Biaxially-resonant silicon-micromachined accelerometer structure in shape of Chinese character 'tian'
A technology of silicon micromachines and accelerometers, applied in the field of resonant accelerometer structures, can solve the problems that the sensitivity and resolution cannot meet the requirements of high-precision applications, and there are not many studies on biaxial and multi-axis accelerometers, so as to improve the sensitivity And anti-overload ability, beneficial to anti-noise, reduce the effect of energy coupling
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[0014] Such as figure 1 As shown, a "Tian"-shaped biaxial resonant silicon micromachined accelerometer of the present invention includes: a base 1, a mass block 2, 4 "several" type support beams 16, 28, 42, 54, 4 " "口"-shaped spring beams 7, 20, 33, 46, 4 thin neck beams 9, 22, 35, 49, 8 first-level enlarged levers 5, 11, 18, 25, 31, 37, 44, 50, 8 secondary amplification levers 6, 12, 19, 26, 32, 38, 45, 51, 4 resonators 8, 21, 34, 47, 20 anchor points 3, 4, 10, 13, 14, 15, 17, 23, 24, 27, 29, 30, 36, 39, 40, 41, 43, 48, 52, 53; 4 anchor points 17, 27, 43, 53 support beams 16, 28 through the "several" shape , 42, 54 fix the mass block 2 on the base 1, the mass block 2 is distributed in the shape of "Tian" on the entire base 1, and is sensitive to the input acceleration in the X and Y directions; the first-stage amplifying lever 5, 11, 18, 25, 31, 37, 44, 50 and secondary amplification levers 6, 12, 19, 26, 32, 38, 45, 51 through anchor points 3, 4, 10, 14, 15, 23, 29, 30, 36...
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