2 results about "Secondary stage" patented technology

A system and method are used to maintain a variance in feedback factors of an amplifier between the first and second phases either below a threshold value or within a specified range. The system includes the amplifier and first through third capacitances. The amplifier is coupled between an input node and an output node that operates during first and second phases of operation. The first capacitance is coupled across the amplifier and between the input node and the output node during the first and second phases of operation. The second capacitance is coupled to the input node during the first phase of operation. The third capacitance is coupled to one of the input and output nodes during one or both of the first and second phases of operation.

An oscillating secondary stage in a metrology system. The metrology system includes a primary stage configured for long movement to transport a wafer from a one location to another. A secondary stage coupled to the primary stage holds the wafer is configured to oscillate between the first direction and a second direction. The oscillation of the second stage allows for capturing an image frame of the wafer at a target location while the primary stage is moving.