The invention belongs to the technical field of surface
topography measurement, and discloses a method and a device for
fluorescence interference microscopic measurement based on stimulated
radiation. The method includes: firstly,
coating surfaces of a measured piece and a
reference mirror; secondly, subjecting the measured piece and the
reference mirror to stimulation of
monochrome detection
laser; and finally, resolving interference fringes on a detection surface. The device a
laser device, a converging objective lens, a first pinhole, a collimation and beam expanding objective lens, a
beam splitting prism, a reference focusing objective lens, the
reference mirror, a displacement driver, a detection focusing objective lens, the measured piece, an imaging converging objective lens, a narrow-band filter, a second pinhole and a
detector, wherein the converging objective lens, the first pinhole, the collimation and beam expanding objective lens, the
beam splitting prism, the reference focusing objective lens, the reference mirror and the displacement driver are disposed on a direct light path of the
laser device along a light transmitting direction, the detection focusing objective lens and the measured piece are disposed on a reflected light path of the
beam splitting prism, and the imaging converging objective lens, the narrow-band filter, the second pinhole and the
detector are disposed on a transmission light path of the beam splitting prism. By the design that surfaces of the measured piece and the reference mirror are coated by the aid of a
vacuum evaporation coating method, measurement light is guaranteed to be capable of returning to a detection
system after being reflected by a measured surface, high-NA(
numerical aperture) and high-slope surface detection is achieved, and the device is applicable to ultra-precise measurement of three-dimensional topographies of high-NA and high-slope spherical surfaces, aspheric surfaces and free-form surfaces.