The present application relates to the field of ultra-precision
manufacturing technology equipment, and particularly relates to a series-parallel
hybrid three-axis FTS device driven by
electromagnetism and
piezoelectricity and a control method thereof.The device comprises a plane-axis motion
assembly driven by electromagnetic stress and a vertical-axis motion
assembly driven by
piezoelectricity; the plane axis is directly driven by electromagnetic stress to drive a transmission shaft, and the
inertia of the motion component is low; the piezoelectric driver is nested in the interior of the transmission shaft of the plane axis, and the
vertical axis is fixed to the front and rear end surfaces of the transmission shaft to realize a series-parallel
hybrid structure and eliminate the
inertia coupling between the shafts.The X-axis adopts a two-degree-of-freedom control method in which a feedback path is connected in parallel with a feedforward path to realize fast and non-overlapping tracking of a step wave
signal.The present application breaks through the
bandwidth limitation of the traditional structure, realizes the compatibility of motion decoupling and large-
stroke high-frequency motion, guarantees the high positioning precision of the tool end and the high rigidity of the structure, and meets the efficient and high-precision
processing requirements of
metal microstructure components.