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Optical triggering measuring head and measurement method

A probe and optical technology, applied in the field of optical trigger probe and measurement, can solve the problems of low trigger accuracy and large anisotropy, and achieve the effect of simple and quick installation, strong applicability and high measurement resolution

Active Publication Date: 2017-09-12
深圳力合精密装备科技有限公司
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] The present invention provides an optical trigger probe and a measurement method, which solves the problems of large anisotropy and low trigger accuracy in the above-mentioned existing trigger probe technology

Method used

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  • Optical triggering measuring head and measurement method
  • Optical triggering measuring head and measurement method
  • Optical triggering measuring head and measurement method

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Embodiment

[0028] Such as Figure 1 to Figure 4 As shown, an optical trigger probe shown in this embodiment includes two parts: the probe optical path module and the probe sensing module. The probe optical path module includes focusing lenses 15 and 1 / 4 Wave plate 4, polarizing beam splitting prism 3, collimating lens 2, laser diode 1 and the rectangular prism 13 that is arranged on polarizing beam splitting prism 3 sides, the focusing lens 2 14 that is located at rectangular prism 13 rears and photodetector 15 successively; Wherein The laser diode selects visible light with a wavelength of 650nm, and the optical components of the optical path module of the probe match the components of the 650nm band. Square space, the fast axis direction of quarter wave plate 4 and the included angle of P-type polarized light vibration direction are 45 °, the right-angled surface of right-angled prism 13 is opposite to polarization splitter prism 3, another right-angled surface of right-angled prism 13...

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Abstract

The invention discloses an optical triggering measuring head and a measurement method. The optical triggering measuring head comprises a measuring head optical path module and a measuring head sensing module, wherein the measuring head optical path module comprises a focusing lens I, a quarter-wave plate, a polarization splitting prism, a collimating lens, a light source, a rectangular prism arranged on the side edge of the polarization splitting prism, as well as a focusing lens II and a photoelectric detector which are arranged behind the rectangular prism in sequence; the measuring head sensing module comprises an optical fiber rod, a switching shell, a fixed shell, a flexible spring piece, a reflection piece and a measuring needle; the optical fiber rod is arranged in the fixed shell in a sleeving manner through the switching shell and is placed in front of the focusing lens I; an accommodating cavity is formed among the optical fiber rod, the switching shell and the fixed shell; an opening communicated with the accommodating cavity is formed in the front end of the fixed shell; the flexible spring piece is arranged at an opening in the accommodating cavity; the reflection piece and the measuring needle are connected through a connection rod and are respectively fixed at the middle parts of the inner and outer sides of the flexible spring piece. According to the optical triggering measuring head, the problems of relatively high anisotropism, low triggering precision and the like of an existing triggering measuring head technology are solved.

Description

technical field [0001] The invention relates to the field of optical precision probes of three-coordinate measuring machines, in particular to an optical trigger probe and a measuring method. Background technique [0002] In recent years, with the rapid development of technologies such as the automobile industry, robotics, aerospace industry, micro-assembly, and micro-motor systems, higher requirements have been put forward for the dimensional tolerance requirements of the processed precision parts. The accuracy requirements of the instruments are also more stringent, among which the coordinate measuring machine (CMM) is a typical precision measuring instrument. The three-coordinate measuring machine is mainly composed of a three-dimensional micro-nano positioning platform and a sensing head with sensing functions. The sensing head is the core component of the three-coordinate measuring machine, which is directly related to the measurement accuracy of the measuring machine. ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/00
Inventor 陶彦博
Owner 深圳力合精密装备科技有限公司
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