Silicon micro-resonant type accelerometer

An accelerometer and resonant technology, applied in the field of micro-inertial measurement, can solve problems such as weak decoupling ability, temperature drift, vibration coupling, etc., and achieve the effects of reducing inertial force input coupling, improving sensitivity, and reducing temperature drift

Inactive Publication Date: 2014-07-02
TSINGHUA UNIV
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  • Abstract
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Problems solved by technology

[0003] However, the silicon microresonant accelerometers in the prior art have potential problem

Method used

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  • Silicon micro-resonant type accelerometer
  • Silicon micro-resonant type accelerometer
  • Silicon micro-resonant type accelerometer

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[0017] The silicon micro-resonance accelerometer provided by the present invention will be described in detail below with reference to the accompanying drawings.

[0018] The dual-axis integrated silicon micro-resonance accelerometer provided by the present invention includes a top movable silicon micro-mechanical structure, a bonding anchor area and a glass substrate. The silicon micromechanical structure can be bonded on the glass substrate through the bonding anchor region, and can be connected to the electrode leads sputtered on the glass substrate through the bonding anchor region.

[0019] The movable silicon micromechanical structure and the bonding anchor region can be processed by SOG (Silicon-on-Glass) process. The movable silicon micromechanical structure includes a mass block and four silicon micromechanical structural units, the mass block is a center-symmetric structure, and can be suspended on the surface of the glass substrate, and is arranged at intervals from...

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Abstract

The invention provides a silicon micro-resonant type accelerometer which mainly comprises a glass substrate. A silicon micro-mechanical structure is bonded to the surface of the glass substrate and comprises a mass block and four silicon micro-mechanical structure units, the mass block is of a central symmetry structure, and the mass block is surrounded by the four silicon micro-mechanical structure units which are arranged in a pairwise symmetry mode; each silicon micro-mechanical structure unit comprises a resonant type double-end tuning fork, a micro-mechanical lever and a decoupling guiding support, one ends of the decoupling guiding supports are connected with the mass block to receive inertia force, the other ends of the decoupling guiding supports are connected with one force input ends of the micro-mechanical levers, and the received inertia force is transmitted by one force output ends of the micro-mechanical levers to the resonant type double-end tuning forks.

Description

technical field [0001] The invention belongs to the field of micro-inertia measurement of micro-electromechanical systems, and in particular relates to a silicon micro-resonance accelerometer. Background technique [0002] Silicon microresonant accelerometers have the characteristics of high stability, high resolution, and large dynamic range. They are considered to be microelectromechanical systems (MEMS) inertial navigation devices that can achieve high-precision measurements, and have important applications in the field of defense. Research on high precision, miniaturization and high integration of silicon microresonant accelerometers has also been carried out. [0003] However, silicon microresonant accelerometers in the prior art have potential problems such as simple structure, weak decoupling ability, temperature drift, and vibration coupling. Contents of the invention [0004] To sum up, it is indeed necessary to provide a silicon microresonant accelerometer that ...

Claims

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Application Information

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IPC IPC(8): G01P15/097
Inventor 董景新赵淑明刘云峰
Owner TSINGHUA UNIV
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