The invention relates to the technical field of
laser application, and discloses a
laser optical path thermal drift compensation device based on a TEC and a piezoelectric module, and the device comprises a negative
electrode, a
semiconductor laser chip, a positive
electrode, a thermoelectric refrigerating unit, a
ceramic chip, a lens, a telescopic and deformable piezoelectric module, and a fixed pedestal. The
system further comprises a control module, a light path detection sensor, a high-
voltage driving circuit, a
position sensor and a temperature sensor. A dual
active compensation mechanism is adopted, and cooperative control is carried out on two
thermal deformation sources of a laser and a lens at the same time: a thermoelectric refrigerating unit is responsible for stabilizing a
laser source and fundamentally inhibiting temperature drift; the piezoelectric module dynamically compensates lens side deformation, the comprehensive stability performance of the
system is remarkably improved, and the
compensation effect is remarkably superior to that of a single means. The
temperature control precision of the thermoelectric refrigerating unit can reach + / -0.1 DEG C, the piezoelectric module has nanoscale resolution and
millisecond response speed,
thermal deformation can be tracked and counteracted in real time, and long-term stability of an
optical path is ensured.