Harmonic microscopic imaging method based on radially-polarized light illumination reflective confocal collection

A technology of radially polarized light and microscopic imaging, which is applied in the direction of material excitation analysis, etc., can solve the problems of harmonic signal analysis interference and reduce the measurement resolution of the microscopic system, so as to suppress interference, improve measurement resolution, and improve the structure. The effect of the characteristic

Inactive Publication Date: 2018-11-30
HARBIN INST OF TECH
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Problems solved by technology

However, in the process of harmonic microscopy imaging, aliasing signal noise will interfere with the analysis of harmonic signals, thereby reducing the measurement resolution of the microscopy system

Method used

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  • Harmonic microscopic imaging method based on radially-polarized light illumination reflective confocal collection
  • Harmonic microscopic imaging method based on radially-polarized light illumination reflective confocal collection
  • Harmonic microscopic imaging method based on radially-polarized light illumination reflective confocal collection

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Embodiment Construction

[0016] The implementation examples of the present invention will be described in detail below in conjunction with the accompanying drawings.

[0017] The schematic diagram of the reflective confocal collection harmonic microscopy imaging method based on radially polarized light illumination in this embodiment is as follows figure 1 shown. The pulsed laser light emitted by the femtosecond laser is first collimated by the collimation system, and then transformed into radially polarized light by the polarization state converter. Focusing on the imaging sample, the sample is placed in the near focus of the ellipsoid mirror. Harmonic signals can be excited by nonlinear optical effects, and the excited harmonic signals are collected by another large numerical aperture objective lens. The detection surface of the instrument can realize harmonic microscopic measurement.

[0018] In this embodiment, the vector model coordinate definition diagram based on the radially polarized light...

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Abstract

The invention discloses a harmonic microscopic imaging method based on radially-polarized light illumination reflective confocal collection, and belongs to the field of nonlinear optical measurement.Pulsed laser emitted by a femtosecond laser is collimated by a collimation system, then converted into radially-polarized light by a polarization state converter, then focused by a large numerical aperture objective lens to a far focus of an ellipsoidal reflector, and reflected and focused by the ellipsoidal reflector to an imaging sample, and the imaging sample is placed at a near focus of the ellipsoidal reflector. Harmonic signals can be excited by nonlinear optical effect, and the excited harmonic signals are collected by another large numerical aperture objective lens. After the harmonicsignals are imaged by an imaging objective lens onto a detection surface of a detector after undesired wavelength of light is filtered by a narrow-band light filter piece to achieve harmonic microscopic measurement. A used harmonic collection module uses a confocal collection mode. The apodization effect of a confocal pinhole can effectively suppress the interference of aliasing signal noises on analysis of the harmonic signals, and greatly improve the measurement resolution of a microscopic system.

Description

technical field [0001] The invention belongs to the field of optical microscopic measurement, and mainly relates to an ultra-precise non-contact measurement method for measuring three-dimensional fine structures in nano devices and biological samples. Background technique [0002] By using the nonlinear optical effects of the sample itself, such as second harmonic generation and third harmonic generation, microscopic imaging of biological samples without fluorescent labels, microstructure detection of nano-devices, and diagnosis of disease mechanisms can be performed. Radially polarized light has a strong axially polarized component at the focused focal plane and is an ideal illumination light mode for harmonic generation. However, in the process of harmonic microscopy imaging, aliasing signal noise will interfere with the analysis of harmonic signals, thereby reducing the measurement resolution of the microscopy system. [0003] Harmonic microscopy imaging is based on coll...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/63
CPCG01N21/63
Inventor 王伟波刘俭吴必伟谭久彬
Owner HARBIN INST OF TECH
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