Michelson Fluorescence Interferometric Micrometer Measuring Device Based on Stimulated Emission

Abstract

The invention belongs to the technical field of surface topography measurement and relates to a stimulated radiation based Michelson fluorescence interference microscopic measurement device. The measurement device comprises a laser device, a converging objective lens, a first pinhole, a collimation and beam expanding objective lens, a first beam splitting prism, a focusing objective lens, a displacement driver, a reference mirror, a second beam splitting prism, a measured piece, an imaging converging objective lens, a narrow-band filter, a second pinhole and a detector, wherein the converging objective lens, the first pinhole, the collimation and beam expanding objective lens and the first beam splitting prism are disposed on a direct light path of the laser device along a light transmitting direction, the focusing objective lens, the displacement driver, the reference mirror, the second beam splitting prism and the measured piece are disposed on a reflected light path of the first beam splitting prism, and the imaging converging objective lens, the narrow-band filter, the second pinhole and the detector are disposed on a transmission light path of the first beam splitting prism. Surfaces of the measured piece and the reference mirror are coated by the aid of a vacuum evaporation coating method. By the design that surface properties of the measured piece are changed through coating, measurement light is guaranteed to be capable of returning to a detection system after being reflected by a measured surface, high-NA(numerical aperture) and high-slope surface detection is achieved, and the measurement device is applicable to ultra-precise measurement of three-dimensional topographies of high-NA and high-slope spherical surfaces, aspheric surfaces and free-form surfaces.

Description

technical field

[0001] The Michelson fluorescence interference microscopic measurement device based on stimulated radiation belongs to the field of surface topography measurement technology, and particularly relates to a three-dimensional microstructure, microstep, and microgroove used in microstructured optical elements, microstructured mechanical elements, and integrated circuit elements. Ultra-precise, dynamic, high-speed interferometry method and device for groove line width and large numerical aperture optical element surface shape measurement. Background technique

[0002] Microscopic interferometry is to use the principle of light wave interference and microscopic magnification for surface measurement. With the rapid development of optoelectronic technology and computer technology, the phase shift technology that directly measures the interferometric phase distribution has been developed in the field of interferometry. The principle is: introduce a time modulation t...

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