Microstructure topography test system and method based on white light phase shift interferometry
A technology of phase-shift interference and testing system, which is applied in the field of microstructure topography testing, can solve problems such as overshoot and lower measurement resolution, achieve high measurement efficiency, avoid unwrapping process, and expand the measurement range
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[0033] The microstructure morphology test system and test method based on white light phase shift interferometry of the present invention will be described in detail below in combination with the embodiments and the accompanying drawings.
[0034] The microstructure topography testing system based on white light phase-shift interferometry of the present invention comprises a digital CCD camera 4, a micro-optical system 5, a piezoelectric ceramic (PZT) phase shifter 6, an interference objective lens 7 and a display device arranged in sequence. The micro-optical system 5 provides the white light source 3 of the light source, the piezoelectric ceramic (PZT) driver 10 connected to the piezoelectric ceramic (PZT) phase shifter 6, and a PC 1, and the PC 1 passes through the image acquisition card 2 is connected with the digital CCD camera 4, and the PC 1 is also connected with the piezoelectric ceramic (PZT) driver 10 through the image acquisition card 2, and the input end of the int...
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