Pressure sensor micro-nano structure with high stability under high-temperature environment

A pressure sensor, high stability technology, applied in the field of pressure sensor micro-nano structure, can solve problems such as current leakage, signal processing system and circuit imbalance, failure, etc., achieve low temperature drift, strong anti-interference ability, simple structure effect

Active Publication Date: 2013-08-07
BEIHANG UNIV
View PDF3 Cites 22 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At present, the silicon diffused piezoresistive pressure sensor is mainly used commercially. Its technology is mature and its performance is excellent, but it is limited by the temperature resistance of the P-N junction, and it can only measure pressure below 120°C. It will serious

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Pressure sensor micro-nano structure with high stability under high-temperature environment

Examples

Experimental program
Comparison scheme
Effect test

Example Embodiment

[0027] See figure 1 , The present invention is a pressure sensor micro-nano structure with high stability under high temperature environment, which includes: silicon carbide film 1, reflective film 2, semi-reflective film 3, bonding layer 4, silicon carbide substrate 5, packaging layer 6 and sapphire fiber 7; the positional connection relationship between them is: the reflective film 2 is plated in the middle of the silicon carbide film 1, the semi-reflective film 3 is plated on the end of the sapphire fiber 7, and the bonding layer 4 is located between the silicon carbide film 1 and the carbide Between the silicon substrates 5, the sapphire optical fiber 7 is connected to the silicon carbide substrate 5 through the encapsulation layer 6 for transmitting optical signals.

[0028] The silicon carbide diaphragm 1 is a circular thin sheet, which will cause the deformation of the diaphragm when a pressure is applied from the outside, and is used to sense the external pressure; the si...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

PUM

PropertyMeasurementUnit
Thicknessaaaaaaaaaa
Diameteraaaaaaaaaa
Thicknessaaaaaaaaaa
Login to view more

Abstract

The invention provides a pressure sensor micro-nano structure with the high stability under a high-temperature environment. The pressure sensor micro-nano structure comprises a silicon carbide membrane sheet, a reflection membrane, a semi-reflection membrane, a bonding layer, a silicon carbide substrate, a packaging layer and a sapphire optical fiber, wherein the reflection membrane is plated in the middle of the silicon carbide membrane sheet; the semi-reflection membrane is plated at the tail end of the sapphire optical fiber; the bonding layer is located between the silicon carbide membrane sheet and the silicon carbide substrate; and the sapphire optical fiber is connected with the silicon carbide substrate through the packaging layer, and is used for transmitting an optical signal. The detection device disclosed by the invention is simple in structure and strong in anti-interference performance, and pressure detection under the high-temperature environment can be realized.

Description

technical field [0001] The invention relates to a pressure sensor micro-nano structure with high stability in a high-temperature environment, belonging to the technical field of aviation pressure sensor manufacturing. Background technique [0002] Aeroengine technology is known as the "Pearl in the Crown" of modern industry and an important symbol of a country's technological, industrial, economic and national defense strength. An aeroengine is a power device with complex aerodynamics, heat and structure, and its performance affects the performance of the aircraft. With the development of aero-engines towards high boost ratio, high turbine inlet temperature, high thrust-to-weight ratio, and high reliability, under complex and changeable conditions, measure the dynamic pressure and flow field characteristics of the high-temperature region of the engine during the transient process and master Its changing law is extremely important for realizing engine control and regulation....

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

Application Information

Patent Timeline
no application Login to view more
IPC IPC(8): G01L1/24B81B7/00
Inventor 蒋永刚赵一举张德远
Owner BEIHANG UNIV
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap