Microstructure topography test system and method based on white light phase shift interferometry

Abstract

The invention relates to microstructure topography test system and method based on a white light phase shift interferometry. The system is sequentially provided with a digital CCD (Charge Coupled Device) camera, a microscopic optical system, a piezoelectric ceramic driver, an interference objective and a piezoelectric ceramic controller connected with the piezoelectric ceramic driver; and the system is also provided with a white light source supplying a light source and a PC (Personal Computer) machine, wherein the PC machine is connected with the digital CCD camera and the piezoelectric ceramic controller through an image collection card; and the input end of the interference objective corresponds to a sample to be tested arranged on a vibration isolation platform. The method comprises the following steps of: driving the interference objective to vertically scan an object to be tested through a phase shifter and recording a collected image; determining the center of gravity through a center of gravity method; solving an error of the gravity center position and a zero order fringe position through calculating phase information at the last position of a zero order stripe; and determining the position of a zero order interference fringe through comprehensively interfering the intensity information and the phase information of a signal. The invention has high measurement efficiency, widens measuring range and improves measurement resolution.

Description

technical field [0001] The invention relates to a method for testing microstructure appearance. In particular, it relates to a microstructure morphology testing system and testing method based on white light phase-shift interferometry that integrates light intensity information and phase information in interference signals and is applied to non-contact measurement of three-dimensional microstructure morphology in a large range. Background technique [0002] Microelectromechanical system (MEMS) refers to the combination of sensors, processors, and actuators in the form of microstructures into a complete system, and enables it to have the ability to perceive, analyze, judge, and respond. In the past thirty years, the rapid development of MEMS and related technologies has made its related products penetrate into almost every field of human life and exert a huge influence. From micro-sensors, micro-mechanical parts, to medical instruments, electronic devices, etc., while contin...

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Problems solved by technology

But at the same time, the measurement resolution is reduced, and when measuring some structures whose height is smaller than the central wavelength of the white light used, the edge will produce overshoot phenomenon due to diffraction

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