Piezoresistive sensor, pressure detecting device and electronic device

Abstract

The invention provides a piezoresistive sensor, a pressure detecting device and an electronic device and belongs to the field of electronic technology equipment. The piezoresistive sensor comprises asubstrate (12) and a half bridge piezoresistive sensing unit; the half bridge piezoresistive sensing unit comprises two bridge arms (6, 7), two bridge arms (6, 7) are connected in series; The connecting ends of the bridge arms (6, 7) lead to the signal collecting end (IN); the open ends of the two bridge arms (6, 7) respectively lead to the excitation signal applying end; each of the bridge arms (6, 7) includes at least one a resistor unit (101, 102, 103, 104), a resistor unit (101, 102, 103, 104) on the substrate (12), and two bridge arms (6, 7) including a resistor unit (101, 102, 103, The number of 104) is the same. This allows the piezoresistive sensor to suppress temperature drift and increase the amount of signal when the pressure detection function is implemented, and the internal space requirements of the entire electronic device are relatively low, and it is easy to promote.

Description

technical field [0001] The invention relates to the field of electronic technical equipment, in particular to a piezoresistive sensor, a pressure detection device and electronic equipment. Background technique [0002] In the prior art, the pressure detection scheme of the electronic equipment is mainly based on the capacitance sensor for detection. Such as figure 1 As shown, the principle of this solution is to use the finger 1 to press the cover plate 2 . The pressure exerted by the finger 1 is transmitted to the first plate 41 of the capacitive sensor 4 through the cover plate 2 . The first pole plate 41 deforms under force, so that the distance between the first pole plate 41 and the second pole plate 42 changes. Therefore, the capacitance value of the capacitive sensor 4 changes, so the detection of pressure can be realized according to the above principle. [0003] However, in the process of implementing the present invention, the inventor found the following techn...

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Problems solved by technology

However, this design method has relatively high requirements on the internal space of the entire electronic device, and it is also very important for the coordination, tolerance control, assembly, and factory test of the first pole plate 41, the second pole plate 42, the cover plate 2, and the carrier plate 5. have higher requirements

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