Tunnel type MEMS (Micro-electromechanical Systems) gyroscope

A gyroscope and tunnel-type technology, which is applied in the field of tunnel-type MEMS gyroscopes, can solve problems such as insufficient measurement accuracy, difficulty in achieving high detection sensitivity, and low frequency matching, so as to improve detection sensitivity, high sensitivity, and reduce drift Effect

Inactive Publication Date: 2014-07-09
CHONGQING UNIV
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  • Abstract
  • Description
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  • Application Information

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Problems solved by technology

However, the current capacitive, magnetoelectric, piezoelectric, piezoresistive and other MEMS gyroscopes have insufficient measurement accuracy for the vi

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  • Tunnel type MEMS (Micro-electromechanical Systems) gyroscope
  • Tunnel type MEMS (Micro-electromechanical Systems) gyroscope

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Embodiment Construction

[0018] The preferred embodiments of the present invention will be described in detail below with reference to the accompanying drawings.

[0019] In the present invention, a regular 16-sided thin plate is used as the sensitive mass. According to the relevant theory of vibration mechanics, and the thin plate is approximated as a circle, it can be known that the thin plate has two elliptical vibration modes. Due to the height of the structure Symmetry, so that their antinodes and nodes are exactly in complementary positions, that is, the antinode position of the first mode is exactly the node of the second mode, so the two modes differ in spatial position by 45 degrees , the theoretical vibration frequency is exactly the same. The method of electrostatic excitation makes it a bulk acoustic wave resonator, which vibrates according to its first mode. When there is an angular velocity perpendicular to the plane of the silicon plate, the vibration energy will be transferred from the...

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Abstract

The invention discloses a tunnel type MEMS (Micro-electromechanical Systems) gyroscope and belongs to the technical field of micro-electromechanical systems. The tunnel type MEMS gyroscope provided by the invention comprises a thin plate with a normal hexadecagon shape; the thin plate is used as a sensitive mass block to be bonded on a glass substrate; each edge of the normal hexadecagon shape corresponds to one electrode; the sixteen electrodes are divided into four sets and are respectively used as driving electrodes, adjusting electrodes, feedback electrodes and wedged conical tip electrodes for generating tunneling current; the conical tip electrodes are arranged on a movable comb. The invention provides a brand-new structure and adopts the symmetrical polygonal mass block; the feedback electrodes and the adjusting electrodes are good for realizing the match of a driving modal frequency and a detection modal frequency, and the high sensitivity is realized; meanwhile, the movable comb is used for controlling the distance between the conical tip electrodes and the mass block; the two transverse conical tip electrodes are used for detecting the difference tunnel current so as to be good for reducing the drifting and further improve the detection sensitivity.

Description

technical field [0001] The invention belongs to the technical field of micro-electromechanical systems, and relates to a tunnel-type MEMS gyroscope. Background technique [0002] The gyro instrument was first used for navigation, but with the development of science and technology, it has also been widely used in aviation and aerospace. The gyro instrument can not only be used as an indicating instrument, but more importantly, it can be used as a sensitive element in the automatic control system, that is, as a signal sensor. According to the needs, the gyro instrument can provide accurate signals such as azimuth, level, position, angular velocity and angular acceleration, so that the pilot or use the automatic pilot to control the aircraft, ship or space shuttle and other flying objects to fly on a certain route. In the guidance of missiles, satellite carriers or space exploration rockets, these signals are directly used to complete the attitude control and orbit control of ...

Claims

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Application Information

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IPC IPC(8): G01C19/56
CPCG01C19/5684
Inventor 陈李田颖温中泉陈刚
Owner CHONGQING UNIV
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