Device and method for measuring effective arm length of swing arm type contourgraph

A technology of effective arm length and measuring device, which is applied in the direction of measuring device, optical device, instrument, etc., can solve the problems of effective arm length measurement error affecting the accuracy of data splicing, achieve convenient and fast measurement, and improve the effect of measurement accuracy

Active Publication Date: 2014-09-03
INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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Problems solved by technology

[0006] In order to solve the technical problem that the effective arm length affects the point coordinates on the surface and the measurement error of the effective arm length affects the accuracy of data splicing in the prior art, the purpose of the present invention is to provide the measurement of the effective arm that can accurately measure the swing arm type profiler Apparatus and method

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  • Device and method for measuring effective arm length of swing arm type contourgraph
  • Device and method for measuring effective arm length of swing arm type contourgraph
  • Device and method for measuring effective arm length of swing arm type contourgraph

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Embodiment Construction

[0022] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be described in further detail below in conjunction with specific embodiments and with reference to the accompanying drawings.

[0023] Such as figure 1 As shown, the structure of the device for measuring the effective arm length of a swing arm profiler by a laser tracker includes: a first target ball 1, a second target ball 2, a fine-tuning mechanism 3, a cross arm 4, a cross arm support 5, and a counterweight 6. Computer 7, first angle block 8, cross-arm turntable 9, second angle block 10, laser tracker 11, workpiece turntable 12, mirror surface to be measured 13, contact sensor 14 and worktable 15, wherein: the first target The ball 1 and the second target ball 2 are connected to the fine-tuning mechanism 3 by magnetic adsorption; one end of the cross arm 4 is placed in the installation hole of the fine-tuning mechanism 3; Place and pass throug...

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Abstract

The invention provides a device and method for measuring the effective arm length of a swing arm type contourgraph. The device comprises a first target ball, a second target ball, a fine-tuning mechanism, a cross arm, a cross arm support, a balance weight block, a computer, a first angle block, a cross arm turntable, a second angle block, a laser tracking instrument, a workpiece turntable, a mirror face to be tested, a touch type sensor and a work table face. The cross arm rotates around the axis of the cross arm turntable, a measurement head ball center of the touch type sensor, the ball center of the first target ball and the ball center of the second target ball form an arc track rotating around the axis of the cross arm turntable in space, and the laser tracking instrument respectively tracks and measures the arc track of the ball center of the first target ball and the ball center of the second target ball in the space. By means of data processing of the computer, the distance between the measurement head ball center of the touch type sensor and the axis of the cross arm turntable, namely the effectively arm length of the swing arm type contourgraph, is obtained.

Description

technical field [0001] The invention belongs to the field of precise measurement of geometric quantities, relates to a measuring device and method for the effective arm length of a swing-arm profiler, and is suitable for measuring the effective arm length of a swing-arm profiler. Background technique [0002] The effective arm length of the swing arm profiler refers to the vertical distance from the sphere center of the probe head of the contact sensor to the axis line of the cross arm turntable. [0003] The swing arm profiler is an effective in-situ inspection instrument for optical mirror processing. Its biggest feature is that it is directly installed next to the optical mirror to be tested, and the turntable of the optical mirror processing machine tool to be tested is used as the swing arm profiler. The working turntable is used to realize in-situ inspection of the mirror surface to be tested. During the measurement process of the swing-arm profiler, the effective arm...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/03
Inventor 陈林曹学东景洪伟匡龙李杰魏中伟
Owner INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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