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Novel micro nanometer electric spark and tunneling current composite processing device

A technology of tunnel current and combined processing, which is applied in the direction of microstructure devices, electric processing equipment, metal processing equipment, etc., and can solve the problems of micro-nano electric discharge machining and tunnel current that have not been reported.

Inactive Publication Date: 2008-03-12
YANTAI UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0006] However, there is no report on the combination of micro-nano electric discharge machining and tunnel current scanning, and there are no related patent applications and finalized products.

Method used

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  • Novel micro nanometer electric spark and tunneling current composite processing device
  • Novel micro nanometer electric spark and tunneling current composite processing device

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Embodiment Construction

[0015] Embodiments of the present invention will be described below in conjunction with the accompanying drawings.

[0016] The technical device of the present invention includes a micro-nano electric discharge machining power supply 1, a scanning tunnel current machining power supply 2, a gap current or tunnel current amplifier 3, an A / D converter 4, a D / A converter 5, a piezoelectric ceramic control circuit 6, Electrode position fine-tuning controller 7, power switching controller 8, microscope system 9, CCD imaging system 10, electrode three-way piezoelectric fine-tuning mechanism 11, electrode or probe 12, workpiece 13, workpiece fine-tuning table 14, workpiece rough adjustment Workbench 15, shock-absorbing workbench 16, rubber column 17, shock-absorbing air cushion 18, base 19, steel plate 20, underlying control program 21, user interface 22, computer 23, workpiece motion servo and position feedback system 24.

[0017] The base 19 is the basis for the mechanical part of t...

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PUM

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Abstract

Operation procedures of a compound processing device of micro-nano electric spark machine and tunneling current scanning are: a computer 23 controls a power switch 8 to choose the micro-nano electric spark machine power supply 1 and processes of nano to hypo-nano for a workpiece 13 is performed, and then a switcher of power supply 8 chooses processing power supply 2 for the tunneling current scanning to make process of nano to hypo-nano performed for the workpiece 13. The whole processing is observed by a microscope system 9 and timely displayed on a screen of the computer 23 by CCD imaging system 10. During processing, position control data of the workpiece 13 is transferred to a coarse adjustment station of workpiece15 and a precise adjustment station of workpiece 14 by a motion servo of workpiece control of the computer 13 and a position feedback system 24. And position control for a probe 12 in the processing is performed by the computer 23 via D / A connector 6, a control circuit of piezoelectric ceramics 6, a fine adjustment controller for electrode position 7 and a fine adjustment mechanism of tri-electrode 11.

Description

technical field [0001] The invention relates to a microfabrication technology device, in particular to a microfabrication device of micron and nanometer scales, and belongs to the field of microfabrication technology. Background technique [0002] Micro-electromechanical systems and nanotechnology are currently the most dynamic fields of science and technology. They are the supporting technologies for major innovations in many technical fields. They have important industrial prospects and will be widely used in aviation, aerospace, electronics, information, biology and other disciplines. Therefore, It has been highly valued by countries all over the world. [0003] Micro-nano manufacturing equipment is a very important part of this cutting-edge technology. However, the task of micro-nano manufacturing is not completed by a certain technology alone, but by many methods and technologies. There are still many unknowns in the field of micro-nano manufacturing technology, which...

Claims

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Application Information

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IPC IPC(8): B23H5/00B23H7/14B23H7/26B23Q1/25B81C5/00B82B3/00B81C99/00
Inventor 李文卓陈义保柴永生于云霞
Owner YANTAI UNIV
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