Novel micro nanometer electric spark and tunneling current composite processing device

Abstract

Operation procedures of a compound processing device of micro-nano electric spark machine and tunneling current scanning are: a computer 23 controls a power switch 8 to choose the micro-nano electric spark machine power supply 1 and processes of nano to hypo-nano for a workpiece 13 is performed, and then a switcher of power supply 8 chooses processing power supply 2 for the tunneling current scanning to make process of nano to hypo-nano performed for the workpiece 13. The whole processing is observed by a microscope system 9 and timely displayed on a screen of the computer 23 by CCD imaging system 10. During processing, position control data of the workpiece 13 is transferred to a coarse adjustment station of workpiece15 and a precise adjustment station of workpiece 14 by a motion servo of workpiece control of the computer 13 and a position feedback system 24. And position control for a probe 12 in the processing is performed by the computer 23 via D / A connector 6, a control circuit of piezoelectric ceramics 6, a fine adjustment controller for electrode position 7 and a fine adjustment mechanism of tri-electrode 11.

Description

technical field [0001] The invention relates to a microfabrication technology device, in particular to a microfabrication device of micron and nanometer scales, and belongs to the field of microfabrication technology. Background technique [0002] Micro-electromechanical systems and nanotechnology are currently the most dynamic fields of science and technology. They are the supporting technologies for major innovations in many technical fields. They have important industrial prospects and will be widely used in aviation, aerospace, electronics, information, biology and other disciplines. Therefore, It has been highly valued by countries all over the world. [0003] Micro-nano manufacturing equipment is a very important part of this cutting-edge technology. However, the task of micro-nano manufacturing is not completed by a certain technology alone, but by many methods and technologies. There are still many unknowns in the field of micro-nano manufacturing technology, which...

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