7 results about "Phase shift interferometry" patented technology

The application provides a kind of multi-wavelength phase shift interferometry device, belongs to optical precision measurement technical field, specifically includes light source, for providing complex light;Measurement module, for dividing complex light into reference light and measurement light;The measurement light is transmitted to the measured article, and the light reflected by the measured article is spectrophotometric, to obtain transmission light and reflected light;Transmission light and reference light interfere, to obtain interference light;Filtering module, for filtering out a variety of wavelengths of monochromatic light from interference light;Detection module, for receiving filtered monochromatic light signal, and generating first photoelectric signal;Spectrometer, for receiving reflected light, and generating second photoelectric signal;Data acquisition card, for synchronously collecting first photoelectric signal and second photoelectric signal, and completing displacement operation, to obtain the measurement data of nanometer level precision of measured article. Through the processing scheme of the application, the nanometer level measurement precision measurement of more than 2mm even higher step 3D surface shape can be realized.

This invention discloses a spiral phase-shifting interferometry method and system based on vortex phase modulation, which solves the problems of high cost, complex process, and low measurement accuracy in existing interferometry methods. The key technical solution includes the following steps: starting the interferometer and performing system calibration; selecting and installing a standard mirror, performing polar axis transformation on the vortex light in the reference optical path to complete phase-shifting interference and obtain the initial phase distribution information of the vortex light; replacing the standard mirror with a test mirror, similarly performing polar axis transformation on the vortex light in the reference optical path to complete phase-shifting interference and obtain the test phase distribution information of the vortex light; and extracting the wavefront phase of the test mirror by calculating the difference between the initial phase distribution information and the test phase distribution information to obtain the surface shape distribution information of the test mirror. This spiral phase-shifting interferometry method based on vortex phase modulation can improve detection accuracy and robustness, achieving higher phase modulation resolution and measurement accuracy.

The application provides a kind of to realize transverse polarization focusing spectrometer super surface structure and method, including substrate, also include surface structure, the surface structure is arranged on the substrate;The surface structure is composed of multiple concentric ring arrangement subwavelength structure unit;The subwavelength structure unit carries out polarization independent focusing of incident light beam by transmission phase control, and the subwavelength structure unit carries out polarization dependent spectrometer of incident light beam by geometric phase control.The application can realize polarization dependent beam spectrometer and focusing function, with the advantages of simple structure, high integration, solve the technical problems that present point diffraction plate does not support simultaneous phase shift interferometry and interference fringe contrast is low, make the interference fringe contrast of point diffraction interferometry higher, higher, higher, faster.

The application discloses a kind of dynamic phase shift interferometry system and method thereof, including first depolarization beam splitter, first depolarization beam splitter side is sequentially spaced with first polarizer, collimating lens, pinhole filter, first attenuator and laser, the other side is sequentially spaced with third polarizer and object, the upside of first depolarization beam splitter is sequentially spaced with second polarizer, second attenuator and first mirror, the downside of first depolarization beam splitter is sequentially spaced with imaging lens, second depolarization beam splitter, polarization grating and second mirror, the side of second depolarization beam splitter is provided with camera;Polarization grating is liquid crystal circular polarization grating, liquid crystal molecule fast axis orientation is periodic continuous gradual change along x direction, overall has λ / 2 phase delay amount.The application can ensure high-precision phase measurement results while meeting the demand of dynamic measurement.

The invention provides a rotary line field confocal optical coherence tomography system and method. The rotary line field confocal optical coherence tomography system comprises a broadband light source; a collimator; the interference light path system comprises an optical splitter, a sample arm objective lens, a reference arm objective lens, a reflection reference surface and a sample to be observed; a cylindrical lens; a rotation driving unit; the imaging detection system comprises an imaging lens group, an area array detector and a pixel matrix; a sample arm axial displacement table; a reference arm axial displacement table; a data processing and control unit; and a synchronous trigger. Therefore, rapid, high-resolution and high-signal-to-noise-ratio tomography of biological samples such as skin tissues can be realized by adopting the technical scheme of combining cylindrical lens center rotation scanning, area array detector selective pixel reading and time domain phase shift interferometry.

The invention relates to the technical field of deep ultraviolet phase shift interferometry, and particularly provides an embedded phase shift mirror, a Mirau objective lens and a deep ultraviolet phase shift interferometry system.The system comprises a light source, the Mirau objective lens and a backside illuminated detector, the embedded phase shift mirror is adopted as a reference mirror, and the embedded phase shift mirror comprises a reference mirror body and an actuator; after entering the Mirau objective lens, the deep ultraviolet coherent light is split into reference light and probe light by the semi-transparent and semi-reflective mirror, and the reference light is reflected to the semi-transparent and semi-reflective mirror again after being emitted to the embedded phase-shifting mirror; the detection light is reflected to the semi-transparent and semi-reflective mirror after emitting to the sample to be detected, interference is formed between the reference light and the detection light, and an interference image is acquired; a plurality of interference images are obtained by changing the axial position of the embedded phase shifting mirror, and the three-dimensional height distribution of the sample to be measured is reconstructed according to the interference images. According to the invention, a set of complete deep ultraviolet phase shift interference measurement system which can be realized in an engineering manner is systematically designed, and the long-standing problem that the system is unstable in the deep ultraviolet band is solved.

The application discloses an automatic detection system of a rod-shaped milling cutter, and relates to the technical field of automatic detection.The system is built based on nonlinear state machine scheduling logic, and is provided with a cutter identification and parameter template library, pretreatment and pre-detection, multi-sensor fusion main detection, suspicious area re-detection, decision output and data recording modules.The pretreatment coarse measurement of geometric parameters realizes three-state classification and guides the detection process; the main detection module enables gravity deflection compensation for high-length-diameter-ratio cutters, corrects the sensor measurement value according to a cantilever beam model, and uses double-wavelength optical discrimination technology to distinguish real defects from surface attachments by using a differential feature vector.When the parameters are in a critical boundary, re-detection is started, the micro three-dimensional morphology is reconstructed by a phase shift interference method, and contact re-measurement is performed.The system fuses physical compensation and intelligent scheduling, ensures micron-level detection accuracy, greatly shortens the detection time, reduces the false detection rate, and provides precise quantitative data support for the whole life cycle management of the cutter.