Coaxial Fizeau synchronous phase shifting interferometer capable of adjusting extended light illumination

A technology of expanding light source and synchronizing phase shifting, applied in the directions of instruments, scientific instruments, measuring optics, etc., can solve the problems of difficult miniaturization, large moving range of adjustable mirrors, and large instrument structure, and achieves reduction in volume and realization of small size. Optimizing and easy-to-operate effects
CN101788263AInactive Publication Date: 2010-07-28BEIJING INSTITUTE OF TECHNOLOGYGY
5 Cites 22 Cited by

Patent Information

Authority / Receiving Office
CN Β· China
Patent Type
Applications(China)
Current Assignee / Owner
BEIJING INSTITUTE OF TECHNOLOGYGY
Publication Date
2010-07-28
Estimated Expiration
Not applicable Β· inactive patent

Smart Images

  • Figure 1
    Figure 1
  • Figure 2
    Figure 2
  • Figure 3
    Figure 3
Patent Text Reader

Abstract

The invention relates to a coaxial Fizeau synchronous phase shifting interferometer capable of adjusting extended light illumination and belongs to the field of an optical interference measuring device. The coaxial Fizeau synchronous phase shifting interferometer comprises an extended light source assembly, a fronting Michelson type interferometer assembly and a Fizeau main interferometer. In the invention, the fronting interferometer assembly is adopted to generate two illumination light waves of orthogonal polarization state; polarization phase shifting interferometry between a measured surface and a reference surface is realized through match of spatial coherence of the fronting interferometer and the main interferometer; and an additional fringe is removed by using the characteristic of a short coherent optical length of an extended light source space. The coaxial Fizeau synchronous phase shifting interferometer has the characteristics of long measuring distance, continuous and adjustable contrast ratio, continuous and adjustable coherent optical length, easy operation, lower error requirement on a high frequency surface shape of the reference surface and the like; and the coaxial Fizeau synchronous phase shifting interferometer can be used in the fields of high precision detection of an optical element, optical element on-line detection and super-smooth surface detection and the like.
Need to check novelty before this filing date? Find Prior Art

Description

Technical field:

[0001] The invention belongs to optical interference measuring instruments, in particular to a Fizeau type synchronous phase-shifting interferometer. Background technique:

[0002] The Fizeau interferometer adopts the common optical path design of the measured beam and the reference beam. Except for the reference surface, the aberration of the interferometer optical system itself has basically the same influence on the measured beam and the reference beam, and most of them can cancel each other out. Fizeau-type interferometers only have high requirements on the accuracy of the reference surface, but have lower requirements on the processing and assembly accuracy of the system wave aberration and other components. Compared with non-common optical path interferometers such as Tieman Green type, the design and processing difficulty of Fizeau type interferometer is significantly reduced, so it becomes the first choice for wave aberration / surface detection of lar...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More