The invention provides an
inductor equalization type
silicon-based traveling wave Mach-Zehnder modulator and a design method thereof, and relates to the technical field of photoelectron integration, the modulator introduces a micro-
inductor structure connected in series with a PN junction into a traditional traveling wave
electrode modulator to form a distributed RLC
resonance unit, and the high-
frequency response roll-off of a device is compensated by using the
resonance peaking effect of the modulator, so that the performance of the device is improved. And the electro-optical bandwidth is improved. Preferably, a plurality of micro-
inductor structures can be arranged along the traveling wave
electrode in a segmented manner and are cascaded periodically, and each structure can be realized through different
metal layers and is connected with the PN junction through a via hole. The design method of the modulator comprises the following steps of: accurately calculating a required
inductance value and integrating the
inductance value into
layout design to realize
bandwidth optimization. According to the scheme, on the premise that
modulation efficiency is not remarkably sacrificed and optical loss is not increased,
bandwidth limitation of a traditional
silicon-based modulator is broken through, the scheme is compatible with a standard
CMOS technology, and a key technical solution is provided for a next-generation high-speed
optical communication system.