The present application relates to a kind of high-
throughput testing device and method of electrical properties of component gradient
film material, belong to material performance test field, solve the problem that the measurement result is wrong caused by the easy damage of scanning probe to sample.It includes: probe device, located above the sample to be measured, including probe and its fixing device, for detecting the response of sample to
external field;Electrical
property testing device, for applying
external field to sample, collecting the response
signal detected by probe, and transmitting the collected data to computer;Displacement device, for loading sample and adjusting the position of sample;Probe-
sample distance monitoring device, for real-time monitoring the distance between probe and sample and feeding back to computer;Computer, for controlling displacement device to stop moving at the moment when probe and sample contact, and calculating the electrical properties of sample based on the collected data.The testing device of electrical properties of component gradient film is realized, which can effectively avoid sample damage, fast, efficient and accurate.