Patents
Literature
Patsnap Copilot is an intelligent assistant for R&D personnel, combined with Patent DNA, to facilitate innovative research.
Patsnap Copilot

590 results about "Irradiation laser" patented technology

Laser cutting device, laser cutting method, and laser cutting system

It is an object of the present invention to provide a laser cutting device, a method for laser cutting and a laser cutting system with which it is possible to perform laser cutting of parts of various shapes through easy control, to prevent adhesion of dust or similar and scratches being formed in cut parts, and to send out such parts while reliably supporting the same. The present laser cutting device 5 is comprised with a material transferring means A that transfers a sheet-like material 11 in a feeding direction, a processing head B that is capable of irradiating laser light towards the material, a head moving means C that makes the processing head move in the feeding direction X and a width direction Y of the material, an upstream-sided supporting means (belt conveyer mechanism F) that supports the material on an upstream side of a downward portion of the processing head and that expands and contracts a supporting region R2 for the material accompanying movements of the processing head in the feeding direction, and a downstream-sided supporting means (belt conveyer mechanism E) that supports cut parts on a downstream side of a downward portion of the processing head and that expands and contracts a supporting region R1 for the cut parts accompanying movements of the processing head in the feeding direction.
Owner:TOYOTA STEEL CENT CO LTD

Laser irradiation apparatus, laser irradiation method, and method for manufacturing semiconductor device

An aggregation of crystals extending long in the scanning direction (a long crystal grain region) is formed when a continuous wave laser oscillator (a CW laser oscillator) is employed for annealing the semiconductor film in the manufacturing process of a semiconductor device. The long crystal grain region has a characteristic similar to that of single crystal in the scanning direction, but there is restriction for high integration because of the small output of the CW laser oscillator. pa In order to solve the problem, a pulsed laser beam 1 having a wavelength absorbed sufficiently in the semiconductor film is used in combination with a laser beam 2 having a high output and having a wavelength absorbed sufficiently in the melted semiconductor film. After irradiating the laser beam 1 to melt the semiconductor widely, the laser beam 2 is irradiated to the melted region. And then the laser beam 2 and the semiconductor film are moved relatively while keeping the melting state so as to form the long crystal grain region. The laser beam 2 keeps to be irradiated to the semiconductor film until the laser beam 1 is irradiated, and the output of the laser beam 2 is attenuated when the laser beam 1 is irradiated so as not to give the energy more than is needed so that the very uniform laser annealing becomes possible. Thus the long crystal grain region having a width 10 times as broad as the conventional one can be formed.
Owner:SEMICON ENERGY LAB CO LTD

Laser processing device

The invention provides a laser processing device, which is capable of effectively collecting and discharging dust like debris generated by irradiating laser ray from a condenser to an object to be processed. The laser ray irradiation component comprises a laser ray oscillator, a condenser having a condensing lens for condensing laser rays, and a dust discharging component which is disposed at the end of the condenser near the downstream side of the laser ray irradiation direction. The dust discharging component comprises a dust collector, consisting of an upstream sidewall, a downstream sidewall and an outer sidewall. The upstream sidewall is provided with a first opening which enables the laser ray irradiated from the condenser to pass and acquire air obtain. The downstream sidewall is provided with a second opening which enables the laser ray irradiated through the first opening to pass and suck dust. The outer sidewall is connected to the upstream sidewall and the downstream sidewall, forming a dust collecting room. The outer sidewall is provided with an exhaust outlet enabling the dust collecting room and a suction source to commutate with each other. An outer air acquiring channel which enables the first opening to communicated with the outer air is disposed between the dust collector and the condenser.
Owner:DISCO CORP

Multi-irradiation laser quenching method and device

The invention discloses a laser quenching method and device. According to the method, single heating in the conventional laser quenching technology is changed into multi-irradiation heating, or even high-frequency multi-irradiation heating by combining multi-irradiation heating with a quick scanning function of a rotating mirror; the heat conduction process caused by input of laser energy is injected into the surface of a workpiece within short heating time in a multi-stacking mode, so that the accumulation of the laser energy absorbed by a metal base body is increased, and the accumulation of the heat conduction depth is also increased. The device comprises a laser device, a control system, a light guide system, a mechanical motion device and a laser processing head. Even if technical parameters adopt high laser power, and when the scanning speed is high, and an irradiation interval exists, the surface temperature of the metal is always controlled to be below a melting point, and heat can be effectively and continuously expanded from the surface of the workpiece into the workpiece; and therefore, on the premise that the surface of the metal is prevented from being melted, the depth of an austenitizing region on the surface of the workpiece is increased, and the laser quenching efficiency is obviously improved.
Owner:WUHAN HIVALUE INTELASER LTD

Laser irradiation apparatus, laser irradiation method, and method for manufacturing semiconductor device

An aggregation of crystals extending long in the scanning direction (a long crystal grain region) is formed when a continuous wave laser oscillator (a CW laser oscillator) is employed for annealing the semiconductor film in the manufacturing process of a semiconductor device. The long crystal grain region has a characteristic similar to that of single crystal in the scanning direction, but there is restriction for high integration because of the small output of the CW laser oscillator. In order to solve the problem, a pulsed laser beam 1 having a wavelength absorbed sufficiently in the semiconductor film is used in combination with a laser beam 2 having a high output and having a wavelength absorbed sufficiently in the melted semiconductor film. After irradiating the laser beam 1 to melt the semiconductor widely, the laser beam 2 is irradiated to the melted region. And then the laser beam 2 and the semiconductor film are moved relatively while keeping the melting state so as to form the long crystal grain region. The laser beam 2 keeps to be irradiated to the semiconductor film until the laser beam 1 is irradiated, and the output of the laser beam 2 is attenuated when the laser beam 1 is irradiated so as not to give the energy more than is needed so that the very uniform laser annealing becomes possible. Thus the long crystal grain region having a width 10 times as broad as the conventional one can be formed.
Owner:SEMICON ENERGY LAB CO LTD
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products