Three-friction-force piezoelectric stepper pushed by two embedded piezoelectric tubes, and stepping scanner

A technology of piezoelectric scanning tube and double piezoelectric, which is applied in the direction of piezoelectric devices/electrostrictive devices, piezoelectric effect/electrostrictive or magnetostrictive motors, electric solid devices, etc., and can solve the problem of not significantly increasing the size And other issues

Inactive Publication Date: 2012-03-14
UNIV OF SCI & TECH OF CHINA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] Purpose of the present invention: In order to solve the above defects, propose a piezoelectric positioner that can generate greater thrust or work at lower temperatures without significantly increasing the size and without using a stack, and use it to make a piezoelectric positioner with step scanner

Method used

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  • Three-friction-force piezoelectric stepper pushed by two embedded piezoelectric tubes, and stepping scanner
  • Three-friction-force piezoelectric stepper pushed by two embedded piezoelectric tubes, and stepping scanner
  • Three-friction-force piezoelectric stepper pushed by two embedded piezoelectric tubes, and stepping scanner

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0039] Example 1: Three-friction piezoelectric stepper driven by basic nested dual piezoelectric tubes

[0040] See attached figure 1 In this embodiment, the three-friction piezoelectric stepper driven by the basic nested double piezoelectric tube includes two piezoelectric tubes 1, 2, two protective sheets 3, 4, a base 5, and a guide 6. One of the two piezoelectric tubes 1, 2 is fixedly standing on the base 5 to form the inner piezoelectric tube 1, while the other is set outside the inner piezoelectric tube 1 and is also fixedly standing on the base 5 to form the Outer piezoelectric tube 2, the piezoelectric stretching directions 7 of the two piezoelectric tubes 1 and 2 are the same, both in the axial direction, and two protective sheets 3 and 4 are respectively arranged on the free ends of the two piezoelectric tubes 1 and 2 , the guide 6 is either placed inside the inner piezoelectric tube 1 (including passing through the inner piezoelectric tube 1) or placed outside the o...

Embodiment 2

[0046] Example 2: Three-friction piezoelectric stepper driven by elastic nested dual piezoelectric tubes

[0047] The positive pressure that the base 1 and the two protective sheets 3 and 4 respectively press against the guide 6 in the first embodiment above can be gravity, electromagnetic force and / or elastic force. In this embodiment, these three positive pressures are elastic forces: the guide 6 is elastic through the guide 6 and / or the base 5 is elastic and / or an elastic body 8 is added (see attached figure 1 ) is elastically pressed against the base 5, and the guide 6 is elastically pressed against the two protective sheets 3, 4 through the elasticity of the guide 6 and / or the elasticity of the protection sheets 3, 4 and / or the addition of an elastic body 8. The elastic body 7 described here can also be regarded as a part of the base 5 , also can be regarded as a part of the two protective sheets 3 , 4 , and can also be regarded as a part of the guide 6 . The elasticity ...

Embodiment 3

[0048] Example 3: A three-friction piezoelectric stepper driven by nested dual piezoelectric tubes with built-in elastic guides

[0049] In the above-mentioned embodiment, the guiding effect of the guide 6 on the steps can be realized by the following structure: the guide 6 is arranged inside the inner piezoelectric tube 1 (including passing through the inner piezoelectric tube 1), and the guide 6 is a tube Shaped or cylindrical, its two ends are respectively cut into the other end along its axis direction but not completely separated, which makes the guide 6 elastic, or a spring can be added inside the guide 6 so that the guide can generate elastic force outward, guide The outer walls at both ends of the device 6 are respectively pressed against the inner sides of the annular base 5 and the inner sides of the two annular protection sheets 3 and 4 by elastic force.

[0050] When the guide 6 in the present embodiment is a square tube shape, because it is pressed with the inner ...

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Abstract

The invention relates to a three-friction-force piezoelectric stepper pushed by two embedded piezoelectric tubes, and a stepping scanner and relates to piezoelectric steppers. The piezoelectric stepper comprises two piezoelectric tubes, two protection sheets, a base and a guider, wherein one of the two piezoelectric tubes fixedly stands on the base to form an inner piezoelectric tube and the other piezoelectric tube is sleeved outside the inner piezoelectric tube and fixedly stands on the base to form an outer piezoelectric tube; the piezoelectric telescopic directions of the two piezoelectric tubes are axial; the two protection sheets are arranged at the free ends of the two piezoelectric tubes respectively; the guider is arranged inside the inner piezoelectric tube or outside the outer piezoelectric tube or in a gap between the outer wall of the inner piezoelectric tube and the inner wall of the outer piezoelectric tube; and positive pressure for pressing the base and the two protection sheets against the guider respectively is set in a direction vertical to the piezoelectric telescopic direction. By the three-friction-force piezoelectric stepper, larger thrust can be generated under the condition that the size is not increased obviously and a stack is not used; and high-precision stepping and scanning work can be finished at lower temperature.

Description

technical field [0001] The invention relates to a piezoelectric stepper, in particular to a three-friction piezoelectric stepper driven by nested double piezoelectric tubes and a step scanner made of it, belonging to the technical field of piezoelectric positioners. Background technique [0002] Piezoelectric positioners can position objects to nanometer precision in the macro (millimeter) range, so they have become an indispensable tool in the field of nanoscience and technology (including sub-nanometer fields such as atomic imaging and atomic manipulation). However, the piezoelectric effect is generally weak, and the thrust generated by piezoelectric deformation is also small, which cannot push slightly larger objects. Piezoelectric positioners are also generally difficult to work in the field of low temperature (such as liquid helium temperature), because the piezoelectric deformation is further reduced at low temperature, and the given thrust is even so small that it can...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L25/03H01L41/09
CPCH02N2/021
Inventor 陆轻铀王琦
Owner UNIV OF SCI & TECH OF CHINA
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