The application relates to the field of
semiconductor detection equipment and discloses a high-precision
wafer profiler, which comprises a frame body mechanism, a
wafer loading table mechanism, an optical detection mechanism, a temperature compensation mechanism and a central
processing mechanism, wherein the frame body mechanism comprises a base, the
wafer loading table mechanism is arranged above the base, the optical detection mechanism is arranged above the wafer loading table mechanism, the optical detection mechanism comprises a thickness detection
assembly, a notch detection
assembly and an
edge detection assembly, the thickness detection assembly, the notch detection assembly and the
edge detection assembly are integrated in one device, the device is highly integrated, carrying errors and repeated positioning errors are eliminated, the base is integrally cast from natural marble or high-strength
cast iron, the
measurement precision is stable, the XYZ theta four-degree-of-freedom motion module is combined with a fine adjustment mechanism of an optical lens, the accurate control and rapid focusing of the wafer position to be detected can be realized, and different specifications of wafers to be detected can be adapted.