White light interference profile meter

A white light interference and profiler technology, applied in the direction of using optical devices, instruments, measuring devices, etc., can solve the problems that the workpiece should not be too heavy, the magnification cannot be adjusted, and the optical path system needs to be adjusted too much. The effect of high measurement accuracy

Inactive Publication Date: 2010-01-13
HUAZHONG UNIV OF SCI & TECH
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Problems solved by technology

The vertical scanning resolution of the profiler can reach 1nm, but the instrument has the disadvantages that the

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Embodiment Construction

[0016] The present invention will be described in further detail below in conjunction with the accompanying drawings and examples.

[0017] The optical profiler provided by the invention mainly includes a vertical-direction macro-micro secondary driving and displacement measuring device, a white light interference displacement sensor based on the white light interference principle, and a universal workbench. The macro-micro secondary drive and displacement measurement device in the vertical direction is fixed on the column to drive the white light interference displacement sensor to move up and down to complete the vertical scanning of the workpiece. The vertical coarse drive also has an automatic focusing function. The motor drives the white light interference displacement sensor to move up and down to make the measurement objective lens focus. The workpiece to be tested is placed on the universal workbench, and the width of the interference fringes can be adjusted by adjusti...

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Abstract

The invention discloses a white light interference optical profile meter, comprising a macro/micro two-stage driving and displacement metering device in a vertical direction, white light interference displacement sensors and a universal table, wherein, the white light interference displacement sensors are fixed on the driving and displacement metering device fixed on an upright post, and the upright post is fixed on a vibration isolating table facet on which the universal table is placed. The wide-range three-dimensional optical profile meter based on white light interference and vertical scanning technology realizes rough and fine two-stage driving respectively by a servo motor and piezoelectric ceramic, so as to drive the white light interference displacement sensors to integrally move, adding the servo motor in vertical displacement can enlarge the measurement range, and vertical scanning is accomplished by the piezoelectric ceramic. The measurement of macro/micro displacement is completed by using the same diffraction grating metering system. The profile meter is capable of automatically searching for interference fringes and realizing the three-dimensional profiles of wide-range non-contact measurement planes and curved surfaces, and has the characteristics of high measurement precision, large measurement range, low cost and the like.

Description

technical field [0001] The invention belongs to the technical field of measuring devices, in particular to a large-range three-dimensional surface topography optical profile measuring instrument based on white light interference and vertical scanning technology. Background technique [0002] There are many methods for measuring the three-dimensional micro-topography of the surface, which can usually be divided into two categories: contact type and non-contact type. Vertical scanning white light interferometry is an optical non-contact measurement method developed on the basis of phase shift interferometry, which combines white light interference microscopy and phase shift interferometry. At present, the three-dimensional surface topography measurement systems based on vertical scanning white light interferometry mainly include the following: [0003] 1. Vertical scanning white-light interferometer for Linnik interference microstructure ([1] Pfortner A, Schwide J. Dispersion...

Claims

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Application Information

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IPC IPC(8): G01B11/24G01B11/25
Inventor 王淑珍常素萍王生怀谢铁邦刘晓军
Owner HUAZHONG UNIV OF SCI & TECH
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