The invention relates to the technical field of sensors, and discloses a manufacturing process of an active constant-temperature absolute
pressure sensor and a
pressure sensor, and the manufacturing process comprises the following steps: carrying out the
spin coating of
photoresist on a POI
silicon substrate; determining
doping concentration and depth parameters; injecting
monocrystalline silicon ions to form n-type and p-type thermocouples; removing the
dielectric layer in the connection region by using an
etching process, and exposing the
thermocouple pair; forming a
thermocouple interconnection line; depositing a
metal layer on the surface of the piezoelectric layer, and depositing a
dielectric layer to protect the piezoelectric
electrode to obtain an upper substrate; manufacturing a
dielectric layer, and manufacturing a cavity region to obtain a lower substrate; bonding the upper substrate and the lower substrate, and manufacturing a through hole to
expose the
thermocouple region; and forming a through hole seed layer, exposing an
electrode interconnection pad region, and removing the
photoresist. According to the invention, the magnitude / direction of the
voltage at the two ends of the thermocouple pair can be controlled through the
control circuit, the
resonator is heated / cooled, the temperature of the
resonator is kept constant, the temperature drift of the
resonator is avoided, and the accuracy of air
pressure detection is improved.