Microwave device impedance measurement calibration method

Abstract

The invention introduces a microwave device impedance measurement calibration method. The method comprises the following steps: (1), calculating time-delay transmission line transmission parameters through real-time measured data of straight-through calibration member scattering parameters and time-delay calibration member scattering parameters; (2), embedding a newly added virtual transmission line in an original time-delay calibration member, and calculating the transmission parameters of a virtual time-delay calibration member; (3), according to a conventional TRL calibration method, extracting calibration coefficients of a measuring clamp, and performing matrix inversion and multiplication operation to obtain a microwave device de-embedding transmission parameters; and (4), performing impedance normalization transformation on the microwave device de-embedding transmission parameters to obtain normalized microwave device normalization scattering parameters relative to system measurement reference impedance. The method makes up the measurement errors caused by inconsistence of transmission line characteristic impedance and the system measurement reference impedance, and realizes microwave device impedance measurement with an ultra wide band and high precision. At the same time, the improved microwave device impedance measurement calibration method can substantially reduce design processing requirements of a calibration device, thereby having high versatility.

Description

technical field [0001] The invention relates to an impedance measurement and calibration method, in particular to a microwave device impedance measurement and calibration method with de-embedding function. Background technique [0002] Microwave devices such as field effect transistors, transistors, detector tubes, chip capacitors, chip inductors, etc. are often used in microwave circuit design. Because the operating frequency is too high, the device package will introduce parasitic effects, so it is necessary to accurately measure the impedance characteristics of the device . [0003] The impedance characteristics of microwave devices are generally described by scattering parameters (S parameters). The measuring instrument usually chooses a vector network analyzer, but a vector network analyzer can only measure microwave devices that can match its ports, such as coaxial ports and waveguide ports. There are many types of microwave device interfaces, and it is necessary to u...

AI Technical Summary

Problems solved by technology

[0005] The technical problem to be solved by the present invention is to provide an improved TRL calibration method for the limited measurement bandwidth of the TRL algorithm, which is based on the existing measurement data and uses virtual measurement technology to solve the local phase ambiguity problem, which can reduce the delay calibration number of pieces, simplified TRL measurement steps and expanded TRL algorithm calibration measurement bandwidth

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