[0019] In the present invention, a regular 16-sided thin plate is used as the sensitive mass. According to the relevant theory of vibration mechanics, and the thin plate is approximated as a circle, it can be known that the thin plate has two elliptical vibration modes. Due to the height of the structure Symmetry, so that their antinodes and nodes are exactly in complementary positions, that is, the antinode position of the first mode is exactly the node of the second mode, so the two modes differ in spatial position by 45 degrees , the theoretical vibration frequency is exactly the same. The method of electrostatic excitation makes it a bulk acoustic wave resonator, which vibrates according to its first mode. When there is an angular velocity perpendicular to the plane of the silicon plate, the vibration energy will be transferred from the...
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