The invention discloses a three-dimensional
image splicing method for a
white light interferometer, and the method comprises the steps: placing a to-be-detected sample on an objective table, and enabling a motor to move and collect in a snakelike path according to a set direction and step
pitch; according to a rule of platform movement and
data acquisition during large-range measurement of the
white light interferometer, a data alignment mode can be automatically judged, an optimal
feature matching path can be identified, and
image matching, splicing and
cutting can be rapidly realized; and by utilizing the characteristic that the motor only translates, comparing the normalized standard deviation of the overlapped area, automatically searching the
optimal matching area, identifying the actual overlapped area and finishing
image splicing, the method has the characteristics of
simple algorithm, small calculation amount, high speed and high efficiency, the requirement on the motor precision is low, the
system cost is low, the characteristic area does not need to be manually judged and selected, and the method is suitable for large-scale popularization and application. The method can automatically identify overlapped areas and complete
image splicing, and is high in
automation and intelligence degree, low in sample requirement, suitable for large-
scale measurement of most samples, and high in universality.