Air needle type sensor

A sensor and gas needle technology, which is applied in the direction of instruments, measuring devices, and fluid devices, can solve the problems of small measurement point area, high resolution, and measurement accuracy that cannot be continuously improved, and achieve high measurement resolution and easy installation and use. convenient effect

Inactive Publication Date: 2007-04-18
NANCHANG UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The existing pneumatic measurement generally adopts the nozzle size of φ0.4~φ2mm, and its measurement accuracy cannot be further improved
For high-precision measurement occasions with small size tolerances, small measurement point area and high resolution are required, and the existing pneumatic measurement methods obviously cannot meet the requirements

Method used

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Embodiment Construction

[0010] As shown in Figure 1, the present invention includes a needle body 1 and a pressure sensor 2. It is characterized in that one end of the needle body 1 is an air inlet nozzle 3, and the other end is a measuring nozzle 5. The pressure sensor 2 is connected to the wall of the needle body 1, and the needle body 1 The inner cavity of the body 1 is an air chamber 4, and the entire needle body 1 is cylindrical, with a diameter of less than 10 mm and a length of less than 100 mm. Its air inlet nozzle 3 is parallel to or coincides with the central axis of the measuring nozzle 5 . The diameter of the nozzle is about 100um using a microfabrication method. During the measurement, the workpiece 6 faces the measuring nozzle 5, and the airflow ejected from the measuring nozzle is cylindrical, shaped like a thin needle. The measured displacement resolution can reach 0.1um.

[0011] As shown in Figure 2, the present invention includes a needle body 1 and a pressure sensor 2, which is ...

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Abstract

The invention relates to air pin type sensor. It includes pin body and pressure sensor. Its features are that one end of the pin body is nozzle of air supply; another end is measuring nozzle; its wall is connected with the pressure sensor; its cavity is air chamber. The invention has the advantages of microminiaturization structure, convenient installing and using, high measuring resolution which can be used in submicron size measuring.

Description

technical field [0001] The invention relates to an air needle sensor. Background technique [0002] The pneumatic measurement method uses high-pressure gas as the measurement medium, and uses the characteristics that the flow or pressure of the gas in the gas chamber changes with the geometric size or shape of the nozzle to convert the size or displacement into the change of flow or pressure. And further converted into electrical parameters, so as to realize the measurement of size and displacement. Since the pneumatic sensing method can realize non-contact measurement, and the high-pressure airflow has a cleaning effect when sprayed on the surface of the workpiece, the environmental requirements are not high; in addition to the advantages of simple structure, convenient operation and maintenance, and low cost, it is widely used in machinery, metallurgy, and aerospace. and other fields. The existing pneumatic measurement generally adopts the nozzle ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B13/02
Inventor 梁发云赵前程邓善熙
Owner NANCHANG UNIV
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