High-precision roll angle measuring method and device based on transmission grating

Abstract

High-precision roll angle measurement method and device based on transmission grating, and belongs to precise instrument manufacturing and precision test metering technology; a one-dimensional plane transmission grating is adopted as a sensitive device, and the roll angle variation measurement of the sensitive device is realized; the defects such as low measurement precision and short working distance in the existing method and device are overcome, a double-diffraction light beam is used for carrying out differential measurement, and measurement errors caused by light source light beam angle drift are eliminated; a light beam to be measured is parallel to the optical axis, the working distance of the measurement device is greatly increased, and meanwhile, a detection structure is more compact; the laser beam passes through the transmission grating twice, so that the system measurement resolution is doubled; the measurement system eliminates the influence of a deflection angle and a pitch angle on rotation angle measurement; so that the different measurement precision requirements can be met by replacing gratings with different wire pairs.

Description

technical field [0001] The invention belongs to the technical field of precision instrument manufacturing and precision test and measurement, and mainly relates to a high-precision roll angle measurement method and device based on a transmission grating. Background technique [0002] Precision small-angle measurement is the basis and important part of geometric metrology detection. It is widely used in microelectronics manufacturing, precision equipment manufacturing and calibration, optical component processing and detection, aerospace and large-scale equipment processing and assembly in the shipbuilding industry, as well as scientific research and engineering. It is widely used in manufacturing and other fields. With the continuous development of related fields, the requirements for angle measurement accuracy and measurement stability also increase. [0003] There are generally three angle errors in mechanical motion, and yaw angle errors, pitch angle errors, and roll angl...

AI Technical Summary

Problems solved by technology

Among them, the yaw angle and pitch angle errors can be measured by measurement technologies such as laser interferometry and self-collimation methods. The measurement technology has been mature and commercialized; for the roll angle error, according to the principle of laser It is impossible to directly measure the roll angle error, so it is difficult to obtain an accurate measurement value of the roll angle error, so the high-precision roll angle error measurement needs further research

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