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Micro displacement measuring system with double light-source-adjustable Fabry-Perot interferometers

A technology of Perot interferometer and measurement system, which is applied in the field of micro-displacement measurement system, can solve problems such as the limitation of measurement range, achieve the effects of large measurement range, high measurement resolution, resolution of measurement resolution and expansion of measurement range

Active Publication Date: 2015-01-07
BEIJING CHANGCHENG INST OF METROLOGY & MEASUREMENT AVIATION IND CORP OF CHINA
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Problems solved by technology

[0004] The purpose of the present invention is to overcome the limitations of the Fabry-Perot interferometer in the measurement range, solve the calibration problem of the nano-scale laser interferometer and the high-precision micro-displacement sensor, and provide a dual-adjustable light source Fabry - Micro-displacement measurement system of Perot interferometer

Method used

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  • Micro displacement measuring system with double light-source-adjustable Fabry-Perot interferometers

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Embodiment 1

[0026]A micro-displacement measurement system using a double adjustable light source Fabry-Perot interferometer of the present invention includes: a frequency-stabilized laser source, an adjustable laser source A, an adjustable laser source B, a reference mirror, and a measurement mirror , polarizing beamsplitters, beam splitters, planar mirrors, photoelectric receivers and high-speed photoelectric receivers.

[0027] Taking the adjustable laser source A as the starting point, explain the positional relationship between the components of the system:

[0028] The right side of the adjustable laser source A is two polarizing beamsplitters, and the right side of the polarizing beamsplitter is a reference mirror and a measuring mirror in turn. These two mirrors form a Fabry-Perot cavity, and the right side of the measuring mirror The side is a polarization beam splitter, and the right side and top of the polarization beam splitter are photoelectric receivers;

[0029] Above the a...

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Abstract

The invention relates to a micro displacement measuring system with double laser-source-adjustable Fabry-Perot interferometers, and belongs to the technical field of geometrical product measurement. According to the measuring system, two Fabry-Perot interferometers with wavelength-adjustable lasers as light sources are used for measuring the displacement of a measured target, the two adjustable light sources are used for alternately tracking the frequencies of different resonant modes of Fabry-Perot cavities, and the range of displacement measurement is broadened while it is guaranteed that the Fabry-Perot interferometers have the high measurement resolving ability. The micro displacement measuring system effectively solves the conflict between the improvement of the interferometer measurement resolving ability and the broadening of the measurement range, and can be applied to micro displacement measurement with nanometer-level accuracy.

Description

technical field [0001] The invention relates to a micro-displacement measurement system using a double adjustable laser source Fabry-Perot interferometer, belonging to the technical field of geometric quantity measurement. Background technique [0002] The development of nano science and technology puts forward an urgent demand for high-accuracy micro-displacement measurement technology. Laser interferometry technology has always been dominant in high-accuracy micro-displacement measurement due to its traceable value and high measurement resolution, and the measurement accuracy can reach the nanometer level. However, when combined with a scanning probe microscope for traceable measurement of micro-nano surface topography, since the measurement accuracy of the interferometer is generally lower than the resolution of the scanning probe microscope by more than an order of magnitude, the traditional interferometer has been It cannot meet the calibration needs of scanning probe ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/02
Inventor 任冬梅朱振宇李华丰段小艳李强
Owner BEIJING CHANGCHENG INST OF METROLOGY & MEASUREMENT AVIATION IND CORP OF CHINA
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