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223 results about "Fabry–Pérot interferometer" patented technology

In optics, a Fabry–Pérot interferometer (FPI) or etalon is an optical cavity made from two parallel reflecting surfaces (i.e: thin mirrors). Optical waves can pass through the optical cavity only when they are in resonance with it. It is named after Charles Fabry and Alfred Perot, who developed the instrument in 1899. Etalon is from the French étalon, meaning "measuring gauge" or "standard".

Method and device for measuring and stabilization using signals from a Fabry-Perot

InactiveUS6178002B1Simple and low-cost and compact structureEasy to implementOptical measurementsLaser detailsPhase shiftedPath length
For measuring a laser frequency electronic signals can be generated by means of optical interferometers, especially Michelson, Mach-Zehnder and Fabry-Perot interferometers. These signals present profiles with a variation of the laser frequency which are practically identical but shifted in phase by 90°. It is common to generate such phase-shifted signals for frequency measurement in various systems, e.g. by means of a sigmameter, which present, however, disadvantages on account of the great number of the necessary high-quality optical components. The inventive method is based on the analysis of transmission and reflection signals of a Fabry-Perot interferometer (FPI) wherein the signals are obtained from two component beams (PBA and PBB) which are passed through slightly different path lengths within the interferometer. These differences in the length of the optical paths are so selected by different angles of incidence of the component beams into the Fabry-Perot interferometer or by an appropriate shape of the interferometer that the required 90° phase shift is adjusted between the detected intensity signals. From these signals electronic signals can be obtained for detection and also for a rapid correction of the laser frequency.
Owner:MUELLER WIRTS THOMAS

Novel Fabry-Perot interference MEMS (Micro Electro Mechanical System) sound wave sensor

The invention discloses a novel Fabry-Perot interference MEMS (Micro Electro Mechanical System) sound wave sensor, which comprises a collimator, an SOI (Silicon on Insulator) wafer and a bushing, wherein the bushing is arranged below the SOI wafer and is used for supporting the SOI wafer and fixing the collimator; the SOI wafer is provided with a sound-sensitive film; the central axis of the bushing is coincided with the central normal of a circular silicon film on the SOI wafer; the end face of the optical fiber collimator inserted into the bushing is 100-300 microns away from the sound-sensitive film. According to the novel Fabry-Perot interference MEMS sound wave sensor, the end face of the optical fiber collimator provided with a tail fiber and the inner surface of a silicon micro film construct two parallel surfaces of a Fabry-Perot interferometer, and the film is deformed when pressure generated by external sound waves is applied to the film, so that the cavity length of an Fabry-Perot interference cavity is changed. The detection of sound wave signals is realized by modulating the length variation of the F-P cavity, so that a micro microphone with high interference resistance and high sensitivity is provided for use in an environment with strong electromagnetic interference.
Owner:NO 27 RES INST CHINA ELECTRONICS TECH GRP

All-fiber direct detection anemometric laser radar system and closed-loop control method thereof

The invention discloses an all-fiber direct detection anemometric laser radar system and a closed-loop control method thereof. The system comprises an optical emission part, a frequency locking part, an emission part and a receiving part, wherein the optical emission part is used for emitting a modulated and amplified laser pulse; the frequency locking part is used for detecting the laser frequency variation, feeding back to the laser emission part, adjusting the laser wavelength and further realizing the function of locking the laser wavelength according to the deviation; the emission part is used for enabling the laser beam to point to the detection zone of the atmosphere, coupling the atmospheric back scattered light to a receiver through an optical telescope and modulating the near field signal strength; the receiving part is used for filtering out sun background from a signal and dividing the signal into two paths, one path of signal passes through a Fabry-Perot interferometer, the other path of signal is used as energy reference, the transmittance is obtained through the ratio of the signal intensities of the two paths of signal, and the wind velocity is obtained through inversion according to Doppler frequency shift. The laser radar adopts an all-fiber structure and has the advantages of small size and light weight, the manufacturing cost of the radar is low, the laser radar is controlled through a 3-level closed-loop, and the environmental adaptability and working stability of the laser radar are improved.
Owner:UNIV OF SCI & TECH OF CHINA

Optical fiber gas sensing method and sensor

A optical fiber gas sensor employs a optical fiber Fabry-Perot interferometer constituting a low reflection cavity lens and a measurement optical fiber to detect sound pressure wave signal generated by gas after absorbing light energy, and a realization method for optical acoustic gas sense technique is provided. Pulse modulated excited light is emitted by an excitation light source, passes through a band-pass filter and enters a gas cavity from a gas cavity window; the excited light emitted into the gas cavity generates a sound pressure wave which strength corresponds to measured gas concentration in the gas cavity after absorbing by the measured gas; the sound pressure wave is transmitted to vibration of a vibrating film sheet by the vibrating film sheet which is equipped at other end of the gas cavity; a measuring light signal emitted by measuring light source driven by a first drive power supply passes through a optical fiber wave combination equipment, a transmission optical fiber and a optical fiber wave separation equipment and enters a measuring optical fiber of the Fabry-Perot interferometer; concentration value of the measured gas is obtained by optical path difference of the return light beam and the light beam directly reflected by an optical end face.
Owner:NANJING XUFEI PHOTOELECTRIC

Optical Interferometric Pressure Sensor

A pressure measuring cell has a first housing body and a membrane arranged proximate the housing body, both of ceramic. The membrane has a peripheral edge joined to the first housing body to create a reference pressure chamber. A second housing body made of ceramic material is opposite the membrane and is joined to the peripheral edge of the membrane, the second housing body together with the membrane forming a measurement pressure chamber. The second housing body has a port for connecting the pressure measuring cell to a medium to be measured. The first housing body, the second housing body and the membrane are tightly connected along the peripheral edge of the membrane in a central area of the first housing body a hole is formed, reaching through the first housing body and at least in the central region of the membrane and opposite the hole a surface of the membrane is formed as a first optically reflective area. An optical fiber is arranged and tightly fixed within the hole for feeding light onto the surface of the membrane. The end of the fiber reaches at least the surface of the first housing body and is formed as a second reflective optical area linking the surface so that between the fiber end and the reflection area an optical cavity is present which forms a measuring section for determining the level of deflection of the membrane and which is part of a Fabry-Perot Interferometer.
Owner:INFICON HLDG AG

Fiber optic temperature sensor based on sealed micro cavity gas thermal effect and manufacturing method of fiber optic temperature sensor

The invention discloses a fiber optic temperature sensor based on a sealed micro cavity gas thermal effect and a manufacturing method of the fiber optic temperature sensor. A sensor structure comprises a Fabry-Perot micro cavity and an air micro cavity, and the two micro cavities are partitioned through a thin silicon membrane. The atmospheric pressure environments of the two micro cavities are respectively controlled in the sensor manufacturing process, so that the two micro cavities have pressure difference. When the temperature changes, according to an ideal gas state equation, the atmospheric pressure inside the two micro cavities is changed, so that a silicon wafer in the middle of the two micro cavities is deformed because of the change of the pressure difference. At the same time the inner surface of the silicon wafer and the reflection surface inside the Fabry-Perot micro cavity form a low-fineness Fabry-Perot interferometer, the deformation of the membrane is just the length change of the Fabry-Perot micro cavity, and temperature measurement is achieved by demodulating the length change of the cavity. Compared with the prior art, the temperature sensitivity of the sensor disclosed by the invention can be flexibly controlled by designing the diameter, the temperature and the pressure difference of the silicon wafer, and expected temperature sensitivity is achieved. In addition, the in-batch production of the senor is beneficial to cost reduction, and commercialization can be realized.
Owner:TIANJIN UNIV
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