Self-adaption harmonic wave confocal microscopic measurement method for illumination of ellipsoidal reflector

Abstract

The invention relates to a self-adaption harmonic wave confocal microscopic measurement method for the illumination of an ellipsoidal reflector, belonging to the non-linear optical measurement. According to the method, an ellipsoidal reflection illumination system, a confocal microscopic measurement method, a self-adaption optical aberration correction method and a harmonic wave microscopic methodare organically combined, so that the harmonic wave microscopic measurement resolving power can be improved. A femtosecond laser pulse is subjected to beam shaping and scanning galvanometer reflection, enters the self-adaption optical aberration correction method and is subjected to phase modulation and aberration correction to generate illumination beams, and the illumination beams enter an ellipsoidal reflection mirror system and are assembled into a sample so as to generate stimulation focus light spots required by the generation of harmonic signals. The sample is stimulated by stimulationlight to simultaneously generate second and third harmonic signal, and the second and third harmonic signals are collected and analyzed by a double-path composited confocal microscopic measurement system on the right side. After being collected by a large-numerical aperture objective lens, the harmonic signals are separated into two wavelength signals by a bidirectional color selective mirror, are focused by a narrow band pass filter and an imaging objective lens, are transmitted through a needle hole and are received by a photomultiplier (PMT). An adopted harmonic wave collection module adopts a confocal collection mode. By virtue of an apodization effect of a confocal needle hole, the interference caused by aliasing signal noise to the analysis of the harmonic signals can be effectivelyinhibited, and the measurement resolving power of the microscopic system can be greatly improved.

Description

technical field [0001] The invention belongs to the field of optical microscopic measurement, and mainly relates to an ultra-precise non-contact measurement method for measuring three-dimensional fine structures in nano devices and biological samples. Background technique [0002] By using the nonlinear optical effects of the sample itself, such as second harmonic generation and third harmonic generation, microscopic imaging of biological samples without fluorescent labels, microstructure detection of nano-devices, and diagnosis of disease mechanisms can be performed. Radially polarized light has a strong axially polarized component at the focused focal plane and is an ideal illumination light mode for harmonic generation. However, in the process of harmonic microscopy imaging, aliasing signal noise will interfere with the analysis of harmonic signals, thereby reducing the measurement resolution of the microscopy system. The aberration of the optical microscope system will ...

AI Technical Summary

Problems solved by technology

However, in the process of harmonic microscopy imaging, aliasing signal noise will interfere with the analysis of harmonic signals, thereby reducing the measurement resolution of the microscopy system

The aberrations of the optical microscopy system will also reduce the excitation efficiency of harmonic signals and reduce the resolution of harmonic microscopy imaging

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