The invention discloses an edge exposure device. The edge exposure device comprises an adsorption and rotating platform for adsorbing and driving a silicon chip to rotate, a motor for supplying power for the adsorption and rotating platform, an edge exposure lens assembly comprising an edge exposure camera lens and an exposure spot monitoring lens, wherein along an optical propagation direction, the edge exposure camera lens orderly comprises an exposure light source, first and second fly-eye lenses, a first cylindrical surface zoom lens group and a second cylindrical surface zoom lens group orthogonal to the first cylindrical surface zoom lens group, and a controller for controlling the motion of the motor, the edge exposure camera lens and the exposure spot monitoring lens. Through respective adjustment of combined focal length of the first cylindrical surface zoom lens group and the second cylindrical surface zoom lens group, edge exposure field length and width are controlled respectively, through cooperation of the first and second fly-eye lenses and the first and second cylindrical surface zoom lens groups, an exposure field is obtained, and through coaxial exposure field light spot imaging or energy detection light path, automatic focusing, exposure dosage and exposure size monitoring functions are obtained.