Method of temperature drift estimating and compensating in scanning probe microscopy

Abstract

The invention discloses a method of temperature drift estimating and compensating in a scanning probe microscope, the method includes using the scanning probe microscope to obtain sample surface images at fixed sampling intervals, dividing each image into a plurality of pieces to carry out gradient processing, using a phase correlation method to calculate the drift distances of the images obtained at adjacent sampling times in the X and Y directions, using the density cluster density-based spatial clustering of applications with noise (DBSCAN) algorithm to reject noisy data and then calculating the whole drift distances of the images; then using the neural network method to speculate the drift distance at a next sampling time according to the previous drift distances and present near-field temperature data, and furthermore improving neural network parameters according to drift distance data obtained by actual measurement and calculation; and speculating obtained drift distance at the next sampling time and inputting the drift distance to a controller as a feed-forward signal, wherein compensation is made by the controller according to the feed-forward signal, so that the temperature drift is restrained, and automatic control is achieved. The temperature drift generated by the scanning probe microscope along with time in the environment without strict temperature and humidity control can be effectively restrained.

Description

technical field [0001] The invention relates to a method for estimating and compensating the temperature drift during the working process of a scanning probe microscope in an environment without strict temperature and humidity environment control. Background technique [0002] Currently, research using scanning probe microscopy involves more and more fields. It is not only used to obtain the surface morphology of objects, but also to manipulate particles at the nanoscale. For example, researchers have been studying the operation of using an atomic force microscope (AFM) to push particles with a diameter of 10nm. However, there are still many problems to be solved in order to realize the automatic production of nanoscale objects. Because when using AFM to operate particles without strict temperature and humidity environmental control, there are many uncertainties that require the operator to make manual intervention compensation, such as the inherent scanning hysteresis of ...

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Problems solved by technology

[0005] In order to overcome the deficiency that the existing method cannot effectively calculate the temperature drift value when the temperature drift rate is constantly changing and the surface morphology of the sample is partially changed, the present invention proposes a method for estimating and compensating the temperature drift in the scanning probe microscope, so that Under the above conditions, accurate temperature drift values ​​in the x and y directions can be obtained

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