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301 results about "Profilometer" patented technology

A profilometer is a measuring instrument used to measure a surface's profile, in order to quantify its roughness. Critical dimensions as step, curvature, flatness are computed from the surface topography.

White light interference profile meter

The invention discloses a white light interference optical profile meter, comprising a macro/micro two-stage driving and displacement metering device in a vertical direction, white light interference displacement sensors and a universal table, wherein, the white light interference displacement sensors are fixed on the driving and displacement metering device fixed on an upright post, and the upright post is fixed on a vibration isolating table facet on which the universal table is placed. The wide-range three-dimensional optical profile meter based on white light interference and vertical scanning technology realizes rough and fine two-stage driving respectively by a servo motor and piezoelectric ceramic, so as to drive the white light interference displacement sensors to integrally move, adding the servo motor in vertical displacement can enlarge the measurement range, and vertical scanning is accomplished by the piezoelectric ceramic. The measurement of macro/micro displacement is completed by using the same diffraction grating metering system. The profile meter is capable of automatically searching for interference fringes and realizing the three-dimensional profiles of wide-range non-contact measurement planes and curved surfaces, and has the characteristics of high measurement precision, large measurement range, low cost and the like.
Owner:HUAZHONG UNIV OF SCI & TECH

Method and device for determining grinding brittleness-ductility transformation critical cutting depth of hard and brittle material

The invention relates to the technical field of hard and brittle material ultra-precision machining. In order to achieve ductility domain grinding of the largest cutting depth, high surface quality of the hard and brittle material, and efficient and high-precision production machining, according to the technical scheme, a method and device for determining the grinding brittleness-ductility transformation critical cutting depth of the hard and brittle material comprises the following steps of (1) according to a grinding wheel used in ultra-precision grinding, determining the number, shape and distance of grains of a homemade multi-grain tool, (2) according to the grain shape, distance and front-angle parameters selected in the step (1), machining three or more grains on a grain base body, (3) controlling the multi-grain tool and a workpiece to generate relative motion, beginning to conduct scratching on the surface of the workpiece, meanwhile, controlling the multi-grain tool to conduct continuous feeding, enabling the depth of the scratch to continuously change, and observing and measuring the workpiece after scratching by utilizing a surface contourgraph and a confocal microscopy. The method is mainly applied to ultra-precision machining.
Owner:TIANJIN UNIV

Swing arm type three-dimensional contourgraph

The invention relates to a swing arm type three-dimensional contourgraph which comprises a measuring head system, a transverse arm, an upright post, a counter weight, a measured plane element, a workpiece turntable and a transverse arm turntable, wherein one end part of the upright post is arranged in a mounting hole of the transverse arm turntable and fixedly connected with the transverse arm turntable, and the transverse arm is arranged in another end part mounting hole of the upright post; one end part of the transverse arm is provided with the counter weight, while the other end part of the transverse arm is provided with the measuring head system; the measured plane element is arranged on the workpiece turntable; a detection end of the measuring head system is in contact with the measured plane element; and the transverse arm and the upright post are used for finishing the rotating motion of the measuring head system; and the counter weight is used for balancing the measuring head system and the transverse arm so as to guarantee the transverse arm turntable to maintain stable rotation. The contourgraph can be used for the measurement and the analysis of the three-dimensional surface profile of a heavy-caliber high-precision plane element, wherein measurable parameters comprise three-dimensional morphologies, two-dimensional morphologies, PV (Peak Value), RMS (Root Mean Square) and three-dimensional morphological volumes.
Owner:INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI

Defect detection system

Scattered radiation from a sample surface is collected by means of a collector that collects radiation substantially symmetrically about a line normal to the surface. The collected radiation is directed to channels at different azimuthal angles so that information related to relative azimuthal positions of the collected scattered radiation about the line is preserved. The collected radiation is converted into respective signals representative of radiation scattered at different azimuthal angles about the line. The presence and / or characteristics of anomalies are determined from the signals. Alternatively, the radiation collected by the collector may be filtered by means of a spatial filter having an annular gap of an angle related to the angular separation of expected pattern scattering. Signals obtained from the narrow and wide collection channels may be compared to distinguish between micro-scratches and particles. Forward scattered radiation may be collected from other radiation and compared to distinguish between micro-scratches and particles. Intensity of scattering is measured when the surface is illuminated sequentially by S- and P-polarized radiation and compared to distinguish between micro-scratches and particles. Representative films may be measured using profilometers or scanning probe microscopes to determine their roughness and by the above-described instruments to determine haze in order to build a database. Surface roughness of unknown films may then be determined by measuring haze values and from the database.
Owner:KLA CORP

Pipeline contourgraph and scribing instrument

The present invention discloses a pipeline contourgraph. The pipeline contourgraph is used for measuring the outer contour of a pipe 13 to be measured. The pipeline contourgraph comprises a guide rail 1, a fixed bracket 8 and a first sliding bracket 3; the first sliding bracket 3 is arranged on the guide rail 1; two identical circular groove openings are formed at the top ends of the fixed bracket 8 and the first sliding bracket 3 respectively; one rotation shaft of which the diameter is matched with the corresponding circular groove opening is arranged in each of the two identical circular groove openings; positioning pushing cones are fixed onto the inner sides of the two rotation shafts; the outer sides of the two rotation shafts are fixedly connected with two rotating discs respectively used for rotating the pipe to be measured; an angle rotating disc is arranged around the circular groove opening of the fixed bracket 8 or the first sliding bracket 3; an angle pointer is located on the rotation shaft so as to determine the rotation angle of the pipeline; a displacement dial plate 5 of a depth gauge is arranged on one slide channel of the guide rail 1; and the displacement probe 4 of the depth gauge points to the pipe 13 to be measured and is located at the same horizontal plane with the axis of the pipe 13 to be measured. The present invention also provides a pipeline scribing instrument.
Owner:TIANJIN UNIV

Device and method for detecting contours of large-caliber aspheric surface components

The invention belongs to the technical field of optical precision tests, and relates to a device and a method for precisely detecting large-caliber aspheric surfaces. The device and the method can be used for detecting the contours of large aspheric surface components in precision optical systems in a high-precision manner. The device is of an open type contour instrument structure with rotary-linear datum common base planes on the basis of linear/rotary datum technologies and the like, so that the contours of the large-caliber aspheric surface components can be detected on the basis of precision flotation rotary centers in the high-precision manner. The device and the method have the advantages that common base plane designs for rotary-linear datum systems, turning designs for measurement frames and designs for open type non-gantry structures are adopted, Abbe errors of instruments can be reduced, the movement precision of a precision linear flotation guide rail can be realized to the greatest extent, and parameters of the contour of a mother line of each to-be-detected aspheric surface can be directly measured by a sensing measuring system which synchronously moves with the precision linear flotation guide rail; the contours of multiple mother lines of the to-be-detected aspheric surfaces can be measured by the aid of precision flotation rotary technologies, and the contours of the large-caliber aspheric surfaces can be quickly detected in the high-precision manner by means of fitting.
Owner:BEIJING INSTITUTE OF TECHNOLOGYGY

Method for machining off-axis aspherical mirror

The invention discloses a method for machining an off-axis aspherical mirror. The method comprises the steps that 1, a rotary aspherical matrix structure is designed; 2, a through hole for inlaying of a daughter structure is excavated in a matrix blank; 3, a cylindrical integral workpiece is formed by combining a matrix and a daughter; 4, an initial spherical surface is machined; 5, grinding is guided through the surface shape error detecting result of a contourgraph, and the surface shape error between the initial spherical surface and a rotary aspheric surface is corrected; and 6, polishing is guided through the surface shape error detecting result of an interferometer or knife-edge tester, and the off-axis aspherical daughter is taken out after polishing is completed. The method is characterized in that the caliber D of the initial spherical surface is equal to the diameter of a cylinder of the integral workpiece, and the curvature radius R of the initial spherical surface is equal to the radius of a circumcircle of a triangle formed by a vertex in a rotary aspheric bus equation and a first point and a second point which are located at the position with the caliber of 1.414 D on a rotary aspheric bus. According to the method, the problem of the influence of the fringe effect in the prior art is solved, the efficiency of aspherical surface machining is improved, and machining difficulty is reduced.
Owner:苏州普锐仕精密光学科技有限公司
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