Device and method for measuring gas film gap of dynamic pressure motor on basis of simultaneous phase shifting interferometry

A synchronous phase-shifting, dynamic pressure motor technology, applied in measurement devices, optical devices, instruments, etc., can solve the problems of reducing the stability of the indication value, the repeatability of the measurement, the reduction of the measurement accuracy, the change of the reflectivity, etc. Accurate measurement, high resolution, and the effect of large measuring working distance

Inactive Publication Date: 2014-12-31
HARBIN INST OF TECH
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Problems solved by technology

[0004] In order to solve the problem that the measurement spot of the laser triangular light sensor is small, it is easily affected by the change of the reflectivity of the measured surface, thereby reducing the stability of the indication and the repeatability of the measurement, and the larger the working distance of the measurement, the lower the measurement accuracy. Further provide a dynamic pressure motor air film gap measurement device and method based on synchronous phase-shifting ...

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  • Device and method for measuring gas film gap of dynamic pressure motor on basis of simultaneous phase shifting interferometry
  • Device and method for measuring gas film gap of dynamic pressure motor on basis of simultaneous phase shifting interferometry
  • Device and method for measuring gas film gap of dynamic pressure motor on basis of simultaneous phase shifting interferometry

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specific Embodiment approach 1

[0038]Specific Embodiment 1: It will be described in conjunction with the accompanying drawings. The dynamic pressure motor air film gap measurement device based on synchronous phase-shifting interference in this embodiment is composed of a laser 1, a linear polarizer 2 and a collimating beam expander 3. The light source part, 1 / 2 wave plate 4, polarizing beamsplitter prism 5, first 1 / 4 wave plate 6, plane reflector 7 together with the second 1 / 4 wave plate 8, and the surface to be measured 9 form a Teman Green interference device, and the reference for merging again The light and the measurement light pass through the third 1 / 4 wave plate 10 and the Longji grating 11 to achieve equal light intensity splitting, and the separated light is selected by the diaphragm 12 to select the required four-way light through the four-quadrant polarizer 13 to achieve phase shifting, and finally The interferogram is collected by the first lens 14, the CCD 15 and the computer 16, and t...

specific Embodiment approach 2

[0039] Specific Embodiment 2: It will be described in conjunction with the accompanying drawings. The measurement method of this embodiment can realize high-precision measurement of the motor air film thickness by using the above-mentioned synchronous phase-shifting interferometry device. The specific implementation process is: first, the laser 1, the line The polarizer 2 and the collimator beam expander 3 form the light source part to produce linearly polarized light with a large spot. The linearly polarized light is converted into a linearly polarized light that is 45° different from the original vibration direction through the 1 / 2 wave plate 4, and is split by polarization. The prism 5 is divided into two beams of light whose polarization directions are perpendicular to each other and equal light intensity; secondly, the first beam of light passes through the first 1 / 4 wave plate 6 and the plane reflector 7, and the second beam of light passes through the second 1 / 4 wav...

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Abstract

The invention discloses a device and method for measuring a gas film gap of a dynamic pressure motor on the basis of the simultaneous phase shifting interferometry and relates to a device and method for measuring the gas film gap of the dynamic pressure motor. The invention solves the problems of a short measurement working distance of a capacitive sensor and limitation to measurement accuracy of a laser triangular sensor currently. The device disclosed by the invention mainly comprises an interference system, an orthogonal grating light splitting and phase shifting device and an image acquisition system; and the device respectively uses a round light spot and a strip light spot as axial/radial measurement light spots, adopts an orthogonal Ronchi grating to implement light splitting, adopts a four-quadrant polarizer to implement phase shifting and adopts a CCD (Charge Coupled Device) to carry out image acquisition. According to the scheme adopted by the invention, a probe of the device is vertically fixed at a certain distance relative to an axial/radial measurement plane of the dynamic pressure motor to be measured; and the simultaneous phase shifting interferometry principle, the grating diffraction light splitting principle, the polarization phase shifting characteristic and the image acquisition principle are utilized to measure axial and radial displacement change values corresponding to stiffness variation of a gas film of the dynamic pressure motor. The device has high stability and common-path, large-working-distance high-resolution measurement can be implemented.

Description

technical field [0001] The invention relates to a device and method for measuring air film gap of a dynamic pressure motor, in particular to a device and method for measuring air film gap of a dynamic pressure motor based on synchronous phase-shifting interference, and belongs to the technical field of optical detection and measurement. Background technique [0002] Due to its small size, low vibration and noise, high reliability, small temperature rise and friction loss, and long life, dynamic pressure motors are widely used in various high-precision, high-reliability gyro instruments, and are used in aviation, aerospace, and navigation And other navigation devices are also widely used. Dynamic pressure motors provide stable and reliable moments of inertia for gyro instruments, and their performance directly affects the navigation accuracy and reliability of instruments, platforms, missiles, and spacecraft, and air film stiffness is an important characteristic index of dyna...

Claims

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Application Information

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IPC IPC(8): G01B11/14
Inventor 黄向东谭久彬向小燕
Owner HARBIN INST OF TECH
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