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A laser white light composite interferometric measurement system and method

A technology of interferometric measurement and white light, which is applied in measurement devices, optical devices, instruments, etc., to achieve the effect of expanding the measurement range of the system, expanding the measurement range and improving the measurement accuracy

Active Publication Date: 2021-01-19
XI AN JIAOTONG UNIV
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Problems solved by technology

[0007] The purpose of the present invention is to provide a laser white light composite interferometric measurement system and method for the problems existing in the current optical microscopic interference system, which is used to improve the measurement accuracy of the system and expand the scope of application

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  • A laser white light composite interferometric measurement system and method
  • A laser white light composite interferometric measurement system and method
  • A laser white light composite interferometric measurement system and method

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Embodiment Construction

[0030] In order to make the purpose, technical solution and advantages of the present invention more clear, the structure, principle, experimental process and results of the present invention will be further described below in conjunction with the accompanying drawings.

[0031] like figure 1 As shown, a kind of laser white light compound interferometry system provided by the present invention comprises a white light LED light source 1, a collimating lens 2, an optical filter 3, a beam splitter 4, a reference mirror 5, a piezoelectric ceramic displacement stage 6 and a controller A closed-loop micro-displacement system composed of 7, a microscope objective lens 8, a CCD photodetector 9 and a computer 10. The optical filter 3 can filter out single-frequency laser light from white light for monochromatic light phase shift interferometry; the optical filter can be removed when performing white light scanning interferometry.

[0032]In order to realize the measurement of the thre...

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Abstract

The invention discloses a laser white light compound interference measuring device and method. Monochromatic light phase shift interference can be combined with white light scanning interference to improve the measurement performances of the system. The measurement device comprises a white LED light source, a collimating lens, a filter, an optical microscopic interference module and an image acquisition device. The measurement method comprises the steps of: performing white light scanning interferometry of a measured sample; performing monochromatic light phase shift interferometry, wherein itis only needed to put the filter at front of a beam splitter mirror, and other portions are the same as the white light scanning interference; and combining a white light scanning interferometry andthe monochromatic light phase shift interferometry to solve the phase fuzzy problem in the monochromatic light phase shift interference. Compared to the white light canning interference, a compound interferometry result is higher in precision. Besides, the system provided by the invention employs an Michelson interference structure, the transverse measurement range is far larger than the measurement range of a commerce white light interference Mirau structure, and therefore, the laser white light compound interference measuring device and method has bigger advantage for large-size part surfacedetection.

Description

technical field [0001] The invention belongs to the multidisciplinary frontier research field of optics, precision detection, microscopic photography and signal processing algorithm, and specifically relates to a laser white light composite interference measurement system and method. Background technique [0002] In the 21st century, the fields of nuclear energy, large-scale integrated circuits, and aerospace are developing rapidly, and structural components are constantly developing in the direction of complexity, precision, and miniaturization, which poses new requirements and challenges for ultra-precision processing technology. More stringent requirements are placed on the surface quality of ultra-precision machined parts. As ultra-precision machining parts enter the microscopic scale, many traditional detection technologies have failed. It is urgent to develop corresponding ultra-precision detection technology to detect the surface of parts and locate problems in the pr...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B9/02
CPCG01B9/02027
Inventor 杨树明薛兴昌张国锋杨新宇杨林林吉培瑞
Owner XI AN JIAOTONG UNIV
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