Laser white light compound interference measuring device and method

Abstract

The invention discloses a laser white light compound interference measuring device and method. Monochromatic light phase shift interference can be combined with white light scanning interference to improve the measurement performances of the system. The measurement device comprises a white LED light source, a collimating lens, a filter, an optical microscopic interference module and an image acquisition device. The measurement method comprises the steps of: performing white light scanning interferometry of a measured sample; performing monochromatic light phase shift interferometry, wherein itis only needed to put the filter at front of a beam splitter mirror, and other portions are the same as the white light scanning interference; and combining a white light scanning interferometry andthe monochromatic light phase shift interferometry to solve the phase fuzzy problem in the monochromatic light phase shift interference. Compared to the white light canning interference, a compound interferometry result is higher in precision. Besides, the system provided by the invention employs an Michelson interference structure, the transverse measurement range is far larger than the measurement range of a commerce white light interference Mirau structure, and therefore, the laser white light compound interference measuring device and method has bigger advantage for large-size part surfacedetection.

Description

technical field [0001] The invention belongs to the multidisciplinary frontier research field of optics, precision detection, microscopic photography and signal processing algorithm, and specifically relates to a laser white light composite interference measurement system and method. Background technique [0002] In the 21st century, the fields of nuclear energy, large-scale integrated circuits, and aerospace are developing rapidly, and structural components are constantly developing in the direction of complexity, precision, and miniaturization, which poses new requirements and challenges for ultra-precision processing technology. More stringent requirements are placed on the surface quality of ultra-precision machined parts. As ultra-precision machining parts enter the microscopic scale, many traditional detection technologies have failed. It is urgent to develop corresponding ultra-precision detection technology to detect the surface of parts and locate problems in the pr...

AI Technical Summary

Problems solved by technology

[0007] The purpose of the present invention is to provide a laser white light composite interferometric measurement system and method for the problems existing in the current optical microscopic interference system, which is used to improve the measurement accuracy of the system and expand the scope of application

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