46results about How to "High measurement resolution" patented technology

The invention discloses a phase conjugate reflection bi-pass lighting confocal microscopic device, belonging to an optics measuring microtechnique. A collimation beam expander and a spectroscope are configured on a laser direct light path in sequence; a focusing objective lens and a three-dimensional micrometric displacement objective table are configured on a spectroscope reflecting light path; a collecting objective lens is configured on a spectroscope transmission light path; a collecting objective lens converging light is conducted to a photoelectric detector through conduction optical fibers; an ellipsoid reflecting lens is also configured on the spectroscope reflecting light path; a near focus of the ellipsoid reflecting lens is located on a surface of a sample put on the three-dimensional micrometric displacement objective table; and a phase conjugate reflecting lens is configured at a remote focus of the ellipsoid reflecting lens. According to the device, bi-pass lighting to a large curvature convex surface is carried out by adopting a characteristic that a reflection ray as a phase conjugate light wave of an incidence light of the phase conjugate reflecting lens can go back along an original way in combination with a characteristic that the ellipsoid reflecting lens is provided with a pair of isoplanatic image formation conjugate focuses, so that the device has a measurement ability of the large curvature convex surface and a characteristic of a high axial resolution force.

The invention discloses a time grating angular displacement sensor, comprising a stator and a rotor. The stator is formed by a stator substrate and two same sensing units. The two sensing units are parallel and are arranged on the upper end face and the lower end face of the stator substrate in a non-interfering manner. The sensing unit comprises an exciting coil and an induction coil. Wires are winded on the exciting coil and the induction coil in a lying 8 shaped winding method. The induction coils of the two sensing units are connected in series. The rotor is formed by an upper rotor substrate, a lower rotor substrate, a support column, and two same magnetic conductive units. The two magnetic conductive units are respectively embedded on the upper rotor substrate and the lower rotor substrate and are parallel to each other. The magnetic conductive unit is formed by winding a magnetizer or m same magnetizers on the shaft axis of the upper rotor substrate or the lower rotor substrate in equal interval arrangement. The initial positions of the magnetizers in the two magnetic conductive units satisfy specific conditions. The time grating angular displacement sensor can improve measurement resolution by double under the condition of not increasing reticle precision or number of pole-pairs of a sensor.

Provided is a GMR-MEMS integrated weak magnetic sensor adopting a plane micro-coil. The base of a micropressure bridge comprises a first base and a second base, the base is fixedly arranged on a spacer, the spacer is fixedly arranged on an insulating substrate, and a bridge body is connected between the first base and the second base. A piezoelectric patch is arranged on the bridge body and between the first base and the second base. A GMR sensitive element is arranged below the bridge body and is symmetrically arranged, magnetic force line collector in the GMR sensitive element comprises a first magnetic force line collector and a second magnetic force line collector, clearance is reserved between the first magnetic force line collector and the second magnetic force line collector, GMR resistors comprises a first GMR resistor, a second GMR resistor, a third GMR resistor and a fourth GMR resistor, the first GMR resistor, the second GMR resistor, the third GMR resistor and the fourth GMR resistor form a Wheatstone bridge, the first GMR resistor is located in the first magnetic force line collector, the second GMR resistor is located in the second magnetic force line collector, and the third GMR resistor and the fourth GMR resistor are located in the clearance. A modulation film is connected on a position, opposite to the modulation film, on the bridge body. The GMR-MEMS integrated weak magnetic sensor adopting the plane micro-coil has the advantages of being simple in structure, low in noise, low in cost, low in hysteresis and the like.

The invention relates to microstructure topography test system and method based on a white light phase shift interferometry. The system is sequentially provided with a digital CCD (Charge Coupled Device) camera, a microscopic optical system, a piezoelectric ceramic driver, an interference objective and a piezoelectric ceramic controller connected with the piezoelectric ceramic driver; and the system is also provided with a white light source supplying a light source and a PC (Personal Computer) machine, wherein the PC machine is connected with the digital CCD camera and the piezoelectric ceramic controller through an image collection card; and the input end of the interference objective corresponds to a sample to be tested arranged on a vibration isolation platform. The method comprises the following steps of: driving the interference objective to vertically scan an object to be tested through a phase shifter and recording a collected image; determining the center of gravity through a center of gravity method; solving an error of the gravity center position and a zero order fringe position through calculating phase information at the last position of a zero order stripe; and determining the position of a zero order interference fringe through comprehensively interfering the intensity information and the phase information of a signal. The invention has high measurement efficiency, widens measuring range and improves measurement resolution.

The invention relates to a micro displacement measuring system with double laser-source-adjustable Fabry-Perot interferometers, and belongs to the technical field of geometrical product measurement. According to the measuring system, two Fabry-Perot interferometers with wavelength-adjustable lasers as light sources are used for measuring the displacement of a measured target, the two adjustable light sources are used for alternately tracking the frequencies of different resonant modes of Fabry-Perot cavities, and the range of displacement measurement is broadened while it is guaranteed that the Fabry-Perot interferometers have the high measurement resolving ability. The micro displacement measuring system effectively solves the conflict between the improvement of the interferometer measurement resolving ability and the broadening of the measurement range, and can be applied to micro displacement measurement with nanometer-level accuracy.

The invention discloses an absolute type time-grating linear displacement sensor. The absolute type time-grating linear displacement sensor comprises a fixed ruler and a moving ruler. The fixed ruler is composed of a fixed ruler basic body, a first sensing coil and a second sensing coil. The first sensing coil and the second sensing coil are respectively wound in a horizontally-inverted-eight shape. The moving ruler is composed of a moving ruler basic body, a first excitation unit and a second excitation unit. The first excitation unit is composed of 4a1 first magnetizers and 4a1 first excitation coils. The second excitation unit is composed of 4a2 second magnetizers and 4a2 second excitation coils. The 4a1 first excitation coils are respectively provided with four paths of excitation currents, and the 4a2 second excitation coils are respectively provided with four paths of excitation currents. The moving ruler moves relative to the fixed ruler. The first sensing coil and the second sensing coil respectively output a first sensing signal and a second sensing signal. Phase demodulation processing is carried out on the first sensing signal and the second sensing signal, an obtained phase difference is expressed by the pulse number of an interpolated high frequency clock, and after conversion, the absolute displacement of the moving ruler is obtained. The sensor is capable of realizing absolute type linear displacement measurement, and the resolution and the precision are simultaneously improved.

The invention relates to a magnet displacement sensor, which is used for measuring displacement of a magnet without contacting with the sensor and comprises a plurality of magnetic sensitive elements, a strip-shaped supporting part and a detecting circuit. The magnetic sensitive elements are fixedly arranged on the strip-shaped supporting part and are arranged at certain intervals along a length direction to form a uniformly distributed linear array, each interval ranges from 1 millimeter to 20 millimeters, an input end of the detecting circuit is connected with the magnetic sensitive elements so as to detect output statuses of the magnetic sensitive elements within a range of a magnetic field effect when the magnet moves along the length direction parallel to the strip-shaped supporting part, and an output end of the detecting circuit is provided with a communication interface. The magnet displacement sensor can realize automatic intelligent measurement, and has the advantages of simplicity in structure and low cost.

The invention relates to an interferometry measurement system of micro-displacement based on cat eye reflecting principle, and belongs to the technical field of geometric measurement. The interferometry measurement system is characterized by applying cat eye reflecting principle into interferometry measurement of micro-displacement, providing a displacement measuring error correcting mathematical model introduced by cat eye reflector, and adopting a balanced double-optical-path optical system structure to improve disturbance-resisting capacity of the system. The error correction method is capable of reducing measuring error made by the cat eye reflector to manometer level. Hardware of the interferometry measurement system is composed of a stable frequency laser light source, a polarizing beamsplitting mirror, a lens-reflector cat eye reflector, a cube-corner prism, a wave plate, a polarizing film, necessary reflector and rectangular prism and photoelectric receiver. The system has the advantages of high measuring resolving power, strong disturbance-resisting capacity, non-contact measurement and the like, is used for solving the problem that interferometry measurement of micro-displacement cannot be conducted when the cube-corner prism is not used, and has significant popularization and application values in the measurement fields of micro-displacement, micro-vibration, thermal expansion parameter and the like.

Provided is a high-precision phase and frequence measuring system. An input signal conditioning circuit in the system respectively converts a channel A signal, a channel B signal and a reference clock signal from external input into pulse signals and sends the pulse signals to a field programmable gata array (FPGA) circuit. The FPGA circuit makes a rough count measurement on the time interval between the treated channel A signal and the channel B signal and generates two interpolating pulses at the beginning and the end of the time interval and respectively outputs two interpolating pulses into an integral analog extension circuit. Two integral pulses sent back from the integral artificial extension circuit are received, a count measurement on the pulses which are sent back are respectively made, combining the count measurement and delay correction parameters to obtain phases and frequencies of the A signal and the B signal through calculations, and the phases and frequencies are sent to a host computer through an asynchronous serial communication circuit. The integral extension circuit forms an integral voltage according to the interpolating pulses, compares, reforms and sends the integral voltage to the FPGA circuit. The asynchronous serial communication circuit is used for communicating with host computer serial ports and a parameter storing circuit is used for storing delay correction parameters.

The invention discloses a capacitance type flexible electronic tide staff. The tide staff comprises a flexible tide staff body serving as a sensor element and a processing circuit, wherein the flexible tide staff body comprises a plurality of flexible capacitance plates which are arranged in rows and tide staff supporting bodies which are embedded in the flexible capacitance plates and is used for improving the strength of the tide staff body and preventing errors due to the telescopic size of the length direction of the electronic tide staff, the flexible capacitance plates and the processing circuit are connected through a circuit and are used for achieving the function of the water level measurement, and the flexible capacitance plates are in a structure that adjacent two capacitance plates are arranged in the staggered mode. The tide staff is simple in structure, convenient to use, high in resolution power, little in accumulated error and large in water level measuring range. The tide staff can be bent, flexible capacitance plates serve as sensor elements and can be used for analog measurement and digital measurement, the high resolution is achieved through the analog measurement of the capacitance plates, the error is reduced through the digital measurement of the capacitance plates, and the tide staff is made of flexible materials.

The invention relates to a two-degree-of-freedom heterodyne optical grating interference measurement method and system with high tolerance. The system comprises a separate modulating heterodyne lasermodule, an optical grating interference mirror group and a photoelectric detection and signal processing unit; the separate modulating heterodyne laser module simultaneously outputs two lasers with different frequencies to parallelly enter into a first optical splitting surface to optical split at the same time, part of the incident lasers produce a reference beam to a reflector to enter into a third optical splitting surface, the other part of the lasers pass through a measured grating-backward reflector and form a secondary diffraction structure to obtain two measured beams, and the lasers enter into the second optical splitting surface is divided into two parts; and one part optically combines to form a first interference beam, the other part enters the third optical splitting surface and optically combines with the corresponding reference beam to form a second and third interference beams, and optical beat frequency signals of the three interference beams calculates horizontal andvertical displacement information of optical grating by photoelectric detection and signal processing. The method and system improve the optical fine fraction, and meanwhile, improve the angle tolerance of optical grating deflection.

The invention provides a uniaxially electrostatic-driven sensor for weak magnetic field measurement. The sensor comprises an insulating substrate, a pair of electrostatic driving electrodes, two pairs of input and output electrodes, a giant magnetoresistive (GMR) sensitive element, two same magnetic line collectors, a micro-cantilever, and a modulated film. The insulating substrate is plated withan electrode and a shallow groove is etched on the insulating substrate. The GMR sensitive element and the two magnetic line collectors are fixed on the surface of the insulating substrate as well asthe central axises of the GMR sensitive element and the two magnetic line collectors are formed into a straight line. The micro-cantilever employs a conductive silicon chip for manufacture and comprises a pedestal and a cantilever, wherein the pedestal is fixed on the insulating substrate and is connected with the cantilever and the modulated film is prepared on a lower surface of an upwarp end of the cantilever. A vertical distance from the modulated film to the GMR sensitive element is 8 to 15 micrometers. According to the sensor for weak magnetic field measurement provided in the invention, a modulation depth is great; a resolution is high; and the structure and the technology of the sensor are simple.

The invention relates to a self-adaption harmonic wave confocal microscopic measurement method for the illumination of an ellipsoidal reflector, belonging to the non-linear optical measurement. According to the method, an ellipsoidal reflection illumination system, a confocal microscopic measurement method, a self-adaption optical aberration correction method and a harmonic wave microscopic methodare organically combined, so that the harmonic wave microscopic measurement resolving power can be improved. A femtosecond laser pulse is subjected to beam shaping and scanning galvanometer reflection, enters the self-adaption optical aberration correction method and is subjected to phase modulation and aberration correction to generate illumination beams, and the illumination beams enter an ellipsoidal reflection mirror system and are assembled into a sample so as to generate stimulation focus light spots required by the generation of harmonic signals. The sample is stimulated by stimulationlight to simultaneously generate second and third harmonic signal, and the second and third harmonic signals are collected and analyzed by a double-path composited confocal microscopic measurement system on the right side. After being collected by a large-numerical aperture objective lens, the harmonic signals are separated into two wavelength signals by a bidirectional color selective mirror, are focused by a narrow band pass filter and an imaging objective lens, are transmitted through a needle hole and are received by a photomultiplier (PMT). An adopted harmonic wave collection module adopts a confocal collection mode. By virtue of an apodization effect of a confocal needle hole, the interference caused by aliasing signal noise to the analysis of the harmonic signals can be effectivelyinhibited, and the measurement resolving power of the microscopic system can be greatly improved.

The invention discloses a single sensor mechanical structure for weighing. According to the single sensor mechanical structure, a Rob will mechanism, a displacement mechanism and a supporting structure are integrally formed on a body, a rigid support of the Rob will mechanism is formed on one side of the body, a load-bearing rigid body on the rigid support is a weighing support, the displacement mechanism is formed along the inner lateral face of the rigid support of the Rob will mechanism, and a connecting long rod of the displacement mechanism extends to the supporting structure located on the opposite side of the rigid support of the Rob will mechanism inwards in the body. The single sensor mechanical structure has the advantages that the single sensor mechanical structure is composed of a flexible hinge and the rigid body, the flexible hinge is the displacement mechanism, high-accuracy conversion from quality signals to the displacement amount is achieved, and the measurement definition of the instrument can be improved; the single sensor mechanical structure has the advantages of being free of friction, abrasion and transmission gap, small in ineffective stroke, free of lubrication, capable of storing elastic energy and high in accuracy, stability and reliability, and has the return counter force.

The invention discloses a double-column-type time-grating linear displacement sensor. The sensor comprises a fixed ruler and a moving ruler. The fixed ruler comprises a fixed ruler matrix and first and second exciting coils. The first and second exciting coils are winded as a rectangular wave along a measurement direction. The moving ruler comprises a moving ruler matrix and first and second induction coils. The first and second induction coils are winded as a half-sine winding mode. The first and second induction coils directly face and are parallel to the first and second exciting coils. Two phase symmetry excitation currents flow into the first and second exciting coils. When the moving ruler moves relative to the fixed ruler, the first and second induction coils output two paths of induction signals. Through series connection and superposition, a travelling wave signal is formed. And then the travelling wave signal carries out phase comparison with a same frequency reference signal, a phase difference is expressed by an interpolated high frequency clock pulse number, and after conversion, a linear displacement is acquired. The structure of the sensor is simple, measurement resolution is high, batch manufacturing is easy to achieve and cost is low.

The invention relates to a radar snow depth automatic observer based on stepping frequency, wherein the radar snow depth automatic observer settles a technical problem of low detecting precision. A vertical distance between a radar host and a snow measuring plate which is mounted on ground and is level with a snow land measuring observing surface is not lower than 2.5 meters. The radar host comprises a transmitting antenna, a receiving antenna, a power amplifying unit and a signal generating unit, wherein the power amplifying unit and the signal generating unit are successively connected withthe transmitting antenna and the power amplifying unit performs linear amplification, and a receiver unit which is connected with the receiving antenna. The signal generating unit and the receiver unit are connected with a signal processing unit. The signal processing unit is connected with a communication module. The signal generating unit performs interaction with the receiver unit. The includedangle alpha between the wave beam center of the transmitting antenna and the receiving antenna and the vertical plane of the radar host is higher than 10 DEG. The signal generating unit comprises a signal generator for generating a stepping FM continuous wave signal and an excitation source. The radar snow depth automatic observer settles the problem in a relatively good manner and can be used for snow land depth measurement.

The invention discloses an optical triggering measuring head and a measurement method. The optical triggering measuring head comprises a measuring head optical path module and a measuring head sensing module, wherein the measuring head optical path module comprises a focusing lens I, a quarter-wave plate, a polarization splitting prism, a collimating lens, a light source, a rectangular prism arranged on the side edge of the polarization splitting prism, as well as a focusing lens II and a photoelectric detector which are arranged behind the rectangular prism in sequence; the measuring head sensing module comprises an optical fiber rod, a switching shell, a fixed shell, a flexible spring piece, a reflection piece and a measuring needle; the optical fiber rod is arranged in the fixed shell in a sleeving manner through the switching shell and is placed in front of the focusing lens I; an accommodating cavity is formed among the optical fiber rod, the switching shell and the fixed shell; an opening communicated with the accommodating cavity is formed in the front end of the fixed shell; the flexible spring piece is arranged at an opening in the accommodating cavity; the reflection piece and the measuring needle are connected through a connection rod and are respectively fixed at the middle parts of the inner and outer sides of the flexible spring piece. According to the optical triggering measuring head, the problems of relatively high anisotropism, low triggering precision and the like of an existing triggering measuring head technology are solved.

The invention belongs to the field of time measurement and particularly relates to a method and device for measuring the transmission time of electric signals in a double-frequency modulation wire. The device comprises a clock source, a master control unit, a standard signal generation unit, a conditioning and amplifying unit, a phase-difference measuring unit, a wire to be measured and a display unit. The method has the advantages that the period of standard sine wave signals with the high stability is utilized as a scale for transmission of the electric signals in the wire, so that the source tracing can be effectively carried out; the measurement on the transmission time can be carried out by phase difference before and after the standard sine waves with two frequencies are transmitted by the wire, so that the automatic measurement is realized, and simultaneously the resolution, the repeatability and the range of the measurement can be greatly improved.

The invention discloses a resistance type flexible electronic water gage, which includes a flexible resistor stripe serving as a sensing element, a processing circuit and dividing conductors, wherein a water gage support body is embedded in the flexible resistor stripe; the flexible resistor stripe is connected with the processing circuit through a circuit to measure the water level; and the dividing conductors divide the flexible resistor stripe into a plurality of resistor sections. The resistance type flexible electronic water gage provided by the invention has simple structure, high definition, small accumulated error and big water level range, is convenient to use and bendable, the different resistor sections formed through dividing the flexible resistor stripe via the built-in dividing conductors can be used for simulated measurement and digital measurement, the high definition is realized through the simulated measurement of the resistor sections, the digital measurement of the resistor sections reduces the accumulated error, and the water gage body is made of flexible material.

The present application discloses a precision goniometer. The precision goniometer comprises: a base, an air floating shaft assembly, a ring laser, a workbench, a conductive slip ring, and a circulargrating angle measuring assembly. The base has a mounting hole, and the air floating shaft assembly is disposed in the mounting hole; the ring laser is disposed on the top end of the air floating shaft assembly through a adapter plate and is used for dynamic angular metric testing; the workbench is disposed on a top cover of the air floating shaft assembly and is connected to the outside of the ring laser, and is used for placing an object to be tested; the conductive slip ring is disposed at a bottom end of the air floating shaft assembly; and the circular grating angle measuring assembly isdisposed at the bottom end of the air floating shaft assembly and sleeves the conductive slip ring, and is used for static angular metric testing. The precision goniometer realizes the angular metrictesting calibration of an angle polyhedron and an angle sensor during movement, can realize the dynamic measurement under the high motion speed, and has small measurement errors, a wide dynamic response range and better dynamic performance.

The invention discloses a device and method for measuring the linear expansion coefficient of a low-expansion material, which belongs to the technical field of measurement. A Fabry-Perot interferometer is adopted to measure the length of a sample, so that the measurement accuracy is improved. According to the invention, an acousto-optic modulator is adopted to generate additional optical frequencymovement; a frequency measurement system composed of the same frequency stabilized laser, the high-speed photoelectric receiver and the frequency counter is utilized to complete frequency measurementof two adjacent resonance peaks of the Fabry-Perot interferometer; and the length of the sample can be measured under the condition that the system cost is not significantly increased. According to the invention, absolute measurement can be carried out on the lengths of the sample at different temperatures; the limitation of small measurement range of a common Fabry-Perot interferometer is brokenthrough; continuous work of a length measurement system is not required to be interfered; and the operation is convenient. In conclusion, the device and the method have the advantages of being high in measurement accuracy, large in measurement range, simple in interference system structure, free of long-time continuous work and the like, and have an important application value in the aspect of measurement of the linear expansion coefficient of the low-expansion material.

The invention discloses a time grating angular displacement sensor, comprising a stator and a rotor. The stator is formed by a stator substrate and two same sensing units. The two sensing units are parallel and are arranged on the upper end face and the lower end face of the stator substrate in a non-interfering manner. The sensing unit comprises an exciting coil and an induction coil. Wires are winded on the exciting coil and the induction coil in a lying 8 shaped winding method. The induction coils of the two sensing units are connected in series. The rotor is formed by an upper rotor substrate, a lower rotor substrate, a support column, and two same magnetic conductive units. The two magnetic conductive units are respectively embedded on the upper rotor substrate and the lower rotor substrate and are parallel to each other. The magnetic conductive unit is formed by winding a magnetizer or m same magnetizers on the shaft axis of the upper rotor substrate or the lower rotor substrate in equal interval arrangement. The initial positions of the magnetizers in the two magnetic conductive units satisfy specific conditions. The time grating angular displacement sensor can improve measurement resolution by double under the condition of not increasing reticle precision or number of pole-pairs of a sensor.

The invention discloses a harmonic microscopic imaging method based on radially-polarized light illumination reflective confocal collection, and belongs to the field of nonlinear optical measurement.Pulsed laser emitted by a femtosecond laser is collimated by a collimation system, then converted into radially-polarized light by a polarization state converter, then focused by a large numerical aperture objective lens to a far focus of an ellipsoidal reflector, and reflected and focused by the ellipsoidal reflector to an imaging sample, and the imaging sample is placed at a near focus of the ellipsoidal reflector. Harmonic signals can be excited by nonlinear optical effect, and the excited harmonic signals are collected by another large numerical aperture objective lens. After the harmonicsignals are imaged by an imaging objective lens onto a detection surface of a detector after undesired wavelength of light is filtered by a narrow-band light filter piece to achieve harmonic microscopic measurement. A used harmonic collection module uses a confocal collection mode. The apodization effect of a confocal pinhole can effectively suppress the interference of aliasing signal noises on analysis of the harmonic signals, and greatly improve the measurement resolution of a microscopic system.

The invention discloses a high-resolution-degree soil sensor; a sensing probe is connected with an evaporator through a water absorption core; the top of the evaporator is provided with an evaporation cap; the evaporation cap is connected with the top of the water absorption core; the water absorption core is immersed in a liquid in a water storage pipe; the evaporation cap obtains moisture from the water storage pipe through the water absorption core, and simultaneously, the moisture is evaporated to the atmosphere; the bottom of the water absorption core is provided with a floating column; the outer wall of the floating column is provided with a water absorption layer with strong hydrophilicity, and the water absorption layer goes up and down along with the up and down of the surface of water; the sensing probe is a humidity sensing plaster body, the outer layer of the humidity sensing plaster body is a porous ceramic filter layer, and the outmost layer of the sensing probe is provided with a netted plastic protection cover. The sensor and the evaporator are in split type design, so the soil sensor is quite convenient to use, reliable in operation, and good in long-term stability, and the evaporation cap obtains the moisture from the water storage pipe through the water absorption core, simultaneously, the moisture is evaporated to the atmosphere, the floating column makes the distance between the evaporation cap and the surface of the water remain unchangeable still, the measurement resolution degree is high and is 1%, and the measurement accuracy can reach + / -3%.

High-precision roll angle measurement method and device based on transmission grating, and belongs to precise instrument manufacturing and precision test metering technology; a one-dimensional plane transmission grating is adopted as a sensitive device, and the roll angle variation measurement of the sensitive device is realized; the defects such as low measurement precision and short working distance in the existing method and device are overcome, a double-diffraction light beam is used for carrying out differential measurement, and measurement errors caused by light source light beam angle drift are eliminated; a light beam to be measured is parallel to the optical axis, the working distance of the measurement device is greatly increased, and meanwhile, a detection structure is more compact; the laser beam passes through the transmission grating twice, so that the system measurement resolution is doubled; the measurement system eliminates the influence of a deflection angle and a pitch angle on rotation angle measurement; so that the different measurement precision requirements can be met by replacing gratings with different wire pairs.

The invention relates to air pin type sensor. It includes pin body and pressure sensor. Its features are that one end of the pin body is nozzle of air supply; another end is measuring nozzle; its wall is connected with the pressure sensor; its cavity is air chamber. The invention has the advantages of microminiaturization structure, convenient installing and using, high measuring resolution which can be used in submicron size measuring.

The invention provides a device and method for measuring a free-form surface type and belongs to the field of optical microscopic imaging. The device comprises a sample to be measured, an electroluminescent film plated on the surface of the sample, positive and negative microelectrodes, an objective lens, an optical filter, a tube lens, a CCD, an electroluminescent film illumination portion and an optical imaging measurement portion. According to the method, the electroluminescent fluorescent dielectric film is plated on the surface of the sample, the surface of the sample is illuminated after energization, the free-form surface type can be measured in combination with an optical detection optical path, odd stripes and even stripes of the surface of the sample are illuminated through electroluminescence to replace traditional optical illumination, the problem that the part with large curvature is unmeasured because of illumination apertures is solved, and the surface appearance of the sample in an area with a large included angle between a normal and the axial direction can be measured.