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Device and method for measuring linear expansion coefficient of low-expansion material

A technology of expansion coefficient and measuring device, applied in the field of online expansion coefficient measuring device and low-expansion material linear expansion coefficient measuring device, can solve the problems of small frequency range, etc. Effect

Active Publication Date: 2020-08-14
BEIJING CHANGCHENG INST OF METROLOGY & MEASUREMENT AVIATION IND CORP OF CHINA
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  • Claims
  • Application Information

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Problems solved by technology

In order to solve the problem of small frequency range of the high-sensitivity high-speed photoelectric receiver, an acousto-optic modulator is used to generate additional optical frequency shift, so that the frequency of the signal to be measured is always within the working range of the high-speed photoelectric receiver

Method used

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  • Device and method for measuring linear expansion coefficient of low-expansion material
  • Device and method for measuring linear expansion coefficient of low-expansion material
  • Device and method for measuring linear expansion coefficient of low-expansion material

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Embodiment 1

[0034] Such as figure 1 , 2As shown, a low-expansion material linear expansion coefficient measurement device disclosed in this embodiment is composed of an interference length measurement module 1 , a temperature adjustment and measurement module 2 , and a control and data processing module 3 . The interferometric length measurement module is used to measure the length of the sample 4, which mainly includes: an adjustable laser 5, a first beam splitter 6, a first mirror 7, a second mirror 8, a photoelectric receiver 9, and a third mirror 10 , the first λ / 2 wave plate 11, the polarization beam splitter 12, the first lens 13, the acousto-optic modulator 14, the second lens 15, the λ / 4 wave plate 16, the fourth reflector 17, the second λ / 2 wave Sheet 18, light blocking plate 19, frequency-stabilized laser 20, second beam splitter 21, third beam splitter 22, polarizer 23, high-speed photoelectric receiver 24 and frequency counter 25. The temperature adjustment and measurement m...

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Abstract

The invention discloses a device and method for measuring the linear expansion coefficient of a low-expansion material, which belongs to the technical field of measurement. A Fabry-Perot interferometer is adopted to measure the length of a sample, so that the measurement accuracy is improved. According to the invention, an acousto-optic modulator is adopted to generate additional optical frequencymovement; a frequency measurement system composed of the same frequency stabilized laser, the high-speed photoelectric receiver and the frequency counter is utilized to complete frequency measurementof two adjacent resonance peaks of the Fabry-Perot interferometer; and the length of the sample can be measured under the condition that the system cost is not significantly increased. According to the invention, absolute measurement can be carried out on the lengths of the sample at different temperatures; the limitation of small measurement range of a common Fabry-Perot interferometer is brokenthrough; continuous work of a length measurement system is not required to be interfered; and the operation is convenient. In conclusion, the device and the method have the advantages of being high in measurement accuracy, large in measurement range, simple in interference system structure, free of long-time continuous work and the like, and have an important application value in the aspect of measurement of the linear expansion coefficient of the low-expansion material.

Description

technical field [0001] The invention relates to a device and method for measuring the coefficient of linear expansion of low-expansion materials, in particular to a device and method for measuring the coefficient of linear expansion using a Fabry-Perot interferometer to measure the length of a sample, and belongs to the technical field of precision measurement. Background technique [0002] Low-expansion materials have excellent properties such as small linear expansion coefficient, high temperature resistance, and thermal shock resistance, and are widely used in the field of precision engineering. For example, key components such as large space telescopes, ultraviolet lithography machines, and laser gyroscopes are all made of low-expansion glass-ceramics Made of low expansion materials. Solving for a linear expansion coefficient of 10 -8 K -1 The measurement of the coefficient of linear expansion of even smaller-scale low-expansion materials is not only helpful for precis...

Claims

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Application Information

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IPC IPC(8): G01N25/16G01N25/20
CPCG01N25/16G01N25/20
Inventor 李强任冬梅朱振宇李华丰段小艳
Owner BEIJING CHANGCHENG INST OF METROLOGY & MEASUREMENT AVIATION IND CORP OF CHINA
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