Interferometry measurement system of micro-displacement based on cat eye reflecting principle

A measurement system and micro-displacement technology, applied in the field of geometric quantity measurement, can solve problems such as unsuitable use of corner prisms, and achieve the effect of solving the problem of high-accuracy non-contact micro-displacement measurement, easy implementation, and high measurement resolution

CN103105134AActive Publication Date: 2013-05-15BEIJING CHANGCHENG INST OF METROLOGY & MEASUREMENT AVIATION IND CORP OF CHINA
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Publication Date
2013-05-15

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Abstract

The invention relates to an interferometry measurement system of micro-displacement based on cat eye reflecting principle, and belongs to the technical field of geometric measurement. The interferometry measurement system is characterized by applying cat eye reflecting principle into interferometry measurement of micro-displacement, providing a displacement measuring error correcting mathematical model introduced by cat eye reflector, and adopting a balanced double-optical-path optical system structure to improve disturbance-resisting capacity of the system. The error correction method is capable of reducing measuring error made by the cat eye reflector to manometer level. Hardware of the interferometry measurement system is composed of a stable frequency laser light source, a polarizing beamsplitting mirror, a lens-reflector cat eye reflector, a cube-corner prism, a wave plate, a polarizing film, necessary reflector and rectangular prism and photoelectric receiver. The system has the advantages of high measuring resolving power, strong disturbance-resisting capacity, non-contact measurement and the like, is used for solving the problem that interferometry measurement of micro-displacement cannot be conducted when the cube-corner prism is not used, and has significant popularization and application values in the measurement fields of micro-displacement, micro-vibration, thermal expansion parameter and the like.
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Description

technical field

[0001] The invention relates to an interference micro-displacement measurement system based on the principle of cat's eye reflection, in particular to a balanced interferometer optical system based on the principle of cat's eye reflection that can be applied to non-contact micro-displacement measurement with nanometer accuracy, and belongs to the geometric quantity measurement technology field. Background technique

[0002] The development of micro-nano science and technology and the application of micro-electro-mechanical systems have put forward an urgent need for non-contact micro-displacement measurement technology. Laser interferometry technology has always been dominant in high-accuracy micro-displacement measurement due to its traceable value and high measurement resolution, and its measurement accuracy can reach the nanometer level. However, the method of using a corner cube prism to realize the 180° turning of the measuring beam in interferometry ca...

Examples

Embodiment 1

[0026] An interference micro-displacement measurement system based on the cat's eye reflection principle of the present invention, comprising: a frequency-stabilized laser light source 1, a small polarizing beam splitter 2, a right-angle prism 3, a half-wave plate 4, a corner cube prism 5, and a quarter-wave plate 6 , lens 7, plane mirror 9, large polarizing beam splitter 10, polarizer 11 and photoelectric receiver 12, such as figure 1 shown;

[0027] Taking the large polarizing beam splitter 10 as the center, explain the positional relationship between the various components of the system;

[0028] The left side of the large polarizing beam splitter 10 is a combination of two groups of small polarizing beam splitters 2 and rectangular prisms 3 placed side by side up and down. The small polarizing beam splitters 2 and rectangular prisms 3 are glued together or placed close to each other. The total of the two groups of mirrors The width is approximately equal to the width of t...