The invention discloses a high-energy beam peak moving processing path planning method and belongs to the technical field of high-energy beam manufacturing. According to the high-energy beam peak moving processing path planning method, when filling scanning paths of various to-be-processed layers are generated, between the adjacent various layers, positions, highest in power, in the high-energy beam scanning paths mutually deviate by set amounts, and therefore energy distribution in the processing process is improved, and then the processing quality and precision in the additive manufacturingor subtractive manufacturing process are improved; the method includes the following steps that firstly, a processing model is subjected to layering; secondly, peak moving processing path planning parameters are set; thirdly, a processing path of a first layer in the peak moving period is generated; fourthly, processing paths of subsequent various layers in the peak moving period are generated; and fifthly, the step (3) and the step (4) are repeated till the processing paths of all the layers are generated. According to the method, by adjusting the center position deviation of the high-energybeam scanning paths of the adjacent processing layers, that is, a pointed peak is moved away, peak moving for short, energy density homogenization of processing of the plurality of layers is achieved,and the processing quality and precision are improved.