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Absolute type time-grating linear displacement sensor

A linear displacement, absolute technology, applied in the direction of instruments, measuring devices, electrical devices, etc., can solve difficult problems such as measurement resolution and measurement accuracy

Active Publication Date: 2016-02-03
重庆大族时栅科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The time grating linear displacement sensor based on the principle of electromagnetic induction can be applied to the working environment with poor environment, but most of them are incremental linear displacement sensors at present, and even if the displacement sensor with single-period structure is used for absolute linear displacement measurement, It is difficult to guarantee its high measurement resolution and measurement accuracy

Method used

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Examples

Experimental program
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Effect test

Embodiment 1

[0030] Embodiment 1: as Figure 1 to Figure 6 The absolute time grating linear displacement sensor shown includes fixed scale 1 and moving scale 2.

[0031] The fixed length 1 is made of a magnetically conductive fixed length substrate 13, a first induction coil 11 and a second induction coil 12. The fixed length substrate 13 adopts a cuboid iron substrate, and the long side direction of the fixed length substrate 13 is the measurement direction. The upper part of the front surface of the ruler base 13 is provided with a first wire insertion groove 131, and the first induction coil 11 is embedded in the first wire insertion groove 131. Embedded in the second wire slot 132, the first induction coil 11 and the second induction coil 12 do not interfere with each other (that is, the first induction signal generated by the first induction coil 11 and the second induction signal generated by the second induction coil 12 do not affect each other).

[0032] The first induction coil ...

Embodiment 2

[0038] Embodiment 2: as Figure 7 to Figure 9 The structure and working principle of the absolute time grating linear displacement sensor shown are mostly the same as those in Embodiment 1, the difference is that the first induction coil 11 and the second induction coil 12 are independently arranged on a fixed-length printed circuit board. On the wiring layer of the circuit board 14, the fixed-length printed circuit board 14 is installed on the fixed-length substrate 13, and the initial position of the first induction coil winding track (corresponding to Figure 7 Point C in the measurement direction and the starting position of the second induction coil winding track (corresponding to Figure 7 Point D in the center) is 2mm apart. The first excitation coil 212 is arranged on the first printed circuit board 24, and the center of the first printed circuit board is provided with a rectangular hole matching the shape of the first magnetic conductor 211, and the first printed cir...

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Abstract

The invention discloses an absolute type time-grating linear displacement sensor. The absolute type time-grating linear displacement sensor comprises a fixed ruler and a moving ruler. The fixed ruler is composed of a fixed ruler basic body, a first sensing coil and a second sensing coil. The first sensing coil and the second sensing coil are respectively wound in a horizontally-inverted-eight shape. The moving ruler is composed of a moving ruler basic body, a first excitation unit and a second excitation unit. The first excitation unit is composed of 4a1 first magnetizers and 4a1 first excitation coils. The second excitation unit is composed of 4a2 second magnetizers and 4a2 second excitation coils. The 4a1 first excitation coils are respectively provided with four paths of excitation currents, and the 4a2 second excitation coils are respectively provided with four paths of excitation currents. The moving ruler moves relative to the fixed ruler. The first sensing coil and the second sensing coil respectively output a first sensing signal and a second sensing signal. Phase demodulation processing is carried out on the first sensing signal and the second sensing signal, an obtained phase difference is expressed by the pulse number of an interpolated high frequency clock, and after conversion, the absolute displacement of the moving ruler is obtained. The sensor is capable of realizing absolute type linear displacement measurement, and the resolution and the precision are simultaneously improved.

Description

technical field [0001] The invention belongs to the technical field of precision measurement sensors, and in particular relates to an absolute time grating linear displacement sensor. Background technique [0002] A machine tool or production line installed with an absolute linear displacement sensor can obtain the current position information immediately after power-on again, and does not need to perform a home search operation, and can immediately continue the original processing operation from the interrupted point, so the absolute linear displacement measurement It can improve the working efficiency of the system; in addition, the absolute linear displacement measurement will not cause cumulative errors, and its reliability and anti-interference performance are better than incremental linear displacement measurement. [0003] At present, the precise absolute linear displacement measurement usually uses a grating scale as the sensing unit, but because of its working princ...

Claims

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Application Information

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IPC IPC(8): G01B7/02
Inventor 汤其富彭东林陈锡侯鲁进武亮王阳阳
Owner 重庆大族时栅科技有限公司
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