Measuring device of workpiece rotary table error separation based on double-probe scan data splicing and method thereof

A scanning data and error separation technology, which is applied in the field of workpiece turntable error separation based on the splicing of scanning data of two probes, can solve the problems of large motion error, cannot reflect the surface shape and error of the measured mirror, and achieve the effect of improving measurement accuracy.

Inactive Publication Date: 2012-06-27
INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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Problems solved by technology

While this method is convenient, it also brings another problem: the turntable of the optical mirror processing machine tool generally has relatively large motion errors. If these errors are not separated, the measurement results of the swing arm profiler will not reflect the actual state of the measured mirror surface. surface error
At present, there is no effective separation method for the workpiece turntable error of the swing arm profiler

Method used

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  • Measuring device of workpiece rotary table error separation based on double-probe scan data splicing and method thereof
  • Measuring device of workpiece rotary table error separation based on double-probe scan data splicing and method thereof
  • Measuring device of workpiece rotary table error separation based on double-probe scan data splicing and method thereof

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Embodiment Construction

[0034] The present invention will be described in detail below in conjunction with the accompanying drawings and specific embodiments.

[0035] like figure 1 As shown, it is a schematic diagram of the structure of the device for stitching scanning data of double probes, including probe systems 1 and 1 ′, cross arm 2 , column 3 , counterweight 4 , standard flat crystal 5 , workpiece turntable 6 and cross arm turntable 7 . The probe system 1 is a high-precision contact probe with a resolution of 25nm and a measurement accuracy of 50nm. The cross arm 2 and column 3 are used to connect the cross arm turntable 7 and the measuring head system 1, and complete the rotating movement of the measuring head. The counterweight 4 is used to balance the probe system 1 and the cross arm 2 to ensure that the cross arm turntable 7 maintains a stable rotation. The workpiece turntable 6 is a low-precision turntable, which is used to complete the rotary motion of the standard flat crystal 5 . T...

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Abstract

The invention discloses a measuring device of workpiece rotary table error separation based on double-probe scan data splicing and a method thereof. The device employs two sets of probe systems (1, 1') to carry out scanning measurement simultaneously on a swing arm contourgraph which is formed by a probe system (1), a transverse arm (2), a column (3), a counterweight (4), a standard flat crystal (5), a workpiece rotary table (6) and a transverse arm rotary table (7). After two sets of the probe systems scan one time, two scanning loci M1 are obtained, then the workpiece rotary table is rotated with a certain angle beta and scanning is carried out once more, and another two scanning loci M2 are obtained. According to the device and the method, a method of double-probe scan data splicing is employed, influence of a motion error of the workpiece rotary table on a measurement result can be effectively separated and removed, thus measurement precision is raised substantially, and a practical solution scheme is provided for on-position measurement of the swing arm contourgraph at an optical processing field.

Description

technical field [0001] The invention belongs to the technical field of optical mirror surface processing detection, in particular to a workpiece turntable error separation method based on double probe scanning data splicing. Background technique [0002] The swing arm profiler is an effective in-situ detection instrument for the optical mirror processing process. Its biggest advantage is that it can be directly installed next to the optical mirror processing machine tool, and the turntable of the optical mirror processing machine tool can be used as the swing arm profiler. The turntable is used for in-situ detection of the mirror surface under test. While this method is convenient, it also brings another problem: the turntable of the optical mirror processing machine tool generally has relatively large motion errors. If these errors are not separated, the measurement results of the swing arm profiler will not reflect the actual state of the measured mirror surface. surface ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B21/20
Inventor 景洪伟匡龙吴时彬曹学东
Owner INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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