Eureka AIR delivers breakthrough ideas for toughest innovation challenges, trusted by R&D personnel around the world.

Biaxially-resonant silicon-micromachined accelerometer structure in shape of Chinese character 'tian'

A technology of silicon micromachines and accelerometers, applied in the field of resonant accelerometer structures, can solve the problems that the sensitivity and resolution cannot meet the requirements of high-precision applications, and there are not many studies on biaxial and multi-axis accelerometers, so as to improve the sensitivity And anti-overload ability, beneficial to anti-noise, reduce the effect of energy coupling

Inactive Publication Date: 2012-07-04
BEIHANG UNIV
View PDF5 Cites 10 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] However, due to technical limitations, the sensitivity and resolution of resonant silicon micromachined accelerometers developed in China cannot meet the requirements of high-precision applications, and most studies are limited to single-axis accelerometers. There are relatively few studies

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Biaxially-resonant silicon-micromachined accelerometer structure in shape of Chinese character 'tian'
  • Biaxially-resonant silicon-micromachined accelerometer structure in shape of Chinese character 'tian'
  • Biaxially-resonant silicon-micromachined accelerometer structure in shape of Chinese character 'tian'

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0014] Such as figure 1 As shown, a "Tian"-shaped biaxial resonant silicon micromachined accelerometer of the present invention includes: a base 1, a mass block 2, 4 "several" type support beams 16, 28, 42, 54, 4 " "口"-shaped spring beams 7, 20, 33, 46, 4 thin neck beams 9, 22, 35, 49, 8 first-level enlarged levers 5, 11, 18, 25, 31, 37, 44, 50, 8 secondary amplification levers 6, 12, 19, 26, 32, 38, 45, 51, 4 resonators 8, 21, 34, 47, 20 anchor points 3, 4, 10, 13, 14, 15, 17, 23, 24, 27, 29, 30, 36, 39, 40, 41, 43, 48, 52, 53; 4 anchor points 17, 27, 43, 53 support beams 16, 28 through the "several" shape , 42, 54 fix the mass block 2 on the base 1, the mass block 2 is distributed in the shape of "Tian" on the entire base 1, and is sensitive to the input acceleration in the X and Y directions; the first-stage amplifying lever 5, 11, 18, 25, 31, 37, 44, 50 and secondary amplification levers 6, 12, 19, 26, 32, 38, 45, 51 through anchor points 3, 4, 10, 14, 15, 23, 29, 30, 36...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention discloses a biaxially resonant silicon-micromachined accelerometer in the shape of a Chinese character 'tian' and aims at designing and manufacturing a high-sensitivity and high-resolution biaxially-resonant silicon-micromachined accelerometer. The structure is characterized in that (1) because a mass block structure in the shape of a Chinese character 'tian' is adopted, the volume of a mass block is maximized, and the acceleration can be converted into an inertial force more effectively; and the whole structure is symmetrically distributed, which is favorable for resisting noises and inhibiting temperature drift; (2) a support beam (in the shape of a Chinese character 'ji') arranged at the periphery of the structure facilitates the release of the residual stress and temperature stress of the structure, thereby reducing the support stiffness of the structure in a sensitive direction; (3) due to the application of a spring-like beam (in the shape of a Chinese character 'kou') at one end of a resonator, the influence of external shocks on the beam is reduced, and the spring-like beam plays a role in releasing the residual stress of the structure; and (4) an arc structure at the root part of a tuning fork in the resonator can be used for effectively reducing the energy coupling and improving the mechanical quality factor of the resonator, and is easy for realizationof closed-loop control.

Description

technical field [0001] The invention relates to a resonant accelerometer structure, in particular to a "Tian"-shaped biaxial resonant silicon micromachined accelerometer structure, which belongs to the design direction of MEMS (Micro-electromechanical Systems) sensors in the field of inertial navigation design. Background technique [0002] Accelerometers have been regarded as one of the most important inertial instruments since their appearance. They are used in inertial navigation and inertial guidance systems, and are attached to the automatic driving of sea, land, air and space vehicles and the high-precision guidance of high-tech weapons. In the early 1940s, the Germans developed the world's first pendulum gyro accelerometer. For more than half a century since then, due to the requirements of inertial measurement components in aviation, navigation and aerospace fields, various new accelerometers have emerged, and their performance and accuracy have been greatly improved...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Applications(China)
IPC IPC(8): G01P15/18B81B7/00G01C19/5621G01P15/097
Inventor 樊尚春李晶
Owner BEIHANG UNIV
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Eureka Blog
Learn More
PatSnap group products